Ion implantation compositions, systems, and methods
US-2015380212-A1 · Dec 31, 2015 · US
US10312402B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10312402-B2 |
| Application number | US-201414262719-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 26, 2014 |
| Priority date | Feb 5, 2010 |
| Publication date | Jun 4, 2019 |
| Grant date | Jun 4, 2019 |
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The composition for forming a p-type diffusion layer in accordance with the present invention contains an acceptor element-containing glass powder and a dispersion medium. A p-type diffusion layer and a photovoltaic cell having a p-type diffusion layer are prepared by applying the composition for forming a p-type diffusion layer, followed by a thermal diffusion treatment.
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What is claimed: 1. A method for producing a photovoltaic cell, including: applying, on a semiconductor substrate, from 0.01 g/m 2 to 100 g/m 2 of a composition for forming a p-type diffusion layer, the composition comprising an acceptor element-containing glass powder and a dispersion medium; and subjecting the substrate to a thermal diffusion treatment at a temperature of from 600° C. to 1000° C. to form a p-type diffusion layer, wherein the acceptor element is included in the glass powder such that vaporization of the acceptor element is suppressed, wherein the softening point of the acceptor element-containing glass powder is from 300° C. to 900° C., wherein the p-type diffusion layer has a sheet resistance of from 35Ω/□ to 190Ω/□, and wherein the shape of the acceptor element-containing glass powder is selected from the group consisting of a substantially spherical shape, a flat shape, a block shape, a plane shape, and a scale-like shape. 2. The method for producing a photovoltaic cell according to claim 1 , further including forming an electrode on the p-type diffusion layer. 3. The method for producing a photovoltaic cell according to claim 1 , wherein the acceptor element comprises at least one selected from the group consisting of boron (B), aluminum (Al) and gallium (Ga). 4. The method for producing a photovoltaic cell according to claim 1 , wherein the acceptor element-containing glass powder comprises an acceptor element-containing material and a glass component material. 5. The method for producing a photovoltaic cell according to claim 4 , wherein the acceptor element-containing material comprises at least one selected from the group consisting of B 2 O 3 , Al 2 O 3 and Ga 2 O 3 . 6. The method for producing a photovoltaic cell according to claim 4 , wherein the glass component material comprises at least one selected from the group consisting of SiO 2 , K 2 O, Na 2 O, Li 2 O, BaO, SrO, CaO, MgO, BeO, ZnO, PbO, CdO, V 2 O 5 , SnO, ZrO 2 , and MoO 3 . 7. A method for producing a p-type diffusion layer, including: applying, on a semiconductor substrate, from 0.01 g/m 2 to 100 g/m 2 of a composition for forming a p-type diffusion layer, the composition comprising an acceptor element-containing glass powder and a dispersion medium; and conducting a thermal diffusion treatment at a temperature of from 600° C. to 1000° C., wherein the acceptor element is included in the glass powder such that vaporization of the acceptor element is suppressed, wherein the softening point of the acceptor element-containing glass powder is from 300° C. to 900° C., wherein the p-type diffusion layer has a sheet resistance of from 35Ω/□ to 190Ω/□, and wherein the shape of the acceptor element-containing glass powder is selected from the group consisting of a substantially spherical shape, a flat shape, a block shape, a plane shape, and a scale-like shape. 8. The method for producing a p-type diffusion layer according to claim 7 , further including forming an electrode on the p-type diffusion layer. 9. The method for producing a p-type diffusion layer according to claim 7 , wherein the acceptor element comprises at least one selected from the group consisting of boron (B), aluminum (Al) and gallium (Ga). 10. The method for producing a p-type diffusion layer according to claim 7 , wherein the acceptor element-containing glass powder comprises an acceptor element-containing material and a glass component material. 11. The method for producing a p-type diffusion layer according to claim 10 , wherein the acceptor element-containing material comprises at least one selected from the group consisting of B 2 O 3 , Al 2 O 3 and Ga 2 O 3 . 12. The method for producing a p-type diffusion layer according to claim 10 , wherein the glass component material comprises at least one selected from the group consisting of SiO 2 , K 2 O, Na 2 O, Li 2 O, BaO, SrO, CaO, MgO, BeO, ZnO, PbO, CdO, V 2 O 5 , SnO, ZrO 2 and MoO 3 .
being group IV material · CPC title
the applied layer comprising oxides only · CPC title
Diffusion sources · CPC title
Electricity · mapped topic
Electricity · mapped topic
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