Mechanical seal arrangement having sliding surfaces of different hardness
US-9841107-B2 · Dec 12, 2017 · US
US10280977B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10280977-B2 |
| Application number | US-201615566169-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 7, 2016 |
| Priority date | Apr 16, 2015 |
| Publication date | May 7, 2019 |
| Grant date | May 7, 2019 |
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In an embodiment, a slide component includes a circular ring-shaped stationary-side seal ring 5 fixed to a stationary side and a circular ring-shaped rotating-side seal ring 3 rotating with a rotating shaft 1 , and relatively rotates respective opposed sliding faces S of the stationary-side seal ring 5 and the rotating-side seal ring 3 , thereby sealing a sealed fluid present on one side in a radial direction of the sliding face relatively rotating and sliding, wherein the sealed fluid is a silicate containing fluid; and on at least either one sliding face of the stationary-side seal ring 5 and the rotating-side seal ring 3 , an amorphous carbon film 10 formed by using hydrocarbon gas not containing organosilicon compound gas in a plasma CVD method is laminated. The slide component can seal a silicate containing sealed fluid to which silicate is added.
Opening claim text (preview).
The invention claimed is: 1. A slide component which includes a circular ring-shaped stationary-side seal ring fixed to a stationary side and a circular ring-shaped rotating-side seal ring rotating with a rotating shaft, and relatively rotates respective opposed sliding faces of the stationary-side seal ring and the rotating-side seal ring, for sealing a sealed fluid containing silicate present on one side in a radial direction of the sliding faces relatively rotating and sliding, wherein: at least either one of the sliding faces of the stationary-side seal ring and the rotating-side seal ring is coated with an amorphous carbon film containing 0.34 at % or less of silicon in a manner preventing deposition of a silicate component contained in the sealed fluid on the sliding faces. 2. The slide component according to claim 1 , wherein a base material of the stationary-side seal ring or the rotating-side seal ring is silicon carbide. 3. The slide component according to claim 1 , wherein the amorphous carbon film is a film formed from hydrocarbon gas containing no organosilicon compound gas by plasma CVD. 4. The slide component according to claim 2 , wherein the amorphous carbon film is a film formed from hydrocarbon gas containing no organosilicon compound gas by plasma CVD.
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