Grazing incidence x-ray fluorescence spectrometer and grazing incidence x-ray fluorescence analyzing method

Patent metadata

Field	Value
Publication number	US-10302579-B2
Application number	US-201715628737-A
Country	US
Kind code	B2
Filing date	Jun 21, 2017
Priority date	Dec 25, 2014
Publication date	May 28, 2019
Grant date	May 28, 2019

Abstract

A grazing incidence X-ray fluorescence spectrometer (1) of the present invention includes: a bent spectroscopic device (4) to monochromate X-rays (3) from an X-ray source (2) and generate an X-ray beam (5) focused on a fixed position (15) on a surface of a sample (S); a slit member (6) disposed between the bent spectroscopic device (4) and the sample (S) and having a linear opening (61); a slit member moving unit (7) to move the slit member (6) in a direction that intersects the X-ray beam (5) passing through the linear opening (61); a glancing angle setting unit (8) to move the slit member (6) by using the slit member moving unit (7), and set a glancing angle (α) of the X-ray beam (5) to a desired angle; and a detector (10) to measure an intensity of fluorescent X-rays (9) from the sample (S) irradiated with the X-ray beam (5).

First claim

What is claimed is:

1. A grazing incidence X-ray fluorescence spectrometer comprising:
an X-ray source configured to emit X-rays;
a bent spectroscopic device configured to monochromate the X-rays emitted from the X-ray source and form an X-ray beam that is focused on a fixed position on a surface of a sample;
a movable slit member disposed between the bent spectroscopic device and the sample, the movable slit member having a linear opening by which a width of the X-ray beam is limited in a focusing angle direction; and
a detector configured to measure an intensity of fluorescent X-rays generated from the sample that is irradiated with the X-ray beam,
wherein the movable slit member sets a glancing angle of the X-ray beam based on the intensity of the fluorescent X-rays measured by the detector.

2. The grazing incidence X-ray fluorescence spectrometer as claimed in claim 1 , wherein the movable slit member comprises a variable slit member that allows a width of the linear opening to be variable.

3. The grazing incidence X-ray fluorescence spectrometer as claimed in claim 1 , wherein:
the bent spectroscopic device comprises one of:
a multilayer film including a substrate and a plurality of layer pairs, each layer pair including a reflective layer and a spacer layer, and each layer pair having a predetermined cycle length are layered on the substrate, of the multilayer film, such that a ratio of a thickness of the reflective layer to a thickness of the spacer layer is 1:1.4 to 1:4; and
a plurality of multilayer films and a substrate, in each multilayer film of which a plurality of layer pairs, each layer pair including a reflective layer and a spacer layer, and each layer pair having a predetermined cycle length, are layered on the substrate, the plurality of multilayer films being formed such that the closer the multilayer film is to the substrate, the less the predetermined cycle length is.

4. The grazing incidence X-ray fluorescence spectrometer as claimed in claim 3 , further comprising:
a filter configured to be movable forward into and backward from an X-ray optical path from the X-ray source to the sample, the filter having a higher transmittance on a high energy side, wherein an intensity ratio among a plurality of X-rays that are included in the X-ray beam and that have different energies is changed by the filter.

5. The grazing incidence X-ray fluorescence spectrometer of claim 1 , wherein the movable slit member increases the glancing angle by moving upward relative to the surface of the sample.

6. The grazing incidence X-ray fluorescence spectrometer of claim 1 , wherein the movable slit member sets the glancing angle to an angle that is less than a critical angle.

7. A method, comprising:
emitting, by an X-ray source of a spectrometer, X-rays;
forming, by a bent spectroscopic device of the spectrometer that is configured to monochromate the X-rays emitted from the X-ray source, an X-ray beam that is focused on a fixed position on a surface of a sample;
measuring, by a detector of the spectrometer, an intensity of fluorescent X-rays generated from the sample that is irradiated with the X-ray beam; and
setting, by a movable slit member of the spectrometer that is disposed between the bent spectroscopic device and the sample, a glancing angle of the X-ray beam based on the intensity of the fluorescent X-rays measured by the detector,
wherein the movable slit member includes a linear opening by which a width of the X-ray beam is limited in a focusing angle direction.

Assignees

• Rigaku Denki Co Ltd

Inventors

• Omote Kazuhiko
• Yamada Takashi

Classifications

• G01N15/0211

  Investigating a scatter or diffraction pattern · CPC title

• G01N23/2055

  Analysing diffraction patterns · CPC title

• G21K1/062

  Devices having a multilayer structure · CPC title

• G01N23/223 Primary

  by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence · CPC title

• G21K1/04

  using variable diaphragms, shutters, choppers · CPC title