Semiconductor device and semiconductor device manufacturing method
US-2017117421-A1 · Apr 27, 2017 · US
US10312473B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10312473-B2 |
| Application number | US-201715832010-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 5, 2017 |
| Priority date | Dec 6, 2016 |
| Publication date | Jun 4, 2019 |
| Grant date | Jun 4, 2019 |
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An organic light emitting display device includes: a substrate; an organic light emitting element on the substrate; and a thin film encapsulation layer on the organic light emitting element. The thin film encapsulation layer includes a first thin film, a second thin film and a third thin film which are sequentially stacked therein, a refractive index of the second thin film is about 1.7 or greater, and a refractive index of the first thin film and a refractive index of the third thin film are greater than the refractive index of the second thin film by about 0.35 or greater.
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What is claimed is: 1. An organic light emitting display device comprising: a substrate; an organic light emitting element on the substrate; a thin film encapsulation layer on the organic light emitting element; and wherein the thin film encapsulation layer comprises a first thin film, a second thin film and a third thin film, which are sequentially stacked therein, a refractive index of the second thin film is about 1.7 or greater, each of the refractive index of the first thin film and the refractive index of the third thin film is about 2.3 or greater, and a refractive index of the first thin film and a refractive index of the third thin film are greater than the refractive index of the second thin film by about 0.35 or greater. 2. The organic light emitting display device of claim 1 , wherein the refractive index of the second thin film is about 2.3 or less. 3. The organic light emitting display device of claim 2 , wherein the second thin film comprises at least one of Nd 2 O 3 , Gd 2 O 3 , Sm 2 O 3 , Sc 2 O 3 , Y 2 O 3 , SiO, TiO 2 , ZrO 2 +Y 2 O 3 , ZrO 2 and SnO 2 . 4. The organic light emitting display device of claim 1 , wherein each of the first thin film and the third thin film comprises at least one of ZrO 2 +TiO 2 , Cr 2 O 3 , ZnO, Ta 2 O 5 , TiO 2 +T 2 O 5 , Sb 2 O 3 , ZnS, CuO, Fe 2 O 3 , and Si. 5. The organic light emitting display device of claim 1 , wherein each of the first thin film, the second thin film, and the third thin film has a thickness of about 60 nm or less. 6. The organic light emitting display device of claim 1 , wherein a reflectance of the thin film encapsulation layer is about 20% or greater at a wavelength of about 410 nm. 7. The organic light emitting display device of claim 6 , wherein a reflectance of the thin film encapsulation layer is about 5% or less at a wavelength in a range from about 500 nm to about 600 nm. 8. The organic light emitting display device of claim 3 , further comprising: a monomer layer between the thin film encapsulation layer and the organic light emitting element. 9. The organic light emitting display device of claim 8 , wherein the monomer layer has a thickness of about 40000 angstroms or greater. 10. The organic light emitting display device of claim 9 , wherein the monomer layer comprises at least one of propargyl methacrylate, glycidyl methacrylate, pentafluorophenyl methacrylate, furfuryl methacrylate, hydroxyethyl methacrylate, vinyl pyrrolidone, dimethylaminomethyl styrene, cyclohexyl methacrylate, perfluorodecyl acrylate, trivinyltrimethyl cyclotrisiloxane, 4-aminostyrene, N-isopropylacrylamine, maleic anhydride-alt-styrene, methacrylic acid-co-ethyl acrylate, ethyleneglycol dimethacrylate, divinylbenzene, and di(ethylene glycol)divinyl ether. 11. The organic light emitting display device of claim 1 , wherein at least one of the first thin film and the third thin film comprises SiON. 12. The organic light emitting display device of claim 11 , wherein the second thin film comprises SiNx. 13. The organic light emitting display device of claim 12 , wherein each of the first thin film, the second thin film and the third thin film has a thickness of about 60 nm or less. 14. An organic light emitting display device comprising: a substrate; an organic light emitting element on the substrate; a thin film encapsulation layer on the organic light emitting element; and wherein the thin film encapsulation layer comprises a first thin film, a second thin film and a third thin film, which are sequentially stacked therein, a refractive index of the second thin film is about 1.7 or greater, a refractive index of the first thin film and a refractive index of the third thin film are greater than the refractive index of the second thin film, each of the refractive index of the first thin film and the refractive index of the third thin film is about 2.3 or greater, and a reflectance of the thin film encapsulation layer is about 30% or greater at a wavelength of about 780 nm. 15. The organic light emitting display device of claim 14 , wherein the second thin film comprises at least one of Nd 2 O 3 , Gd 2 O 3 , Sm 2 O 3 , Sc 2 O 3 , Y 2 O 3 , SiO, TiO, ZrO 2 and SnO 2 . 16. The organic light emitting display device of claim 14 , wherein each of the first thin film and the third thin film comprises at least one of ZrO 2 +TiO 2 , Cr 2 O 3 , ZnO, Ta 2 O 5 , TiO 2 +T 2 O 5 , Sb 2 O 3 , ZnS, CuO, Fe 2 O 3 , and Si. 17. The organic light emitting display device of claim 14 , wherein at least one of the first thin film and the third thin film comprises SiON and the second thin film comprises SiNx. 18. The organic light emitting display device of claim 17 , wherein each of the first thin film, the second thin film and the third thin film has a thickness of about 60 nm or less.
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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