Method of creating boron comprising layer

Patent metadata

Field	Value
Publication number	US-10294564-B2
Application number	US-201715688653-A
Country	US
Kind code	B2
Filing date	Aug 28, 2017
Priority date	Aug 28, 2017
Publication date	May 21, 2019
Grant date	May 21, 2019

Abstract

A method for forming boron (B) containing Al2O3 composite layers includes (a) reacting a substrate surface with an aluminum-containing precursor to form a first monolayer, (b) purging excess aluminum-containing precursor and reaction by-product, (c) reacting the first monolayer with a second precursor, and (d) purging excess second precursor and reaction by-product, such that steps (a) to (d) constitute one cycle, the composite layers being formed after a plurality of cycles, and the resultant composite layers have a chemical formula of BxAl2−xO3, where x varies in the range of 0 and 2.

First claim

What is claimed:

1. A method for forming boron (B) containing Al 2 O 3 composite layers, comprising:
(a) reacting a substrate surface with an aluminum-containing precursor to form a first monolayer;
(b) purging excess aluminum-containing precursor and reaction by-product;
(c) reacting the first monolayer with a boron-containing precursor to form a boron-containing surface; and
(d) purging excess boron-containing precursor and reaction by-product,
wherein steps (a) to (d) constitute one cycle, the composite layers being formed after a plurality of cycles, and
wherein the resultant composite layers have a chemical formula of B x Al 2−x O 3 , where x varies in the range of greater than 0 and less than 2.

2. The method of claim 1 , wherein step (c) further comprises:
(c3) reacting the boron-containing surface with an oxygen-containing precursor; and
(c4) purging excess oxygen-containing precursor and reaction by-product.

3. The method of claim 2 , wherein the boron-containing precursor is boric acid (BH 3 O 3 ) and the oxygen-containing precursor is water (H 2 O).

4. The method of claim 1 , wherein the boron-containing precursor comprises a boron-containing component and an alcohol compound component.

5. The method of claim 4 , wherein the boron-containing component is boric acid (BH 3 O 3 ) and the alcohol compound component is a C 1 -C 6 alcohol compound.

6. The method of claim 4 , wherein the boron-containing component comprises at least one of boric acid (BH 3 O 3 ), trimethyl borate (TMB) (C 3 H 9 BO 3 ), boron tribromide (BBr 3 ), boron trifluoride (BF 3 ), diboron tetrafluoride (B 2 F 4 ), triisopropylborane ((C 3 H 7 ) 3 B), triethoxyborane ((C 2 H 5 O) 3 B), or triisopropoxyborane ((C 3 H 7 O) 3 B).

7. The method of claim 4 , wherein the alcohol compound component comprises a C 1 -C 6 alcohol compound.

8. The method of claim 4 , wherein the boron-containing precursor is enriched with 11 B or 10 B isotopic elements.

9. The method of claim 1 , wherein the boron-containing precursor is trimethyl borate (TMB) (C 3 H 9 BO 3 ).

10. The method of claim 1 , wherein the boron-containing precursor comprises a boron-containing component and an oxygen-containing component.

11. The method of claim 10 , wherein the oxygen-containing component comprises at least one of water (H 2 O), ozone (O 3 ), hydrogen peroxide (H 2 O 2 ), or oxygen (O 2 ).

12. The method of claim 1 , wherein the aluminum-containing precursor comprises at least one of trimethylaluminum (Al(CH 3 ) 3 ) (TMA), triethylaluminum ((C 2 H 5 ) 3 Al) (TEA), triethyl(tri-sec-butoxy)dialuminum ((C 2 H 5 ) 3 Al 2 (OC 4 H 9 ) 3 ), aluminum chloride (AlCl 3 ), aluminum isopropoxide (Al((OCH(CH 3 ) 2 ) 3 ), dimethylaluminum isopropoxide ((CH 3 ) 2 AlOCH(CH 3 ) 2 ), tris(2,2,6,6-tetramethyl-3,5-heptanedionato)aluminum (Al(TMHD) 3 ), tri-isobutylaluminum ((C 4 H 9 ) 3 Al), aluminum hexafluoroacetylacetonate (Al(CF 3 COCHCOCF 3 ) 3 ), aluminum ethoxide (Al(OC 2 H 5 ) 3 ), aluminum s-butoxide (Al(OC 4 H 9 ) 3 ), or aluminum acetylacetonate (Al(CH 3 COCHCOCH 3 ) 3 ).

13. The method of claim 1 , wherein step (c) further comprises:
(c1) reacting the first monolayer with an oxygen-containing precursor to form an oxygen-containing surface; and
(c2) purging excess oxygen-containing precursor and reaction by-product.

14. The method of claim 13 , wherein step (c) further comprises:
(c3) reacting the oxygen-containing surface with the boron-containing precursor,
wherein step (c3) is conducted prior to step (c2).

15. The method of claim 14 , wherein the oxygen-containing precursor is water (H 2 O) and the boron-containing precursor is trimethyl borate (TMB) (C 3 H 9 BO 3 ).

16. The method of claim 13 , wherein step (c) further comprises:
(c3) reacting the oxygen-containing surface with the boron-containing precursor.

17. The method of claim 16 , wherein the boron-containing precursor comprises a boron-containing component and an alcohol compound component.

18. The method of claim 17 , wherein the boron-containing component is boric acid (BH 3 O 3 ) and the alcohol compound component is a C 1 -C 6 alcohol compound.

19. A method for forming boron (B) containing Al 2 O 3 composite layers, comprising:
(a) reacting a substrate surface with an aluminum-containing precursor to form a first monolayer;
(b) purging excess aluminum-containing precursor and reaction by-product;
(c) reacting the first monolayer with a second precursor, the second precursor comprising a boron-containing component and an alcohol compound component; and
(d) purging excess second precursor and reaction by-product,
wherein steps (a) to (d) constitute one cycle, the composite layers being formed after a plurality of cycles, and
wherein the resultant composite layers have a chemical formula of B x Al 2−x O 3 , where x varies in the range of greater than 0 and less than 2.

20. A method for forming boron (B) containing Al 2 O 3 composite layers, comprising:
(a) reacting a substrate surface with an aluminum-containing precursor to form a first monolayer;
(b) purging excess aluminum-containing precursor and reaction by-product;
(c) reacting the first monolayer with a second precursor, the second precursor comprising a boron-containing component and an oxygen-containing component; and
(d) purging excess second precursor and reaction by-product,
wherein steps (a) to (d) constitute one cycle, the composite layers being formed after a plurality of cycles, and
wherein the resultant composite layers have a chemical formula of B x Al 2−x O 3 , where x varies in the range of greater than 0 and less than 2.

Assignees

• Uchicago Argonne Llc

Inventors

• Mane Anil U
• Elam Jeffrey W

Classifications

• C23C16/45553 Primary

  characterized by the use of precursors specially adapted for ALD · CPC title

• C23C16/45531

  specially adapted for making ternary or higher compositions · CPC title

• C23C16/045

  Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates · CPC title

• C23C16/403 Primary

  of aluminium, magnesium or beryllium · CPC title

• C23C16/38

  Borides · CPC title