Lithographic apparatus and device manufacturing method
US-2016070181-A1 · Mar 10, 2016 · US
US10312787B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10312787-B2 |
| Application number | US-201515526319-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 21, 2015 |
| Priority date | Dec 8, 2014 |
| Publication date | Jun 4, 2019 |
| Grant date | Jun 4, 2019 |
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A transport system and a system for moving permanent-magnet-excited transport bodies by an inductively excited magnetic field includes induction coils, a movably supported first reluctance element, and an actuator. The induction coils are configured for a current to flow through the induction coils in order to drive the transport bodies in a plane without contact. The actuator is configured to bring the first reluctance element from a first position into a second position. The permanent magnetic field of a transport body located over the first reluctance element experiences a lower magnetic resistance in a magnetic circuit through the first reluctance element in the second position than in the first position.
Opening claim text (preview).
The invention claimed is: 1. A system for moving transport bodies excited by permanent magnets over an inductively excited magnetic field, comprising: a movably supported first reluctance element; induction coils configured to be flowed through by a current in order to levitate the transport bodies contactlessly and drive the transport bodies in a plane; and an actuator configured to bring the first reluctance element from a first position into a second position, wherein a permanent magnetic field of a transport body located over the first reluctance element experiences a smaller magnetic resistance in a magnetic circuit as a result of the first reluctance element in the second position than in the first position. 2. The system as claimed in claim 1 , wherein the actuator is configured to bring the first reluctance element out of the first position into the second position in the event of a power failure in order to brake its movement in the plane. 3. The system as claimed in claim 1 , wherein the system is configured to change the magnetic resistance of the system for a permanent magnetic field excited by a transport body by the first reluctance element to a greater degree at a position over the first reluctance element than at a position alongside the first reluctance element with respect to the movement of the transport bodies. 4. The system as claimed in claim 1 , wherein the actuator is configured to bring the first reluctance element into a different position with respect to a second reluctance element of the system in order to change a magnetic resistance through the first reluctance element and the second reluctance element. 5. The system as claimed in claim 4 , wherein the actuator is configured to change a distance between the first reluctance element and the second reluctance element. 6. The system as claimed in claim 1 , wherein the actuator is configured to displace the first reluctance element one or more of: substantially parallel to the plane of the direction of movement of the transport bodies, substantially perpendicular to the plane of the direction of movement of the transport bodies, and to rotate the first reluctance element about an axis situated substantially in the plane of the direction of movement of the transport bodies. 7. The system as claimed in claim 1 , wherein the first reluctance element comprises laminated sheet-metal elements that are (i)oriented substantially perpendicular to the plane of the direction of movement of the transport bodies in the first position and (ii) oriented substantially parallel to the plane of the direction of movement of the transport bodies in the second position. 8. The system as claimed in claim 1 , wherein the first reluctance element is at least partially arranged between two second reluctance elements, wherein the second reluctance elements have a cross section that continuously decreases in a direction perpendicular to the plane of the direction of movement of the transport bodies, and wherein one or more of: the actuator is configured to move the first reluctance element perpendicularly in relation to the plane of the direction of movement of the transport bodies, and the first reluctance element has a surface that corresponds over the surface area to a surface of the second reluctance elements at least in the second position. 9. The system as claimed in claim 1 , wherein the actuator comprises an energy storage mechanism. 10. A transport system, comprising a transport body comprising a carrying body and permanent magnets; and a system for moving the transport body, the system including: a movably supported first reluctance element, induction coils configured to be flowed through by a current in order to levitate the transport body contactlessly and drive the transport body in a plane, and an actuator configured to bring the first reluctance element from a first position into a second position, wherein the permanent magnets are arranged over the system substantially along a plane of a direction of movement of the transport body and produce a magnetic pattern, so that, together with the first and second reluctance elements of the system, a strongly location-dependent force effect is obtained in the direction of the plane, location-dependent differences in the force effect being intensified by the first reluctance element in the second position. 11. The system as claimed in claim 1 , wherein the actuator is configured to bring the first reluctance element into a different position with respect to a fixed second reluctance element of the system in order to change a magnetic resistance through the first reluctance element and the fixed second reluctance element. 12. The system as claimed in claim 9 , wherein the energy storage mechanism is configured as one or more of a spring, a hydraulic energy store, a pneumatic energy store, and an electrical energy store.
using magnetic elements · CPC title
Air-gap windings, i.e. iron-free windings · CPC title
of the permanent magnet type · CPC title
Machines moving with multiple degrees of freedom · CPC title
Machines characterised by the presence of fail safe, back up, redundant or other similar emergency arrangements · CPC title
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