Method for producing metal oxide layers of predetermined structure through arc vaporization

Patent metadata

Field	Value
Publication number	US-10323320-B2
Application number	US-42869909-A
Country	US
Kind code	B2
Filing date	Apr 23, 2009
Priority date	Apr 24, 2008
Publication date	Jun 18, 2019
Grant date	Jun 18, 2019

Abstract

The invention relates to a method for producing layers consisting of ternary and higher oxides of metallic and semi-metallic components, wherein the formation temperature of these oxides can be determined essentially through the composition of the binary (or higher) alloy targets (based on the phase diagram).

First claim

The invention claimed is:

1. Method for depositing layers on a substrate, by means of arc vaporization of at least one target formed of an alloy in the presence of oxygen, wherein the layers comprise a ternary and/or higher oxide of metallic and/or semi-metallic components including Nb, characterized in that a formation temperature of the oxide that is synthesized during arc vaporization is based on a composition of the at least one target formed of an alloy, the method comprising steps of:
selecting the composition of the at least one target so that a temperature at a transition of the alloy to a liquid phase according to a phase diagram corresponds with the formation temperature of the oxide,
selecting the composition of the at least one target so that according to the phase diagram the composition of the at least one target results in a deposition of a main element of the at least one target as oxide in a corresponding structure, wherein the main element of the at least one target is aluminum and the corresponding structure is Al 2 O 3 in corundum structure,
wherein the alloy forming the at least one target consists of aluminum and the further metallic or semi-metallic components including Nb, wherein the alloy according to the phase diagram transitions to the liquid phase above 1000° C.,
wherein the oxide formation is achieved by the reaction of the at least one target with oxygen, and
wherein oxides of the alloy of the target are synthesized separately to avoid formation of mixed crystals, and
depositing the layers on the substrate.

2. Method according to claim 1 , characterized in that the layers have a proportion of more than 70 at % aluminum oxide in corundum structure by using at least one aluminum target produced by powder-metallurgy or cast-bonding and admixing smaller than 20 at % ratio of one or several metallic or semi-metallic components, characterized in that the admixtures have higher melting temperatures and thus, a melting temperature of the mixture of at least 1000° C. according to the phase diagram is achieved.

3. Method according to claim 1 , wherein the at least one further metallic or semi-metallic component is only Nb.

4. The method according to claim 1 , wherein the Nb in the at least one target is 10 at % and the oxide formation temperature of Al 2 O 3 is 1300° C.

5. The method according to claim 1 , wherein the Nb in the at least one target is 20 at % and the oxide formation temperature of the Al 2 O 3 is 1600° C.

6. The method according to claim 1 , wherein the metallic or semi-metallic element includes Au.

7. The method according to claim 1 , wherein the metallic or semi-metallic element includes B.

8. The method according to claim 1 , wherein the metallic or semi-metallic element includes C.

9. The method according to claim 1 , wherein the metallic or semi-metallic element includes Fe.

10. The method according to claim 1 , wherein the metallic or semi-metallic element includes Hf.

11. The method according to claim 1 , wherein the metallic or semi-metallic element includes Ir.

Assignees

• Ramm Juergen
• Oerlikon Surface Solutions Ag Pfaeffikon

Inventors

• Ramm Jürgen

Classifications

• C23C14/081

  of aluminium, magnesium or beryllium · CPC title

• Y10T428/12028

  Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, etc.] · CPC title

• C23C14/083

  of refractory metals or yttrium · CPC title

• C23C14/08

  Oxides (C23C14/10 takes precedence) · CPC title

• C23C14/325

  Electric arc evaporation · CPC title