Substrate processing device

Patent metadata

Field	Value
Publication number	US-10308445-B2
Application number	US-201816115335-A
Country	US
Kind code	B2
Filing date	Aug 28, 2018
Priority date	Sep 5, 2017
Publication date	Jun 4, 2019
Grant date	Jun 4, 2019

Abstract

A substrate processing device includes shafts, rollers, a gas blowing unit, bearings, and s suction unit. The shafts include internal spaces and first through holes communicated with the internal spaces. The rollers are attached to the shafts to be rotatable about axes of the shafts for conveying a substrate. The gas blowing unit is configured to blow gas to the substrate carried by the rollers. The bearings support the shafts to be rotatable and include second through holes communicated with the first through holes of the shafts. The bearings include inner rings fitted on the shafts, outer rings opposed to outer peripheries of the inner rings, respectively, and rolling components disposed between the inner rings and the outer rings. The suction unit is configured to suck air in the internal spaces of the shafts.

First claim

The invention claimed is:

1. A substrate processing device comprising:
Shafts including internal spaces and first through holes communicated with the internal spaces;
Rollers attached to the shafts to be rotatable about axes of the shafts for conveying a substrate;
a gas blowing unit configured to blow gas to the substrate carried by the rollers;
bearings supporting the shafts to be rotatable and including second through holes communicated with the first through holes of the shafts, the bearings including inner rings fitted on the shafts, outer rings opposed to outer peripheries of the inner rings, respectively, and rolling components disposed between the inner rings and the outer rings; and
a suction unit configured to suck air in the internal spaces of the shafts.

2. The substrate processing device according to claim 1 , wherein
each of the shafts includes an opening into one of the internal spaces included in the each of the shafts, and
the opening is located at an end of the each of the shafts.

3. The substrate processing device according to claim 1 , wherein each of the bearings includes two of the second through holes at positions corresponding to sides of corresponding one of the rolling components with respect to the longitudinal direction of the shafts.

4. The substrate processing device according to claim 1 , wherein each of the first through hole has a cross-sectional area greater than that of each of the second through holes.

5. The substrate processing device according to claim 1 , wherein at least two first through holes are communicated with each of the second through holes.

6. The substrate processing device according to claim 1 , wherein
the inner rings include recesses, and
the shafts include protrusions fitted in the recesses of the respective inner rings.

7. The substrate processing device according to claim 1 , wherein
the shafts include recesses, and
the inner rings include protrusions fitted in the recesses of the respective shafts.

Assignees

• Sharp Kk

Inventors

• SHINZAKI Yohhei

Classifications

• H10P72/3314

  Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers · CPC title

• H10P72/0406 Primary

  for cleaning followed by drying, rinsing, stripping, blasting or the like · CPC title

• B65G2249/02

  Controlled or contamination-free environments or clean space conditions · CPC title

• B65G49/064 Primary

  in a horizontal position (B65G49/066 takes precedence) · CPC title

• F16C13/006

  Guiding rollers, wheels or the like, formed by or on the outer element of a single bearing or bearing unit, e.g. two adjacent bearings, whose ratio of length to diameter is generally less than one · CPC title