Magnetron having enhanced cooling characteristics

Patent metadata

Field	Value
Publication number	US-10290459-B2
Application number	US-201816163226-A
Country	US
Kind code	B2
Filing date	Oct 17, 2018
Priority date	Sep 22, 2015
Publication date	May 14, 2019
Grant date	May 14, 2019

Abstract

Magnetron configurations that provide more efficient and/or more uniform cooling characteristics and methods for forming the magnetrons are provided. The magnetron includes one or more flow directing structures disposed between parallel cooling fins. The flow directing structures direct air flow across various surfaces of the cooling fins that otherwise would be obstructed by magnetron components, reducing the incidence and/or magnitude of hot spots on the cooling fins and/or on other magnetron components. The flow directing structures also adjust flow rates to improve cooling efficiency.

First claim

We claim:

1. A cooling assembly, comprising:
a plurality of cooling fins, each cooling fin having a central opening; and
one or more flow directing structures formed between neighboring cooling fins, wherein the one or more flow directing structures form a flow channel between the neighboring cooling fins, wherein each flow directing structure intersects two or more cooling fins, wherein the one or more flow directing structures comprise channel walls that converge towards and wrap around the central opening, wherein the channel walls are separated from the central opening, and wherein the channel walls extend from a front edge of the cooling fin to an air restriction facing a rear edge of the cooling fin.

2. The cooling assembly of claim 1 , wherein the channel walls form a substantially flat surface proximate to the front edge of the cooling fins and form a curved surface proximate to the rear edge of the cooling fins.

3. The cooling assembly of claim 1 , wherein the channel walls define the flow channel that expands in a cone-shape from the air restriction adjacent the rear edge to the front edge.

4. The cooling assembly of claim 1 , wherein the channel walls are substantially perpendicular to the cooling fins.

5. The cooling assembly of claim 1 , wherein the plurality of cooling fins and the flow directing structures are formed as a monolithic body.

6. A magnetron, comprising:
a core;
a plurality of cooling fins surrounding the core, each cooling fin having a central opening; and
one or more flow directing structures formed between neighboring cooling fins, wherein the one or more flow directing structures form a flow channel between the neighboring cooling fins, wherein each flow directing structure intersects two or more cooling fins, wherein the one or more flow directing structures comprise channel walls that converge towards and wrap around the core, wherein the channel walls are separated from the central opening, and wherein the channel walls extend from a front edge of the cooling fin to an air restriction facing a rear edge of the cooling fin.

7. The magnetron of claim 6 , wherein the channel walls form a substantially flat surface proximate to the front edge of the cooling fins and form a curved surface proximate to the rear edge of the cooling fins.

8. The magnetron of claim 6 , wherein the channel walls define the flow channel that expands in a cone-shape from the air restriction adjacent the rear edge to the front edge.

9. The magnetron of claim 6 , wherein the channel walls are substantially perpendicular to the cooling fins.

10. The magnetron of claim 6 , wherein the cooling fins and the one or more flow directing structure are formed from at least one of copper, aluminum, or combinations thereof.

11. The magnetron of claim 6 , wherein the core, the cooling fins, and the one or more flow directing structures are formed as a monolithic body.

12. The magnetron of claim 6 , wherein the plurality of cooling fins are parallel to each other.

13. The magnetron of claim 6 , wherein a thickness of at least one cooling fin included in the plurality of cooling fins is about 0.5 millimeters to about 1 millimeter.

14. The magnetron of claim 6 , further comprising a plurality of core cooling fins coupled to the core and between neighboring cooling fins.

15. The magnetron of claim 6 , wherein the one or more flow directing structure further comprises: two or more head channel walls disposed near a front edge of the cooling fin and in between the channel walls.

16. A method for forming a magnetron, comprising:
additively forming a monolithic body comprising a core and a plurality of cooling fins attached to the core, each cooling fin having a central opening; and
forming one or more flow directing features connected between the two or more cooling fins, wherein each flow directing structure intersects two or more cooling fins, wherein the one or more flow directing structures comprise channel walls that converge toward and wrap around the core, wherein the channel walls are separated from the central opening, and wherein the channel walls extend from a front edge of the cooling fin to an air restriction facing a rear edge of the cooling fin.

17. The method of claim 16 , wherein the channel walls form a substantially flat surface proximate to the front edge of the cooling fins and form a curved surface proximate to the rear edge of the cooling fins.

18. The method of claim 16 , wherein the one or more flow directing structures form a flow channel between the neighboring cooling fins.

19. The method of claim 18 , wherein the channel walls define the flow channel that expands in a cone-shape from the air restriction adjacent the rear edge to the front edge.

20. The method of claim 16 , wherein the monolithic body is formed from at least one of copper, aluminum, or combinations thereof.

Assignees

• Applied Materials Inc

Inventors

• Raj Govinda
• Yavelberg Simon
• Sankarakrishnan Ramprakash

Classifications

• H01J25/50

  Magnetrons, i.e. tubes with a magnet system producing an H-field crossing the E-field (with travelling wave not moving completely around the electron space H01J25/42; functioning with plural reflection or with reversed cyclotron action H01J25/62, H01J25/64) · CPC title

• B22F10/28

  Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM] · CPC title

• B33Y80/00

  Products made by additive manufacturing · CPC title

• H01J23/005 Primary

  Cooling methods or arrangements (H01J23/033 takes precedence) · CPC title

• B22F5/10

  of articles with cavities or holes, not otherwise provided for in the preceding subgroups · CPC title