Apparatus and radiant heating plate for processing wafer-shaped articles

Patent metadata

Field	Value
Publication number	US-10312117-B2
Application number	US-201615233698-A
Country	US
Kind code	B2
Filing date	Aug 10, 2016
Priority date	Aug 10, 2016
Publication date	Jun 4, 2019
Grant date	Jun 4, 2019

Abstract

An apparatus for processing wafer-shaped articles includes a rotary chuck adapted to hold a wafer-shaped article of a predetermined diameter thereon. A radiant heating plate faces a wafer-shaped article when positioned on the rotary chuck. The radiant heating plate includes radiant heating elements, but a central region of the radiant heating plate is free of radiant heating elements. The radiant heating plate further includes at least one refraction element that refracts radiation emitted by the radiant heating elements and passed through the at least one refraction element, toward the central region of the radiant heating plate.

First claim

What is claimed is:

1. An apparatus for processing wafer-shaped articles, comprising:
a rotary chuck adapted to hold a wafer-shaped article of a predetermined diameter thereon;
a radiant heating plate that faces a wafer-shaped article when positioned on said rotary chuck, said radiant heating plate comprising radiant heating elements, wherein a central region of said radiant heating plate is free of radiant heating elements, said radiant heating plate further comprising at least one refraction element that refracts radiation emitted by said radiant heating elements and passed through said at least one refraction element toward said central region of said radiant heating plate; and
a cover plate arranged above the radiant heating plate, wherein said cover plate includes a central opening overlying said central region, and wherein said at least one refraction element is arranged to cover said central opening above said central region that is free of said radiant heating elements.

2. The apparatus according to claim 1 , wherein the at least one refraction element is at least one lens.

3. The apparatus according to claim 1 , wherein said rotary chuck is mounted for rotation about a stationary central post, and wherein said radiant heating plate is secured to an upper end of said stationary central post.

4. The apparatus according to claim 1 , wherein said cover plate that is substantially transparent to radiation emitted by said radiant heating elements.

5. The apparatus according to claim 4 , wherein said at least one refraction element is comprised by a cap configured to cover said central opening and to overlie said radiant heating elements that are adjacent to said central region.

6. The apparatus according to claim 5 , wherein a periphery of said cap overlies said radiant heating elements that are adjacent to said central region, said periphery comprising surfaces that converge in a direction away from a center of said central opening.

7. The apparatus according to claim 5 , wherein said rotary chuck is mounted for rotation about a stationary central post, and wherein said radiant heating plate and said cap are secured to an upper end of said stationary central post.

8. The apparatus according to claim 4 , wherein said cover plate is made from quartz or sapphire.

9. The apparatus according to claim 5 , wherein said cap is made from quartz or sapphire.

10. The apparatus according to claim 2 , wherein said at least one lens comprises a molded silicone Fresnel lens positioned on said radiant heating elements that are adjacent said central region.

11. The apparatus according to claim 1 , wherein said radiant heating elements are LEDs, and wherein each of said LEDs that are adjacent said central region comprises a silicone lens positioned above a power die of said LEDs.

12. A radiant heating plate, comprising:
radiant heating elements, wherein a central region of said radiant heating plate is free of radiant heating elements, said radiant heating plate further comprising at least one refraction element that refracts radiation emitted by said radiant heating elements and passed through said at least one refraction element toward said central region of said radiant heating plate; and
a cover plate arranged above the radiant heating elements, wherein said cover plate includes a central opening overlying said central region, and wherein said at least one refraction element is arranged to cover said central opening above said central region that is free of said radiant heating elements.

13. The radiant heating plate according to claim 12 , wherein the at least one refraction element is at least one lens.

14. The radiant heating plate according to claim 12 , wherein said cover plate is substantially transparent to radiation emitted by said radiant heating elements.

15. The radiant heating plate according to claim 14 , wherein said at least one refraction element is comprised by a cap configured to cover said central opening and to overlie said radiant heating elements that are adjacent to said central region.

16. The radiant heating plate according to claim 15 , wherein a periphery of said cap overlies said radiant heating elements that are adjacent to said central region, said periphery comprising surfaces that converge in a direction away from a center of said central opening.

17. The radiant heating plate according to claim 14 , wherein said cover plate is made from quartz or sapphire.

18. The radiant heating plate according to claim 15 , wherein said cap is made from quartz or sapphire.

19. The radiant heating plate according to claim 13 , wherein said at least one lens comprises a molded silicone Fresnel lens positioned on said radiant heating elements that are adjacent said central region.

20. The radiant heating plate according to claim 12 , wherein said radiant heating elements are LEDs, and wherein each of said LEDs that are adjacent said central region comprises a silicone lens positioned above a power die of said LEDs.

Assignees

• Lam Res Ag

Inventors

• Si Hongbo
• Hill Bridget
• Berney Butch
• Brien Daniel

Classifications

• H10P72/7626

  characterised by the construction of the shaft · CPC title

• H10P72/7608

  characterised by a plurality of separate clamping members, e.g. clamping fingers · CPC title

• H10P72/0414

  using mainly spraying means, e.g. nozzles · CPC title

• H10P72/0408

  for drying · CPC title

• H10P72/0436 Primary

  mainly by radiation · CPC title