Coordinate measuring machine having an improved optical sensing system and related method

Patent metadata

Field	Value
Publication number	US-10309765-B2
Application number	US-201715491090-A
Country	US
Kind code	B2
Filing date	Apr 19, 2017
Priority date	Apr 20, 2016
Publication date	Jun 4, 2019
Grant date	Jun 4, 2019

Abstract

Coordinate measuring machine, comprising an optical sensor for capturing image data of a workpiece. The optical sensor comprises a lens, which defines an optical axis, and an illumination device for illuminating the workpiece. The illumination device comprises a diffusely radiating luminous body and an optical filter having a plurality of separate light passages. Light emitted by the luminous body enters the filter on an underside thereof, passes through the light passages and emerges again from the filter on an opposite top side thereof. Each of the light passages transmits only light rays that form an angle smaller than a predefined limiting angle with a longitudinal axis of the respective light passage. The lens and the filter are inclined relative to one another in such a way that a normal vector aligned perpendicularly to the top side of the filter forms an inclination angle other than 0 ° with the optical axis.

First claim

What is claimed is:

1. Coordinate measuring machine, comprising:
an optical sensor for optically capturing image data of a workpiece, wherein the optical sensor comprises a lens, which defines an optical axis;
an illumination device for illuminating the workpiece during the optical capture of the image data;
an evaluation unit configured to evaluate the captured image data and to determine spatial coordinates of the workpiece therefrom,
wherein the illumination device comprises a diffusely radiating luminous body and an optical filter having a plurality of light passages arranged alongside one another and separated from one another, wherein light emitted by the luminous body enters the filter on an underside, passes through the light passages and emerges again from the filter on a top side opposite the underside, wherein each of the light passages transmits only light rays that form an angle smaller than a predefined limiting angle with a longitudinal axis of the respective light passage,
wherein the lens and the filter are inclined relative to one another in such a way that a normal vector aligned perpendicularly to the top side of the filter forms an inclination angle other than 0° with the optical axis, wherein the inclination angle corresponds to an average light emission direction of the filter, wherein the average light emission direction of the filter is an average value of light cone principal axis angles that is determined over at least two of the light passages of the filter, and wherein the light cone principal axis angles are angles that the principal axes of the light cones leaving the light passages form with the normal vector.

2. Coordinate measuring machine according to claim 1 , comprising a workpiece support for receiving the workpiece, wherein the workpiece support defines a z-axis running perpendicularly to the workpiece support.

3. Coordinate measuring machine according to claim 2 , wherein the optical axis runs parallel to the z-axis, and wherein the normal vector forms the inclination angle with the z-axis.

4. Coordinate measuring machine according to claim 2 , wherein the normal vector runs parallel to the z-axis, and wherein the optical axis forms the inclination angle with the z-axis.

5. Coordinate measuring machine according to claim 4 , wherein the lens is movable along a movement axis running parallel to the z-axis, and wherein the optical axis forms the inclination angle with the movement axis.

6. Coordinate measuring machine according to claim 4 , wherein the lens is movable along a movement axis that forms the inclination angle with the z-axis and runs parallel to the optical axis.

7. Coordinate measuring machine according to claim 1 , comprising a filter mount, in which the filter is fixable, wherein the filter mount defines a standing area and an inclination plane inclined relative to the standing area by the inclination angle, which inclination plane, with the filter inserted into the filter mount, is aligned parallel to the top side of the filter.

8. Coordinate measuring machine according to claim 7 , wherein the filter mount comprises (i) a component produced by rapid prototyping and constructed in a layered fashion, (ii) a mount with height-adjustable three-point support, or (iii) a cardanic suspension.

9. Method of operating a coordinate measuring machine comprising an optical sensing system including an optical filter having a plurality of light passages arranged alongside one another and separated from one another, which light passages are arranged between an underside of the filter and an opposite top side of the filter, wherein each of the light passages transmits only light rays that form an angle smaller than a predefined limiting angle with a longitudinal axis of the respective light passage, wherein the method comprises the following steps:
providing an optical sensor comprising a lens, which defines an optical axis;
illuminating the filter from its underside by means of a diffusely radiating luminous body;
measuring, by means of the optical sensor, a quantity of light transmitted by the filter, wherein the quantity of light transmitted by the filter is measured at a plurality of measurement points on the top side of the filter and the lens and the filter are moved relative to one another during the measurement process, such that the quantity of light transmitted is measured for each of the measurement points from a plurality of orientations; and
determining a distribution of the measured quantity of transmitted light depending on (i) a location on the top side of the filter and (ii) an emission angle relative to a normal vector aligned perpendicularly to the top side of the filter.

10. Method according to claim 9 , comprising the following additional method step:
calculating an average light emission direction of the filter on the basis of the determined distribution, wherein the average light emission direction of the filter is an average value of light cone principal axis angles that is determined over at least two of the light passages of the filter, and wherein the light cone principal axis angles are angles that the principal axes of the light cones leaving the light passages form with the normal vector.

11. Method according to claim 9 , wherein, for measuring the quantity of light transmitted by the filter, the lens is moved for the measurement of each of the measurement points into a plurality of positions and a respective image is captured in each of said positions by means of the optical sensor, wherein the positions lie on a spherical cap and are at an equal distance from the respective measurement point on the top side of the filter.

12. Method according to claim 9 , wherein, during the measurement process, the filter is pivoted into a plurality of positions about two of its principal axes aligned orthogonally with respect to one another and an image is captured in each of said positions by means of the optical sensor.

13. Method according to claim 12 , wherein grey-scale values are determined in each of the captured images in a plurality of defined image regions and the distribution of the measured quantity of light transmitted is determined on the basis of the determined grey-scale values.

14. Method according to claim 12 , wherein the filter is pivoted by means of a cardanic suspension.

15. Method according to any of claim 9 , wherein a telecentric lens is used as lens.

16. Production method comprising the following steps:
providing a coordinate measuring machine comprising (i) an optical sensor for optically capturing image data of a workpiece, wherein the optical sensor comprises a lens, which defines an optical axis, and comprising (ii) an illumination device for illuminating the workpiece during the optical capture of the image data, wherein the illumination device comprises a diffusely radiating luminous body, and comprising (iii) an evaluation unit configured to evaluate the captured image data and to determine spatial coordinates of the workpiece therefrom;
providing an optical filter having a plurality of light passages arranged alongside one another and separated from one another, which light passages are arranged between an underside of the filter and an opposite top side of the filter, wherein each of the light passages transmits only light rays that form an angle smaller than a predefined limiting angle (a) with a longitudinal axis of the respective light passage;
illuminating the filter from its underside by means of a diffusely radiating luminous body;
measuring, by means of the optical sensor, a quantity of light transmit

Assignees

• Zeiss Carl Industrielle Messtechnik Gmbh

Inventors

• Seitz Dominik
• Widulle Frank
• Jester Philipp
• Goehnermeier Aksel
• Graf Vom Hagen Christoph-Hilmar
• Ebser Andreas
• Moebius Andreas

Classifications

• H04N23/56

  provided with illuminating means · CPC title

• G06T2207/30164

  Workpiece; Machine component · CPC title

• G01M11/00

  Testing of optical apparatus; Testing structures by optical methods not otherwise provided for · CPC title

• G01B11/005 Primary

  coordinate measuring machines · CPC title

• G06T7/70

  Determining position or orientation of objects or cameras (camera calibration G06T7/80) · CPC title