Back grinding apparatus and wear amount measuring method using the same
US-2024424637-A1 · Dec 26, 2024 · US
US10295332B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10295332-B2 |
| Application number | US-201615758534-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 12, 2016 |
| Priority date | Sep 16, 2015 |
| Publication date | May 21, 2019 |
| Grant date | May 21, 2019 |
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At least one aspect of the present disclosure directs to a deformation amount measuring method is a method in which a sheet (101) is used that includes a first layer portion (111) having a first pattern (121) that includes a plurality of line drawings extending in a first direction, and a second layer portion (112) overlaid on the first layer portion (111) and having a second pattern (122) that includes a plurality of line drawings extending in a second direction different than the first direction. The method includes the steps of acquiring, from the sheet (101) that has been disposed on a measurement subject, post-deformation image data corresponding to a post-deformation image including a post-deformation moire produced as a result of a post-deformation first pattern (121) and second pattern (122) being overlaid and finding an amount of deformation of the measurement subject on the basis of the post-deformation image data.
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The invention claimed is: 1. A method for measuring an amount of deformation of a measurement subject in which a sheet is used that comprises a first layer portion having a first pattern that includes a plurality of line drawings extending in a first direction, and a second layer portion overlaid on the first layer portion and having a second pattern that includes a plurality of line drawings extending in a second direction different than the first direction; the method comprising the steps of: acquiring, by a processor, from the sheet that has been disposed on the measurement subject, reference data on the basis of pre-deformation image data corresponding to a pre-deformation image including a pre-deformation moire produced as a result of the pre-deformation first pattern and the second pattern being overlaid and post-deformation image data corresponding to a post-deformation image including a post-deformation moire produced as a result of the post-deformation first pattern and second pattern being overlaid; and calculating, by the processor, an amount of deformation of the measurement subject on the basis of the reference data and the post-deformation image data. 2. The method according to claim 1 , wherein: the first layer portion includes a deformation following portion that follows a deformation of the measurement subject; the second layer portion includes a non-deformation following portion that does not follow the deformation of the measurement subject; the sheet further includes a deformation buffering portion that connects the deformation following portion and the non-deformation following portion; and the step of calculating the amount of deformation of the measurement subject includes a step of finding an amount of deformation of the deformation following portion on the basis of the post-deformation image data. 3. The method according to claim 2 , further comprising a step of: outputting a deformation amount alarm indicating that the amount of deformation of the deformation following portion has exceeded a reference value when the amount of deformation of the deformation following portion is greater than or equal to a predetermined deformation amount threshold. 4. The method according to claim 2 , wherein: the step of calculating the amount of deformation of the deformation following portion includes the steps of: acquiring a first pitch of the pre-deformation moire from the pre-deformation image, and a first angle of inclination with respect to the second direction of extending directions of the pre-deformation moire; acquiring at least one of a second pitch of the post-deformation moire from the post-deformation image and a second angle of inclination with respect to the second direction of the extending directions of the post-deformation moire; calculating an amount of change of a pitch of the first pattern using the first pitch and the first angle of inclination and at least one of the second pitch and the second angle of inclination; and calculating the amount of deformation of the deformation following portion from the amount of change of the pitch of the first pattern. 5. The method according to claim 4 , wherein: the step of acquiring the first pitch and the first angle of inclination includes a step of: acquiring a first spatial frequency information that shows a spatial frequency of the pre-deformation image, and calculating the first pitch and the first angle of inclination from the first spatial frequency information; and the step of acquiring at least one of the second pitch and the second angle of inclination includes a step of: acquiring a second spatial frequency information that shows a spatial frequency of the post-deformation image, and calculating at least one of the second pitch and the second angle of inclination from the second spatial frequency information. 6. The method according to claim 4 , wherein: the step of calculating the amount of deformation of the deformation following portion further includes a step of: acquiring an offset angle between the first direction and the second direction; and the amount of change of the pitch of the first pattern is calculated further using the offset angle. 7. The method according to claim 6 , wherein: the step of acquiring the offset angle includes a step of: calculating the offset angle using the first pitch. 8. The method according to claim 4 , wherein: the step of calculating the amount of deformation of the deformation following portion includes the steps of: acquiring both the second pitch and the second angle of inclination; comparing a first amount of change of the pitch of the first pattern calculated on the basis of the second pitch with a second amount of change of the pitch of the first pattern calculated on the basis of the second angle of inclination; and outputting an alarm indicating a possibility that the amount of change of the pitch that is calculated contains a mistake when a difference between the first amount of change and the second amount of change is greater than or equal to a predetermined first calculation threshold. 9. The method according to claim 4 , wherein: the step of calculating the amount of deformation of the deformation following portion includes a step of: partitioning a pitch change region where the pitch of the line drawings included in the first pattern change between pre-deformation and post-deformation of the deformation following portion, and a pitch constant region where the pitch of the line drawings included in the first pattern do not change between pre-deformation and post-deformation of the deformation following portion; and the amount of deformation of the deformation following portion is found from the post-deformation moire produced in the pitch change region of the post-deformation image. 10. The method according to claim 9 , wherein: the step of calculating the amount of deformation of the deformation following portion further includes the steps of: calculating an amount of movement of the pre-deformation moire and the post-deformation moire in the pitch constant region and estimating the amount of change of the pitch of the first pattern using the amount of movement; and outputting an alarm indicating a possibility that the amount of change of the pitch that is calculated contains a mistake when a difference between the amount of change of the pitch of the first pattern calculated from the pre-deformation moire and the post-deformation moire produced in the pitch change region, and the estimated amount of change is greater than or equal to a predetermined second calculation threshold. 11. A non-transitory computer readable medium containing a program for measuring an amount of deformation of a measurement subject in which a sheet is used that comprises a first layer portion having a first pattern that includes a plurality of line drawings extending in a first direction, and a second layer portion overlaid on the first layer portion and having a second pattern that includes a plurality of line drawings extending in a second direction different than the first direction; the program configured to cause a computer to execute the steps of: acquiring reference data on the basis of pre-deformation image data corresponding to a pre-deformation image including a pre-deformation moire produced as a result of the pre-deformation first pattern and the second pattern being overlaid; acquiring, from the sheet that has been disposed on the measurement subject, post-deformation image data corresponding to a post-deformation image including a post-deformation moire produced as a result of the post-deformation first pattern and second patter
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