Method and system for the removal and/or avoidance of contamination in charged particle beam systems
US-9981293-B2 · May 29, 2018 · US
US10307803B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10307803-B2 |
| Application number | US-201615215416-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 20, 2016 |
| Priority date | Jul 20, 2016 |
| Publication date | Jun 4, 2019 |
| Grant date | Jun 4, 2019 |
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
What the patent document calls the invention.
A short plain-language summary of the technical disclosure.
Who owns or filed the patent and who is credited as inventor.
Filing, priority, publication, and grant dates set the timeline.
The legal scope of protection — read this for what is actually claimed.
Technology tags used to group this patent with similar filings.
Prior art links and similar publications in this corpus.
Official abstract text for this publication.
A system and method are disclosed for cleanliness of transmission windows for directed energy devices. A positive pressure gas chamber is fixed to the transmission window of a directed energy device, e.g., a laser or high power microwave. A gas source is connected to the positive pressure chamber in order to provide pressurized gas. The gas flows into the positive pressure chamber, and exits the positive pressure chamber through openings, thus pushing particulates out of the positive pressure chamber. The gas continues to flow during directed energy use, thus preventing undesirable material, e.g., dirt and moisture, from depositing on the transmission window.
Opening claim text (preview).
We claim: 1. A system for transmission window cleanliness for use with free-space directed energy devices, comprising: a positive pressure chamber mounted to a transmission window of the directed energy device such that the transmission window forms a wall of the positive pressure chamber; a gas source configured to provide gas to the positive pressure chamber, wherein the positive pressure chamber is configured to contain the gas at a higher pressure than atmospheric gases outside the positive pressure chamber; a closeable exit aperture disposed in a wall of the positive pressure chamber at substantially an opposite end of the positive pressure chamber from the transmission window such that free-space directed energy entering the positive pressure chamber through the transmission window exits the positive pressure chamber through the exit aperture, and wherein the closeable exit aperture is interlocked with the directed energy device such that gas in the positive pressure chamber is allowed to exit the positive pressure chamber when the directed energy device is being fired; a particulate collector and gas recycle device, wherein the particulate collector and gas recycle device is configured to receive gas from the positive pressure chamber via a first conduit and is further configured to filter particulates out of the gas before the gas is reintroduced to the positive pressure chamber via a second conduit; a set of louvers disposed in one or more openings disposed in one or more walls of the positive pressure chamber, wherein each louver is capable of creating an airtight seal when closed; and one or more enclosures disposed between the first conduit and the one or more openings so as to receive gas and particulates exiting from the positive pressure chamber through the one or more openings when the louvers are open. 2. The system of claim 1 , wherein the gas source is interlocked with the directed energy device such that when the directed energy device is being fired, the gas source provides an increase in air flow from the gas source into the positive pressure chamber in order to maintain positive pressure within the positive pressure chamber in relation to the atmospheric pressure outside the positive pressure chamber. 3. The system of claim 1 , further comprising a turbulence generator disposed within the positive pressure chamber, the turbulence generator being configured to agitate the gas as the gas enters the positive pressure chamber from the second conduit. 4. The system of claim 3 , wherein the turbulence generator includes a fin that is disposed on an interior wall of the positive pressure chamber. 5. The system of claim 1 , wherein the gas is transparent to a wavelength of the directed energy from the directed energy device. 6. The system of claim 1 , wherein the gas is filtered or purified. 7. The system of claim 1 , wherein the exit aperture and the set of louvers are configured to open when the directed energy device is being fired and to close when the directed energy device is not being fired. 8. A system for transmission window cleanliness for use with free-space directed energy devices, comprising: a positive pressure chamber mounted to a transmission window of the directed energy device such that the transmission window forms a wall of the positive pressure chamber; a gas source configured to provide compressed gas to the positive pressure chamber, wherein the positive pressure chamber is configured to contain the gas at a higher pressure than atmospheric gases outside the positive pressure chamber; and an exit aperture disposed in an opposite wall of the positive pressure chamber from the transmission window and configured to open only when the directed energy device is firing such that when the exit aperture is open the compressed gas and free-space directed energy exit the positive pressure chamber through the exit aperture; a turbulence generator disposed within the positive pressure chamber, the turbulence generator being configured to agitate the compressed gas as the compressed gas enters the positive pressure chamber from the gas source; and a set of louvers disposed in one or more openings disposed in one or more walls of the positive pressure chamber, wherein each louver is capable of creating an airtight seal when closed, and wherein each louver is configured to allow the compressed gas to escape the positive pressure chamber when opened. 9. The system of claim 8 , wherein the positive pressure chamber configured to be airtight when the exit aperture is closed.
Preventing deposition of fouling or of dust · CPC title
Cleaning by the force of jets, e.g. blowing-out cavities {(airguns or nozzles per se B05B1/005)} · CPC title
from a small area, e.g. a tool {(removing chips B23Q11/0042)} · CPC title
with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation (G02B1/18 takes precedence; cleaning in general B08B) · CPC title
Related publications grouped by family.
Answers are generated from the same data shown on this page.