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Device and method for estimating a flow of gas in an enclosure maintained at reduced pressure in relation to the gas
US10281304B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10281304-B2 |
| Application number | US-201314440264-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 6, 2013 |
| Priority date | Nov 6, 2012 |
| Publication date | May 7, 2019 |
| Grant date | May 7, 2019 |
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Abstract
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Method for estimating a gas flow in an enclosure maintained in a low pressure regimen relative to the gas, including: measuring, as a function of time, a gas flow J measurement in the enclosure, and estimating values of the parameters A and B iteratively implemented by decreasing an estimation error based on a difference between J estim (t) and J measurement , and wherein, when J measurement corresponds to a pressure rise of the gas in the enclosure, J estim (t) is calculated according to the equation: J estim ( t ) = 2 A ∑ n = 1 n ma x ( B π ( t - OffX ) ) 1 2 exp ( - 2 ( n + 1 ) 2 4 B ( t - OffX ) ) + OffY and when J measurement corresponds to a pressure decrease of the gas in the enclosure, J estim (t) is calculated according to the equation: J estm ( t ) = P init - 2 A ∑ n = 1 n ma x ( B π ( t - OffX ) ) 1 2 exp ( - ( 2 n + 1 ) 2 4 B ( t - OffX ) ) + OffY FIG. 1 .
First claim
Opening claim text (preview).
The invention claimed is: 1. A method for estimating a permeation of a gas barrier layer, comprising: providing a permeameter including first and second chambers separated from each other by the gas barrier layer, wherein the first chamber is filled with at least one gas and the second chamber is maintained in a low pressure regimen relative to said at least one gas; providing a mass spectrometer in the second chamber of the permeameter; measuring, by the mass spectrometer, an evolution of a partial pressure of the at least one gas in the second chamber as a function of time; calculating, by processing circuitry, a gas flow J measurement in the second chamber based on the measured partial pressure of the at least one gas in the second chamber; estimating, by the processing circuitry, values of parameters A and B iteratively implemented by decreasing an estimation error based on a difference between an estimation of the gas flow J estim (t) and the measured gas flow J measurement , wherein when the measured gas flow J measurement corresponds to a pressure rise of the at least one gas in the second chamber, the estimation of the gas flow J estim (t) is calculated according to the equation: J estim ( t ) = 2 A ∑ n = 1 n max ( B π ( t - OffX ) ) 1 2 exp ( - ( 2 n + 1 ) 2 4 B ( t - OffX ) ) + OffY when the measured gas flow J measurement corresponds to a pressure decrease of the at least one gas in the second chamber, the estimation of the gas flow J estim (t) is calculated according to the equation: J estim ( t ) = P init - 2 A ∑ n = 1 n max ( B π ( t - OffX ) ) 1 2 exp ( - ( 2 n + 1 ) 2 4 B (
Assignees
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Classifications
- G01N15/0826Primary
and measuring fluid flow rate, i.e. permeation rate or pressure change · CPC title
- G01F1/50Primary
Correcting or compensating means · CPC title
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- What does patent US10281304B2 cover?
- Method for estimating a gas flow in an enclosure maintained in a low pressure regimen relative to the gas, including: measuring, as a function of time, a gas flow J measurement in the enclosure, and estimating values of the parameters A and B iteratively implemented by decreasing an estimation error based on a difference between J estim (t) and J measurement , and wherein, when J …
- Who is the assignee on this patent?
- Commissariat Energie Atomique
- What technology area does this patent fall under?
- Primary CPC classification G01N15/0826. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue May 07 2019 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).