Substrate support device
US-9153463-B2 · Oct 6, 2015 · US
US10315388B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10315388-B2 |
| Application number | US-201515308717-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 29, 2015 |
| Priority date | Jun 11, 2014 |
| Publication date | Jun 11, 2019 |
| Grant date | Jun 11, 2019 |
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Official abstract text for this publication.
A method of manufacturing a laminate in which a spray coating film made of a material different from a base material is laminated on the base material includes: a base material heating step of heating the base material; an intermediate layer forming step of forming, on a surface of the heated base material, an intermediate layer made of a material different from the base material and the spray coating film; and a spray coating film forming step of forming the spray coating film on a surface of the intermediate layer.
Opening claim text (preview).
The invention claimed is: 1. A method of manufacturing a laminate in which a spray coating film made of a material different from a base material is laminated on the base material, the method comprising: heating a base material made of a metal or an alloy; forming, on a surface of the heated base material, an intermediate layer made of a material different from the base material and the spray coating film, wherein the intermediate layer is made of a metal or an alloy and has a thermal expansion coefficient between those of the base material and the spray coating film; lowering a temperature of the base material until stress in the intermediate layer becomes compressive stress, after the forming of the intermediate layer; and forming the spray coating film on a surface of the intermediate layer in a state where a temperature of the base material is lowered at the lowering operation, wherein the spray coating film is formed of a ceramic-based material, or a mixed material of metal and ceramics. 2. The method of manufacturing a laminate according to claim 1 , wherein compressive stress is accumulated in the intermediate layer at the time of start of the spray coating film forming step. 3. The method of manufacturing the laminate according to- claim 1 , wherein, in the base material heating step, the base material is heated in a range from ⅕ or higher of a melting point of the base material to the melting point or lower of the base material. 4. The method of manufacturing the laminate according to- claim 1 , wherein, in the intermediate layer forming step, the intermediate layer is formed so that porosity of the intermediate layer is 3% or more. 5. The method of manufacturing the laminate according to- claim 1 , wherein, in the intermediate layer forming step, the intermediate layer is formed so that a thickness of the intermediate layer is in a range from 100 μm or more to 800 μm or less. 6. The method of manufacturing the laminate according to- claim 1 , wherein, in the intermediate layer forming step, powders of material of the intermediate layer and a gas are accelerated toward the surface of the heated base material, and the powders are sprayed and deposited on the surface of the base material, while being kept in a solid phase state. 7. The method of manufacturing the laminate according to- claim 1 , wherein, in the intermediate layer forming step, the material of the intermediate layer is thermally sprayed onto the surface of the heated base material.
with at least one metal alloy layer · CPC title
Spraying molten metal · CPC title
with at least one oxide layer · CPC title
of metal (B32B15/01 takes precedence) · CPC title
Oxides · CPC title
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