Vacuum pump component, siegbahn type exhaust mechanism and compound vacuum pump

Patent metadata

Field	Value
Publication number	US-10280937-B2
Application number	US-201415037545-A
Country	US
Kind code	B2
Filing date	Oct 3, 2014
Priority date	Nov 28, 2013
Publication date	May 7, 2019
Grant date	May 7, 2019

Abstract

A vacuum pump component includes a stationary disk that is formed with a spiral groove (helical groove) having a ridge portion and a valley part and has a projecting (protruding) portion on both or either one of an inner-diameter portion of the disk which faces a rotary cylinder (rotator cylinder-shaped portion) and an inner-diameter side of a stationary cylinder disposed on an outer peripheral side of the stationary disk. A second vacuum pump component includes rotary disk formed with a spiral groove having a ridge portion and a valley part and having a projecting (protruding) portion on both or either one of an outer-diameter portion of a rotary cylinder disposed on an inner peripheral side of the rotary disk and an outer-diameter portion of the rotary disk which faces a spacer.

First claim

What is claimed is:

1. A vacuum pump component, comprising:
a disk-shaped portion having spiral grooves disposed in an inlet port side and an outlet port side,
wherein
a projection is disposed on at least a part of at least any one of an inner peripheral side surface or an outer peripheral side surface of the disk-shaped portion in which the spiral groove is not disposed, an outer peripheral side surface of a cylinder-shaped portion which is disposed on an inner peripheral side of the disk-shaped portion and which is concentric to the disk-shaped portion, and an inner peripheral side surface of a cylinder-shaped portion which is disposed on an outer peripheral side of the disk-shaped portion and which is concentric to the disk-shaped portion, and
an exit of a first spiral groove on the inlet port side has a portion axially overlapping with an entrance of a second spiral groove on the outlet port side.

2. The vacuum pump component according to claim 1 , wherein the disposition number of the projection is an integral multiple of the disposition number of the spiral groove.

3. The vacuum pump component according to claim 1 , wherein the disposition number of the spiral groove is an integral multiple of the disposition number of the projection.

4. The vacuum pump component according to claim 1 , wherein, at a surface where the projection is disposed, a position of the projection corresponds to a position of an end portion, on a side of the surface, of a ridge portion of the spiral groove.

5. The vacuum pump component according to claim 1 , wherein, at a surface where the projection is disposed, the projection and an end portion, on a side of the surface, of a ridge portion of the spiral groove are disposed in a continuous shape.

6. The vacuum pump component according to claim 1 , wherein the projection is disposed at a predetermined angle relative to a center axis of the disk-shaped portion.

7. The vacuum pump component according to claim 1 , wherein the projection is disposed to have a size such that an amount of projection thereof is not less than 70% of a depth of the spiral groove at a portion thereof which is close to the projection.

8. The vacuum pump component according to claim 1 , wherein the disk-shaped portion includes one or a plurality of components.

9. A Siegbahn type exhaust mechanism, comprising:
the vacuum pump component according to claim 1 ; and
a second component having a surface facing the spiral groove, wherein
a gas is transported by an interaction of the vacuum pump component and the second component.

10. The Siegbahn type exhaust mechanism according to claim 9 , wherein the second component and the projection are disposed to have sizes such that a distance between respective surfaces of the second component and the projection which face each other is not more than 2-mm.

11. The Siegbahn type exhaust mechanism according to claim 9 , wherein the projection is disposed to be inclined in a direction of exhaust in a vacuum pump including the vacuum pump component.

12. A compound vacuum pump, comprising in a compounded form:
the Siegbahn type exhaust mechanism according to claim 9 ; and
a thread groove type molecular pump mechanism.

13. A compound vacuum pump, comprising in a compounded form:
the Siegbahn type exhaust mechanism according to claim 9 ; and
a turbo molecular pump mechanism.

14. A compound vacuum pump, comprising in a compounded form:
the Siegbahn type exhaust mechanism according to claim 9 ;
a thread groove type molecular pump mechanism; and
a turbo molecular pump mechanism.

15. A vacuum pump component, comprising:
a cylinder-shaped portion disposed concentrically with a disk-shaped portion having a spiral grooves disposed in an inlet port side and an outlet port side,
wherein
a projection is disposed on at least a part of at least any one of an outer peripheral side surface of the cylinder-shaped portion when the disk-shaped portion is disposed on an outer peripheral side of the cylinder-shaped portion and an inner peripheral side surface of the cylinder-shaped portion when the disk-shaped portion is disposed on an inner peripheral side of the cylinder-shaped portion, and
an exit of a first spiral groove on the inlet port side has a portion axially overlapping with an entrance of a second spiral groove on the outlet port side.

Assignees

• Edwards Japan Ltd

Inventors

• Nonaka Manabu
• Kabasawa Takashi

Classifications

• F04D29/441 Primary

  especially adapted for elastic fluid pumps · CPC title

• F04D19/042

  Turbomolecular vacuum pumps · CPC title

• F04D29/32

  for axial flow pumps · CPC title

• F04D29/522

  especially adapted for elastic fluid pumps · CPC title

• F04D17/168 Primary

  Pumps specially adapted to produce a vacuum · CPC title