Feedback control of dimensions in nanopore and nanofluidic devices

Patent metadata

Field	Value
Publication number	US-10316423-B2
Application number	US-201615242491-A
Country	US
Kind code	B2
Filing date	Aug 20, 2016
Priority date	Nov 2, 2010
Publication date	Jun 11, 2019
Grant date	Jun 11, 2019

Abstract

Nanofluidic passages such as nanochannels and nanopores are closed or opened in a controlled manner through the use of a feedback system. An oxide layer is grown or removed within a passage in the presence of an electrolyte until the passage reaches selected dimensions or is closed. The change in dimensions of the nanofluidic passage is measured during fabrication. The ionic current level through the passage can be used to determine passage dimensions. Fluid flow through an array of fluidic elements can be controlled by selective oxidation of fluidic passages between elements.

First claim

What is claimed is:

1. A method comprising:
forming a nanofluidic passage having larger than targeted dimensions in a non-metallic substrate, the substrate including a base, a first layer on the base, and a second layer on the first layer, the second layer and the first layer being comprised of different non-metallic materials, wherein forming the nanofluidic passage includes:
forming a nanopore in the second layer, and
etching the first layer through the nanopore and laterally beneath the second layer to form a reservoir within the first layer having a width greater than a width of the nanopore;

forming an electrically conductive layer on the non-metallic substrate, thereby reducing the dimensions of the nanofluidic passage, wherein forming the electrically conductive layer further includes coating surfaces of the reservoir and the nanopore with a metal or metal alloy;
filling the nanofluidic passage with an electrolyte; and
electrochemically oxidizing the electrically conductive layer to further reduce the dimensions of the nanofluidic passage until the nanofluidic passage has the targeted dimensions.

2. The method of claim 1 wherein electrochemically oxidizing the electrically conductive layer includes applying an electric potential between the electrolyte and the electrically conductive layer.

3. The method of claim 2 further including monitoring ionic current through the nanofluidic passage and discontinuing electrochemically oxidizing the electrically conductive layer when the ionic current reaches a level representative of the targeted dimensions.

4. The method of claim 1 , further wherein filling the nanofluidic passage with the electrolyte includes maintaining the electrolyte above and below the nanopore.

5. The method of claim 1 wherein the electrically conductive layer is selected from the group consisting of titanium, tungsten, and tantalum.

6. A method comprising:
providing a substrate comprising a membrane including a large plurality of nanofluidic passages extending therethrough, each of the nanofluidic passages being bounded by an electrical conductor, the electrical conductor comprising a metal or metal alloy coating each nanofluidic passage;
filling the nanofluidic passages with electrolyte;
measuring ionic current through membrane to determine an average nanofluidic passage diameter; and
causing the nanofluidic passages to at least partially close by electrochemically oxidizing the electrical conductor.

7. A method comprising:
forming a nanofluidic passage having larger than targeted dimensions in a substrate, wherein forming the nanofluidic passage includes:
obtaining a substrate including a base, a first layer on the base, and a second layer on the first layer;
forming a nanopore in the second layer; and
etching the first layer through the nanopore and beneath the second layer to form a reservoir within the first layer having a width greater than a width of the nanopore;

forming an electrically conductive layer on the substrate, thereby reducing the dimensions of the nanofluidic passage, wherein forming the electrically conductive layer further includes coating surfaces of the reservoir and nanopore with a metal or metal alloy;
filling the nanofluidic passage with an electrolyte;
electrochemically oxidizing the electrically conductive layer to further reduce the dimensions of the nanofluidic passage until the fluidic passage has the targeted dimensions; and
monitoring the dimensions of the nanopore during the electrochemical oxidation of the electrically conductive layer using ionic current measurements.

Assignees

• IBM

Inventors

• Harrer Stefan
• Rossnagel Stephen M
• Waggoner Philip S

Classifications

• B81C2201/0114

  Electrochemical etching, anodic oxidation · CPC title

• C25D11/022 Primary

  Anodisation on selected surface areas · CPC title

• C25D11/26

  of refractory metals or alloys based thereon · CPC title

• C25D11/34

  of metals or alloys not provided for in groups C25D11/04 - C25D11/32 · CPC title

• C25D7/04

  Tubes; Rings; Hollow bodies · CPC title