Electromagnetic drive comprising a stator and a stator holder

Patent metadata

Field	Value
Publication number	US-10274846-B2
Application number	US-201815906346-A
Country	US
Kind code	B2
Filing date	Feb 27, 2018
Priority date	Sep 8, 2015
Publication date	Apr 30, 2019
Grant date	Apr 30, 2019

Abstract

An electromagnetic drive includes a stator, having a stator holder and an actuating element which is movable by electromagnetic interaction with the stator. The stator holder has at least two electrically conductive paths running separately from and adjacent to one another. In each case, the two paths running separately from and adjacent to one another form a path pair, and the paths of the path pair are connected to one another in electrically conductive fashion at their respective ends. The paths of the path pair are arranged such that the stator and/or the actuating element induces eddy currents acting in opposite directions in the paths.

First claim

What is claimed is:

1. An electromagnetic drive, comprising:
a stator, comprising a stator holder; and
an actuating element movable via electromagnetic interaction with the stator,
wherein:
the stator holder comprises a path pair comprising first and second electrically conductive paths running separately from each other and adjacent to each other;
an end of the first path is electrically connected to an end of the second path;
the first and second paths are configured so that, during use of the electromagnetic drive, at least one element selected from the group consisting of the stator and the actuating element induces eddy currents acting in opposite directions in the paths;
the stator holder comprises a gap running in an axial direction so that the stator holder comprises a first end and a second end facing the first end; and
the first and second ends of the stator holder are spaced from each other in a circumferential direction.

2. The electromagnetic drive of claim 1 , wherein:
the end of the first path faces is connected to the end of the second path in a region of the first and second ends of the stator holder; and
the first and second ends of the stator holder face each other in the circumferential direction.

3. The electromagnetic drive of claim 1 , wherein:
the stator holder comprises multiple stator holder segments electrically separated from each other in the circumferential direction;
each stator holder segment comprises a path pair comprising first and second electrically conductive paths running separately from and adjacent each other; and
for each stator holder segment, the first path comprises an end that is electrically connected to an end of the second path.

4. The electromagnetic drive of claim 2 , wherein:
each stator segment is arranged axially on the stator holder;
for each stator segment, its first and second paths are arranged on the stator holder; and
for each stator segment, its first and second ends are radially offset relative to each other.

5. The electromagnetic drive of claim 1 , wherein:
the stator is arranged axially on the stator holder;
the first and second paths are arranged on the stator holder; and
the first and second ends are radially offset relative to each other.

6. The electromagnetic drive of claim 5 , wherein an electrically insulating gap runs in the axial direction between the end of the first path and the end of the second path.

7. The electromagnetic drive of claim 6 , wherein:
the first path is radially inward from the second path; and
in the axial direction, at least one of the following holds: i) the first path is shorter than the second path; and ii) the first path has a smaller radial thickness than the second path.

8. The electromagnetic drive of claim 6 , further comprising an adhesive, wherein at least one of the following holds:
the adhesive is in the gap between the first and second paths;
the adhesive is in the gap between two ends of the stator holder;
the adhesive is between the stator and the stator holder;
the adhesive is between the stator and a cover; and
the adhesive is between the cover and the first and second paths.

9. The electromagnetic drive of claim 5 , wherein:
the first path is radially inward from the second path; and
in the axial direction, at least one of the following holds: i) the first path is shorter than the second path; and ii) the first path has a smaller radial thickness than the second path.

10. The electromagnetic drive of claim 5 , further comprising an adhesive, wherein at least one of the following holds:
the adhesive is in a gap running axially between the first and second paths;
the adhesive is in the gap between two ends of the stator holder;
the adhesive is between the stator and the stator holder;
the adhesive is between the stator and a cover; and
the adhesive is between the cover and the first and second paths.

11. The electromagnetic drive of claim 1 , wherein:
the stator is arranged radially on the stator holder; and
the first and second paths are arranged on the stator holder and axially offset relative to each other.

12. The electromagnetic drive of claim 1 , wherein an electrically insulating gap runs in the radial direction between the ends of the first and second paths.

13. The electromagnetic drive of claim 1 , wherein the first and second are configured so that, during use of the electromagnetic drive, an induction action of the stator and/or of the actuating element on the stator holder is at least approximately cancelled out.

14. The electromagnetic drive of claim 1 , wherein the stator holder is configured to that an inductive coupling factor between the stator and/or the actuating element, on the one hand, and the stator holder, on the other hand, is less than 0.1.

15. The electromagnetic drive of claim 1 , wherein the first and second paths are configured so that, during use of the electromagnetic drive, eddy currents induced in the first path at least approximately quantitatively correspond to eddy currents induced in the second path.

16. The electromagnetic drive of claim 1 , wherein the stator holder encapsulates the stator.

17. The electromagnetic drive of claim 1 , further comprising a cover, wherein:
the stator comprises a fastening surface configured to fasten to the stator holder, an exposed surface on an opposite end of the stator, and first and second side surfaces which run at right angles to the former and parallel to each other;
the stator holder adjoins the fastening surface;
the first path at least partially encompasses the first side surface; and
the cover covers the exposed surface and is connected to the first and second two paths to encapsulate the stator.

18. An apparatus, comprising:
an illumination system, comprising:
an electromagnetic drive according to claim 1 ; and
an optical unit comprising an optical element which is adjustable and/or manipulatable and/or deformable via the electromagnetic drive,

wherein the apparatus is a semiconductor lithography projection exposure apparatus.

19. The apparatus of claim 18 , further comprising a projection objective.

20. The apparatus of claim 19 , further comprising a radiation source.

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Wesselingh Jasper
• Lorenz Axel

Classifications

• H01F7/126

  Supporting or mounting · CPC title

• G03F7/70758

  Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving · CPC title

• G03F7/70383

  Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams (maskless lithography using a programmable mask G03F7/70291) · CPC title

• G03F7/70841

  Constructional issues related to vacuum environment, e.g. load-lock chamber · CPC title

• G03F7/70258

  Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system · CPC title