Piezoelectric sensors and quartz crystal monitors

Patent metadata

Field	Value
Publication number	US-10295504-B2
Application number	US-201715698762-A
Country	US
Kind code	B2
Filing date	Sep 8, 2017
Priority date	Sep 12, 2016
Publication date	May 21, 2019
Grant date	May 21, 2019

Abstract

Surface modifications and improvements to piezoelectric-based sensors, such as QCMs and other piezoelectric devices, that significantly increase the sensitivity and the specificity (selectivity). These modifications can comprise mechanical and chemical changes to the surfaces of the sensors, either individually or together. For example, nanosize structures may be provided on the surface to improve sensitivity. Additionally, chemical coatings may be tethered to the surfaces, walls, or crystal to provide targeted sensitivity. Additionally, porous, layered and multiple sensor arrays may be formed to enhance sensitivity and selectivity.

First claim

What is claimed is:

1. A detector, comprising:
a chassis;
a first chamber mounted to the chassis and enclosing a reference sensor comprising a first quartz crystal having a first upper surface and a first plurality of upstanding walls positioned on the first upper surface, wherein the first plurality of walls have a first height of up to 1000 nanometers, a first width of up to 1000 nanometers, and are spaced apart from each other by up to 1000 nanometers;
a second chamber mounted to the chassis and enclosing a cooling element, a temperature sensor mounted to the cooling element, and a detection sensor positioned on the cooling element and comprising a second quartz crystal having a second upper surface and a second plurality of upstanding walls positioned on the second upper surface, wherein the second plurality of walls have a second height of up to 1000 nanometers, a second width of up to 1000 nanometers, and are spaced apart from each other by up to 1000 nanometers;
wherein the second chamber includes an inlet for the flow of air into a top of the second chamber and an outlet for the flow of air out of a bottom of the second chamber so that when the detection sensor is cooled by the cooling element and air is drawn into the inlet and out of the outlet, molecules in the air will be deposited on the detection sensor.

2. The detector of claim 1 , further comprising a second cooling element associated with the second chamber and configured to maintain the second chamber at a temperature different than the first cooling element maintains the detection sensor.

3. The detector of claim 2 , further comprising a heat sink positioned below and proximately to the second chamber.

4. The detector of claim 3 , further comprising a fan positioned to blow across the heat sink and the outlet to create a vacuum proximately to the outlet.

5. The detector of claim 4 , a temperature sensor associated with the second cooling element.

Assignees

• Schlereth Fritz H
• Spencer James
• Univ Syracuse

Inventors

• Schlereth Fritz H
• Spencer James

Classifications

• G01N2291/012

  Phase angle · CPC title

• G01N29/2443 Primary

  Quartz crystal probes · CPC title

• H01L41/0825

  Electricity · mapped topic

• G01N2291/0215

  Mixtures of three or more gases, e.g. air · CPC title

• G01N29/12

  by measuring frequency or resonance of acoustic waves {(measuring frequency or resonant frequency of mechanical vibrations or acoustic waves in general G01H1/06, G01H3/04, G01H13/00; acoustic resonators G10K11/04; vibration or shock testing of structures G01M7/00)} · CPC title