Semiconductor device including buried contact and method for manufacturing the same
US-12178034-B2 · Dec 24, 2024 · US
US10276438B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10276438-B2 |
| Application number | US-201715646236-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 11, 2017 |
| Priority date | Aug 23, 2016 |
| Publication date | Apr 30, 2019 |
| Grant date | Apr 30, 2019 |
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A marked pixel unit includes at least one active element, a first dielectric layer, a color filter unit, a second dielectric layer, and at least one pixel electrode. The active element includes a source, a gate, and a drain. The first dielectric layer is configured to cover the gate. The color filter unit is disposed above the first dielectric layer, and has an alignment opening. The second dielectric layer is disposed above the active element and the color filter unit, and has a contact hole. The pixel electrode is disposed above the second dielectric layer, and electrically connected to the drain through the contact hole. The contact hole of the second dielectric layer is located outside the alignment opening.
Opening claim text (preview).
What is claimed is: 1. A marked pixel unit, comprising: at least one active element comprising a source, a gate, and a drain; a first dielectric layer covering the gate; a color filter unit, disposed above the first dielectric layer, wherein the color filter unit has an alignment opening; a second dielectric layer covering the active element and the color filter unit, wherein the second dielectric layer has a contact hole; at least one pixel electrode, disposed above the second dielectric layer, wherein the pixel electrode is electrically connected to the drain through the contact hole, and the contact hole of the second dielectric layer is located outside the alignment opening; a bottom electrode of a capacitor; and a top electrode of the capacitor, electrically connected to the drain, wherein the first dielectric layer is disposed between the bottom electrode and the top electrode, the alignment opening of the color filter unit is disposed above the top electrode, and an area of an orthographic projection of the alignment opening on the top electrode is smaller than an area of the top electrode. 2. The marked pixel unit according to claim 1 , wherein the color filter unit covers or does not cover two opposite edges of the top electrode. 3. The marked pixel unit according to claim 2 , wherein an orthographic projection of each of the edges of the top electrode on an upper surface of the color filter unit is substantively parallel to an orthographic projection of each of two opposite side walls of the alignment opening of the color filter unit on the upper surface of the color filter unit. 4. The marked pixel unit according to claim 3 , wherein the color filter unit does not cover the active element and the contact hole. 5. The marked pixel unit according to claim 1 , wherein the color filter unit does not cover the active element and the contact hole. 6. A display device, comprising: a substrate; and at least one marked pixel unit and at least one unmarked pixel unit, respectively disposed above the substrate, wherein each of the at least one marked pixel unit and the at least one unmarked pixel unit comprises a color filter unit, wherein: the color filter unit of the marked pixel unit comprises an alignment opening; the unmarked pixel unit comprises a spacer disposed above the color filter unit of the unmarked pixel unit, wherein a first location of an orthographic projection of the spacer on the color filter unit of the unmarked pixel unit corresponds to a second location of the alignment opening in the color filter unit of the marked pixel unit; the substrate comprises a first exposed area and a second exposed area; the first exposed area has a first edge adjacent to the second exposed area and a second edge away from the second exposed area; the at least one marked pixel unit comprises a first marked pixel unit and a second marked pixel unit; and the first marked pixel unit and the second marked pixel unit are disposed in the first exposed area, and respectively adjacent to the first edge and the second edge of the first exposed area. 7. The display device according to claim 6 , wherein a relative location of the spacer to the unmarked pixel unit is substantively the same as a relative location of the alignment opening to the marked pixel unit. 8. The display device according to claim 6 , wherein the marked pixel unit further comprises: at least one active element comprising a source, a gate, and a drain; a first dielectric layer covering the gate, wherein the color filter unit of the marked pixel unit is disposed above the first dielectric layer; a second dielectric layer covering the active element and the color filter unit, wherein the second dielectric layer has a contact hole; and at least one pixel electrode, disposed above the second dielectric layer, wherein the pixel electrode is electrically connected to the drain through the contact hole, and the contact hole of the second dielectric layer is located outside the alignment opening. 9. The display device according to claim 6 , wherein: the at least one marked pixel unit and the at least one unmarked pixel unit are arranged in an array; and the first marked pixel unit and the second marked pixel unit are located in a same row of the array. 10. The display device according to claim 9 , wherein a transmission spectrum of the color filter unit of the first marked pixel unit is substantively the same as that of the color filter unit of the second marked pixel unit. 11. The display device according to claim 9 , wherein the unmarked pixel unit is at least partially disposed between the first marked pixel unit and the second marked pixel unit. 12. The display device according to claim 6 , wherein: the second exposed area has a third edge adjacent to the first exposed area and a fourth edge away from the first exposed area; the at least one marked pixel unit further comprises a third marked pixel unit and a fourth marked pixel unit; and the third marked pixel unit and the fourth marked pixel unit are disposed in the second exposed area, and are respectively adjacent to the third edge and the fourth edge of the second exposed area. 13. A method for fabricating a display device, comprising: forming a first color filter layer on a substrate, wherein at least one marked pixel unit is disposed above the substrate, and the marked pixel unit comprises an active element and a top electrode of a capacitor, wherein the top electrode is electrically connected to the active element; patterning the first color filter layer to form at least one first color filter unit, wherein the first color filter unit has an alignment opening corresponding to the top electrode; detecting a first location of the top electrode of the marked pixel unit and a second location of the alignment opening of the first color filter unit; according to the detection result of a difference between the first location of the top electrode of the marked pixel unit and the second location of the alignment opening of the first color filter unit, determining to calibrate the patterned first color filter layer or to form a second color filter layer on the substrate; and forming a dielectric layer on the first color filter unit, wherein the dielectric layer has a contact hole located outside the alignment opening. 14. The method for fabricating a display device according to claim 13 , wherein the patterning the first color filter layer comprises: exposing the first color filter layer in a first exposed area of the substrate using an exposure machine; and moving the substrate by a preset distance, and exposing, by the exposure machine, the first color filter layer in a second exposed area of the substrate, wherein the first exposed area is adjacent to the second exposed area, and the calibrating the patterned first color filter layer comprises adjusting the preset distance. 15. The method for fabricating a display device according to claim 13 , wherein the detecting the first location of the top electrode of the marked pixel unit and the second location of the alignment opening of the first color filter unit comprises: detecting locations of two opposite edges of the top electrode to determine a center of the top electrode in a direction; and detecting locations of two opposite side walls of the alignment opening to determine a center of the alignment opening in the direction, wherein an orthographic projection of each of the edges of the top electrode on the substrate is substantively parallel to an orthographic projection of each of the side walls of the alignment openin
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