Interference fringe projection apparatus and measurement apparatus

Patent metadata

Field	Value
Publication number	US-10288416-B2
Application number	US-201715813955-A
Country	US
Kind code	B2
Filing date	Nov 15, 2017
Priority date	Jun 1, 2015
Publication date	May 14, 2019
Grant date	May 14, 2019

Abstract

An interference fringe projection apparatus includes light source units that selectively emit light from a coherent light source from one of a plurality of optical emitters, a polarization-maintaining waveguide unit with a plurality of PANDA fibers (polarization-maintaining waveguides) that each guide light emitted from one of the plurality of optical emitters, polarization splitters that split an optical path of light emitted from each of the PANDA fibers by polarization direction, and a polarizing film that transmits only a linear polarization component in a particular direction of light split by the polarization splitter. The light source unit only emits linearly polarized light in one polarization-maintaining direction for at least one of the PANDA fibers, and the polarization-maintaining waveguide unit causes retardation of light emitted from the PANDA fibers to vary.

First claim

The invention claimed is:

1. An interference fringe projection apparatus comprising:
a light source unit configured to emit coherent light selectively from one of a plurality of optical emitters;
a polarization-maintaining waveguide unit comprising a plurality of polarization-maintaining waveguides each configured to guide light emitted from one of the plurality of optical emitters;
a polarization splitter configured to split an optical path of light emitted from the polarization-maintaining waveguides by polarization direction; and
a polarizer configured to transmit only a linear polarization component in a particular direction of light split by the polarization splitter, thereby transmitting linearly polarized light, the linearly polarized light transmitted by the polarizer being projected so as to form an interference fringe pattern,
wherein:
the light source unit is configured to allow emission of only linearly polarized light in one polarization-maintaining direction for at least one polarization-maintaining waveguide among the plurality of polarization-maintaining waveguides, and
the polarization-maintaining waveguide unit is configured to cause retardation of light emitted from the plurality of polarization-maintaining waveguides to vary for each polarization-maintaining waveguide, the polarization-maintaining waveguide unit including a retarder on an optical emission end side of at least one of the polarization-maintaining waveguides, wherein the retarder is arranged so that a direction of an optical axis of the retarder is in any one polarization direction split by the polarization splitter.

2. The interference fringe projection apparatus of claim 1 , wherein the light source unit comprises one light source and an optical emitter selection unit configured to switch an optical path of light from the light source and to select one of the plurality of optical emitters.

3. The interference fringe projection apparatus of claim 1 , wherein the light source unit comprises a plurality of light sources in one-to-one correspondence with the plurality of optical emitters and is configured to selectively cause one of the plurality of light sources to emit light.

4. The interference fringe projection apparatus of claim 1 , wherein at least one polarization-maintaining waveguide among the plurality of polarization-maintaining waveguides is arranged so that a polarization-maintaining direction of the at least one polarization-maintaining waveguide is a direction that bisects a polarization direction of light split in the polarization splitter.

5. The interference fringe projection apparatus of claim 1 , wherein the light source comprises a half-wave plate and a half-wave plate rotation system that rotates the half-wave plate and controls a polarization direction of light incident on the polarization-maintaining waveguide unit.

6. The interference fringe projection apparatus of claim 1 , wherein the polarization-maintaining waveguide unit comprises a phase modulator configured to control a phase difference between two beams of polarized light that pass through at least one of the polarization-maintaining waveguides and are split by the polarization splitter.

7. A measurement apparatus comprising:
the interference fringe projection apparatus of claim 1 ;
an imager; and
a calculator,
wherein
the imager captures an image of an object, an interference fringe being projected on the object by the interference fringe projection apparatus, and
the calculator derives a shape of the object using the interference fringe in the image of the object and a positional relationship between the interference fringe projection apparatus and the imager.

Assignees

• Olympus Corp

Inventors

• Watanabe Daichi

Classifications

• G01B11/25 Primary

  by projecting a pattern, e.g. {one or more lines,} moiré fringes on the object (G01B11/255 takes precedence {; image analysis for depth or shape recovery G06T7/50}) · CPC title

• G01B9/02001

  characterised by controlling or generating intrinsic radiation properties · CPC title

• G01B11/2441 Primary

  using interferometry · CPC title