Gas supply apparatus, vacuum processing apparatus, and gas supply method
US-2024055278-A1 · Feb 15, 2024 · US
US10310522B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10310522-B2 |
| Application number | US-201615238055-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 16, 2016 |
| Priority date | Aug 19, 2015 |
| Publication date | Jun 4, 2019 |
| Grant date | Jun 4, 2019 |
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A control valve of an embodiment includes a disc coaxially in contact with a diaphragm, and a shaft configured to transmit a drive force in an axial direction caused by displacement of the diaphragm to a valve element. The diaphragm has a corrugated portion between a flat portion and the outer peripheral portion, the flat portion having a contact surface with which the disc is in contact. The corrugated portion includes substantially N+0.5 corrugations (N being a natural number) each protruding relative to a reference surface, the corrugations being formed between the outer peripheral portion and the flat portion, the reference surface being one surface of the outer peripheral portion. A height of each of the N corrugations of the corrugated portion is smaller than a height of the flat portion, the heights each being a height relative to the reference surface in an unloaded condition.
Opening claim text (preview).
What is claimed is: 1. A control valve comprising: a body having an inlet port through which a fluid is introduced, an outlet port through which the fluid is delivered, a valve hole in a fluid passage connecting the inlet port and the outlet port, and a pressure chamber separated from the fluid passage by a partition; a valve element disposed in the fluid passage and configured to move toward and away from the valve hole to adjust an opening degree of a valve section; a power element including a housing forming the pressure chamber between the body and the housing, and a diaphragm having an outer peripheral portion supported by the housing and partitioning an inside of the housing into a closed space separated from the pressure chamber and an open space being open toward the pressure chamber; a disc disposed in the open space and coaxially in contact with the diaphragm; and a shaft extending through the partition and slidably supported in an axial direction thereof, having a first end connected with the diaphragm via the disc and a second end connected with the valve element, and being configured to transmit a drive force in the axial direction caused by displacement of the diaphragm to the valve element, wherein the diaphragm has a corrugated portion between a flat portion and the outer peripheral portion, the flat portion having a contact surface with which the disc is in contact, the corrugated portion having a concentric circular pattern in plan view and a corrugation pattern in cross-sectional view, the corrugated portion includes substantially N+0.5 corrugations (N being a natural number no greater than three) each protruding toward a pressure chamber side relative to a reference surface, the reference surface being a surface on the pressure chamber side of the outer peripheral portion, the corrugations being formed between the outer peripheral portion and the flat portion, and when the diaphragm is alone before being mounted in the power element, a height of each of the corrugations of the corrugated portion between the outer peripheral portion and the flat portion is smaller than a height of the flat portion, the heights each being a height toward the pressure chamber side relative to the reference surface. 2. The control valve according to claim 1 , wherein the height of each of the corrugations between the outer peripheral portion and the flat portion is equal to or larger than 25% but smaller than 100% of the height of the flat portion. 3. The control valve according to claim 2 , wherein the height of each of the corrugations between the outer peripheral portion and the flat portion is equal to or larger than 25% but equal to or smaller than 60% of the height of the flat portion. 4. The control valve according to claim 3 , being provided in a refrigeration cycle device and functioning as an expansion valve for throttling and expanding a refrigerant flowing into the expansion valve via a heat exchanger, allowing the refrigerant to pass through the valve section, and supplying the refrigerant to an evaporator. 5. The control valve according to claim 4 , wherein the body includes the inlet port through which the refrigerant from the heat exchanger is introduced, the outlet port through which the refrigerant is delivered to the evaporator, the fluid passage connecting the inlet port and the outlet port, a second inlet port through which the refrigerant returning from the evaporator is introduced, a second outlet port through which the refrigerant is delivered toward a compressor, and a second passage including the pressure chamber between the second inlet port and the second outlet port, wherein the partition separates the fluid passage from the second passage, wherein the power element is provided on a side of the body opposite to the fluid passage with respect to the second passage, and operates by sensing temperature and pressure of the refrigerant flowing through the second passage, and wherein the shaft extends through an insertion hole formed in the partition. 6. The control valve according to claim 2 , being provided in a refrigeration cycle device and functioning as an expansion valve for throttling and expanding a refrigerant flowing into the expansion valve via a heat exchanger, allowing the refrigerant to pass through the valve section, and supplying the refrigerant to an evaporator. 7. The control valve according to claim 6 , wherein the body includes the inlet port through which the refrigerant from the heat exchanger is introduced, the outlet port through which the refrigerant is delivered to the evaporator, the fluid passage connecting the inlet port and the outlet port, a second inlet port through which the refrigerant returning from the evaporator is introduced, a second outlet port through which the refrigerant is delivered toward a compressor, and a second passage including the pressure chamber between the second inlet port and the second outlet port, wherein the partition separates the fluid passage from the second passage, wherein the power element is provided on a side of the body opposite to the fluid passage with respect to the second passage, and operates by sensing temperature and pressure of the refrigerant flowing through the second passage, and wherein the shaft extends through an insertion hole formed in the partition. 8. The control valve according to claim 1 , being provided in a refrigeration cycle device and functioning as an expansion valve for throttling and expanding a refrigerant flowing into the expansion valve via a heat exchanger, allowing the refrigerant to pass through the valve section, and supplying the refrigerant to an evaporator. 9. The control valve according to claim 8 , wherein the body includes the inlet port through which the refrigerant from the heat exchanger is introduced, the outlet port through which the refrigerant is delivered to the evaporator, the fluid passage connecting the inlet port and the outlet port, a second inlet port through which the refrigerant returning from the evaporator is introduced, a second outlet port through which the refrigerant is delivered toward a compressor, and a second passage including the pressure chamber between the second inlet port and the second outlet port, wherein the partition separates the fluid passage from the second passage, wherein the power element is provided on a side of the body opposite to the fluid passage with respect to the second passage, and operates by sensing temperature and pressure of the refrigerant flowing through the second passage, and wherein the shaft extends through an insertion hole formed in the partition. 10. A method for manufacturing a control valve including: a body having a valve section therein; and a power element having a diaphragm as a pressure sensing member and being configured to generate a drive force of the valve section, the method comprising: forming the diaphragm; assembling the power element so that the diaphragm is supported in a manner displaceable in an axial direction by an outer peripheral portion serving as a support; and mounting the power element on the body, wherein forming the diaphragm includes forming a corrugated portion between a flat portion around a center of the diaphragm and the outer peripheral portion, the corrugated portion having a concentric circular pattern in plan view and a corrugation pattern in cross-sectional view in an unloaded condition where the diaphragm is not subjected to a pressure difference in an axial direction, wherein in forming the corrugated portion when the diaphragm is alone before being mounted in the power element: substantially N+0.5 corrugations (N being a natural number no greater than three) each p
the sensor is disposed in the suction line and influenced by the temperature or the pressure of the suction gas · CPC title
near an expansion valve · CPC title
one side of the diaphragm being acted upon by the circulating fluid · CPC title
at the suction side of the compressor · CPC title
the fluid acting on a diaphragm, bellows, or the like (F16K31/145, F16K31/165, F16K31/365, F16K31/385 take precedence) · CPC title
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