Compact modular cathode

Patent metadata

Field	Value
Publication number	US-10319554-B2
Application number	US-201515539384-A
Country	US
Kind code	B2
Filing date	Dec 23, 2015
Priority date	Dec 24, 2014
Publication date	Jun 11, 2019
Grant date	Jun 11, 2019

Abstract

Example compact modular electron beam units are provided that can be used to generate electron beams using field emitter elements. A modular electron beam unit may comprise an electron beam source including a base portion, at least one field emitter element coupled to the base portion, the field emitter element including a field emitter tip, at least one gate electrode and a membrane window disposed over the at least one gate electrode.

First claim

What is claimed is:

1. A modular electron beam unit comprising:
an electron beam source comprising:
a base portion;
at least one field emitter element coupled to the base portion, comprising:
a first end that is proximate to the base portion;
a field emitter tip disposed proximate to a second end that is opposite to the first end;
an ungated transistor channel formed between the first and the second end of the at least one emitter element; and

at least one gate electr…

Assignees

• Massachusetts Inst Technology

Inventors

• Akinwande Akintunde I
• Guerrera Stephen Angelo

Classifications

• H01J29/62

  Electricity · mapped topic

• H01J2229/4817

  Electricity · mapped topic

• H01J29/86 Primary

  Electricity · mapped topic

• H01J3/022

  Electricity · mapped topic

• H01J2229/5635

  Electricity · mapped topic