Thermally conductive silicone composition, production method thereof, and semiconductor device
US-12104113-B2 · Oct 1, 2024 · US
US10323167B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10323167-B2 |
| Application number | US-201615267198-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 16, 2016 |
| Priority date | Oct 12, 2011 |
| Publication date | Jun 18, 2019 |
| Grant date | Jun 18, 2019 |
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A method for fabricating a ceramic material includes impregnating a porous structure with a mixture that includes a preceramic polymer and a filler. The filler includes at least one free metal. The preceramic polymer material is then rigidized to form a green body. The green body is then thermally treated to convert the rigidized preceramic polymer material into a ceramic matrix located within pores of the porous structure. The same thermal treatment or a second, further thermal treatment is used to cause the at least one free metal to move to internal porosity defined by the ceramic matrix or pores of the porous structure.
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What is claimed is: 1. A method for fabricating a ceramic material, the method comprising: infiltrating a porous structure with a mixture that includes a preceramic material and a filler, the filler including ceramic particles coated with the at least one free metal; rigidizing the preceramic material to form a green body; and thermally treating the green body to convert the rigidized preceramic material into a ceramic matrix within pores of the porous structure, wherein the thermal treatment or a second, further thermal treatment is used to cause the at least one free metal to move to internal porosity defined by the ceramic matrix or residual open pores of the porous structure. 2. The method as recited in claim 1 , wherein the porous structure comprises a fibrous structure. 3. The method as recited in claim 1 , wherein the at least one free metal comprises silicon. 4. The method as recited in claim 1 , wherein the at least one free metal is selected from a group consisting of boron, titanium, vanadium, chromium, zirconium, niobium, molybdenum, ruthenium, rhodium, hafnium, tantalum, tungsten, rhenium, osmium, iridium and combinations thereof. 5. The method as recited in claim 1 , wherein the ceramic particles have a higher thermal conductivity than the ceramic matrix. 6. The method as recited in claim 1 , including thermally treating the green body in an environment that is substantially free of oxygen, to convert the rigidized preceramic material into the ceramic matrix. 7. The method as recited in claim 1 , including thermally treating the green body at a temperature that is below the melting temperature of the at least one free metal, to convert the rigidized preceramic material into the ceramic matrix. 8. The method as recited in claim 1 , including thermally treating the green body at a first temperature to convert the rigidized preceramic material into the ceramic matrix, and wherein the second thermal treatment is used at a second temperature that is greater than the first temperature to cause the at least one free metal to move to the internal porosity defined by the ceramic matrix or the residual open pores of the porous structure. 9. The method as recited in claim 1 , including using at least two free metals and reacting the at least two free metals together to form a compound. 10. The method as recited in claim 1 , wherein the at least one metal forms a continuous phase within the ceramic matrix.
based on SiC · CPC title
Coating fibres · CPC title
having a specific pre-form · CPC title
obtained from {Si-containing} polymer precursors {or organosilicon monomers} · CPC title
Carbon, e.g. graphite · CPC title
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