Mems module
US-2024059554-A1 · Feb 22, 2024 · US
US10305265B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10305265-B2 |
| Application number | US-201715631493-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 23, 2017 |
| Priority date | Jun 23, 2016 |
| Publication date | May 28, 2019 |
| Grant date | May 28, 2019 |
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A sensor system for determining physical variables of a switchgear assembly having a sensor connection, which is designed for connection to the switchgear assembly, within which a humidity sensor and/or a pressure sensor and a light sensor for detecting light flashes are arranged. A switchgear assembly is provided that is filled, in particular, with a protective gas, comprising at least one such sensor system.
Opening claim text (preview).
What is claimed is: 1. A sensor system for determining physical variables of a switchgear assembly, the sensor system comprising: a sensor connection, wherein within the sensor connection, a humidity sensor, a pressure sensor and a light sensor for detecting light flashes are arranged. 2. The sensor system according to claim 1 , wherein the humidity sensor is positioned upstream of the pressure sensor and/or the light sensor is positioned upstream of the humidity sensor and the pressure sensor. 3. The sensor system according to claim 1 , wherein the light sensor is coupled to at least one light guide for transmitting the light flashes from a point of origin to the light sensor. 4. The sensor system according to claim 3 , further comprising an integrated self-testing device for one-off or cyclical device diagnostics, wherein the self-testing device, via an integrated light source, feeds light into the at least one light guide and tests a function of the light sensor via the coupled-in light. 5. The sensor system according to claim 3 , wherein the at least one light guide is guided through a connecting region to the sensor connection via a glass feedthrough and/or the at least one light guide projects beyond the sensor connection. 6. The sensor system according to claim 1 , wherein the humidity sensor has passage openings that bring a process pressure to the pressure sensor. 7. The sensor system according to claim 1 , wherein the sensor connection is sealed with an adapter, a closure piece or a coupling piece, with a free connection diameter of 15 mm to 25 mm or at least 20 mm. 8. The sensor system according to claim 7 , wherein an inner space surrounded by the coupling piece is evacuated or filled with a protective gas. 9. The sensor system according to claim 1 , wherein a first temperature sensor is integrated into the humidity sensor, or the humidity sensor is coupled to the first temperature sensor; and a second temperature sensor is integrated into the pressure sensor, or the pressure sensor is coupled to the second temperature sensor. 10. The sensor system according to claim 9 , wherein electrical signals are transmitted from the humidity sensor to a first evaluation board to determine a temperature-compensated humidity signal using a temperature detected via the first temperature sensor and electrical signals are transmitted from the pressure sensor to a second evaluation board to determine a temperature-compensated pressure signal using a temperature detected via the second temperature sensor, and wherein the second evaluation board is positioned between the first evaluation board and the pressure sensor. 11. The sensor system according to claim 9 , wherein an evaluation board of the pressure sensor determines a temperature-compensated pressure signal using a temperature detected via the second temperature sensor, and transmits the temperature-compensated pressure signal via a connection system as a digital data signal and/or a density signal determined on the basis of the temperature and the pressure signal is transmittable via the connection system as a digital data signal. 12. The sensor system according to claim 9 , wherein electrical contacts transmit electrical signals from the humidity sensor to an evaluation board, and wherein the electrical contacts are melted in glass and are arranged within the sensor connection. 13. The sensor system according to claim 12 , wherein the evaluation board determines a temperature-compensated humidity signal from a temperature detected via the first temperature sensor, and transmits the temperature-compensated humidity signal via a connection system as a digital data signal. 14. The sensor system according to claim 13 , wherein for the temperature-compensated humidity signal, at least one threshold value is stored, and wherein at least one signal generating unit is provided, which emits an additional signal upon reaching or exceeding the at least one threshold value. 15. A sensor system for determining physical variables of a switchgear assembly, the sensor system comprising: a sensor connection, wherein within the sensor connection, a humidity sensor and/or a pressure sensor and a light sensor for detecting light flashes are arranged, wherein the light sensor is coupled to at least one light guide for transmitting the light flashes from a point of origin to the light sensor, and wherein the sensor connection comprises, on a process-facing side, a coupling device for adapting an external light source for performing a functional test. 16. A sensor system for determining physical variables of a switchgear assembly, the sensor system comprising: a sensor connection, wherein within the sensor connection, a humidity sensor and/or a pressure sensor and a light sensor for detecting light flashes are arranged, wherein the light sensor is coupled to at least one light guide for transmitting the light flashes from a point of origin to the light sensor, and wherein an optical lens is arranged on a front end of the at least one light guide facing away from the sensor connection.
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