Pressure sensing device and pressure sensing apparatus

Patent metadata

Field	Value
Publication number	US-10274387-B2
Application number	US-201715423594-A
Country	US
Kind code	B2
Filing date	Feb 3, 2017
Priority date	Oct 3, 2016
Publication date	Apr 30, 2019
Grant date	Apr 30, 2019

Abstract

A pressure sensing device including a light source, at least one resonant structure, a cladding body, a first substrate and a second substrate is provided. The light source is configured to provide an original broadband light. The resonant structure includes a plurality of semiconductor rod structures arranged into a row at intervals along a single arranging direction, and each of the semiconductor rod structures has a lattice constant on the arranging direction. The original broadband light is transmitted between the semiconductor rod structures, and a resonant light is produced, wherein each of the semiconductor rod structures has a length perpendicular to the arranging direction and has a width parallel to the arranging direction, the length and the width are less than the wavelength of the resonant light. The cladding body completely covers the semiconductor rod structures of the at least one resonant structure. The cladding body and the at least one resonant structure are interposed between the first substrate and the second substrate. When a pressure is applied on at least one of the first substrate and the second substrate, the pressure is transmitted to the cladding body along a direction perpendicular to the arranging direction, a deformation corresponding to the pressure is occurred on the cladding body and the semiconductor rod structures on the arranging direction, and a wavelength of the resonant light is changed according to the deformation. Besides, a pressure sensing apparatus is also provided.

First claim

What is claimed is:

1. A pressure sensing device, comprising:
a light source, configured to provide an original broadband light;
at least one resonant structure, wherein a resonant structure comprises a plurality of semiconductor rod structures arranged into a row at intervals along a single arranging direction, and each of the semiconductor rod structures has a lattice constant along the arranging direction; the original broadband light propagates between the semiconductor rod structures, and producing a resonant light, wherein each of the semiconductor rod structures has a length perpendicular to the arranging direction and has a width parallel to the arranging direction, the length and the width is shorter than a wavelength of the resonant light;
a cladding body, completely covering the semiconductor rod structures of the at least one resonant structure;
a first substrate and a second substrate, wherein the cladding body and the at least one resonant structure are interposed between the first substrate and the second substrate;
wherein when a pressure is applied on at least one of the first substrate and the second substrate, the pressure is transmitted to the cladding body along a direction perpendicular to the arranging direction, a deformation corresponding to the pressure is occurred on the cladding body and the semiconductor rod structures on the arranging direction, and the wavelength of the resonant light is changed according to the deformation.

2. The pressure sensing device according to claim 1 , further comprising a detector, receiving the resonant light to produce a spectral signal; and a processor, calculating a deformation value according to a change of the spectral signal.

3. The pressure sensing device according to claim 2 , further comprising a first light-guiding portion and a second light-guiding portion, the first light-guiding portion and the second light-guiding portion are disposed in the cladding body along the arranging direction, the first light-guiding portion is configured to guide the original broadband light into a resonant structure, and the second light-guiding portion is configured to guide the resonant light into the detector.

4. The pressure sensing device according to claim 3 , wherein the first light-guiding portion, the semiconductor rod structures of a resonant structure and the second light-guiding portion are arranged into a row along the arranging direction, an end of the first light-guiding portion faces the light source and another end of the first light-guiding portion faces the semiconductor rod structures, an end of the second light-guiding portion faces the semiconductor rod structures and another end of the second light-guiding portion faces the detector.

5. The pressure sensing device according to claim 3 , wherein the first light-guiding portion and the second light-guiding portion are connected to form into a light-guiding structure, and disposed beside the semiconductor rod structures of a resonant structure arranged along the arranging direction.

6. The pressure sensing device according to claim 1 , wherein a number of the at least one resonant structure is two, the resonant structures comprises a first resonant structure and a second resonant structure, the semiconductor rod structures of the first resonant structure are arranged into a first row, the semiconductor rod structures of the second resonant structure are arranged into a second row parallel and adjacent to the first row, and the semiconductor rod structures on the first row and the semiconductor rod structures on the second row have a gap on a gap direction perpendicular to the arranging direction.

7. The pressure sensing device according to claim 6 , wherein when the pressure is transmitted to the cladding body through a direction simultaneously perpendicular to the arranging direction and perpendicular to the gap direction, a deformation is occurred on the cladding body and the semiconductor rod structures of the resonant structures on the gap direction, so that the gap is changed, wherein the wavelength of the resonant light is changed according to the change of the gap.

8. The pressure sensing device according to claim 1 , wherein the light source is a back light source, disposed on a side of the cladding body, and a material of the semiconductor rod structures comprises a semiconductor material having a direct bandgap.

9. The pressure sensing device according to claim 2 , further comprising a light-guiding structure, disposed in the cladding body, the semiconductor rod structures of a resonant structure and the light-guiding structure are arranged into a row along the arranging direction, an end of the light-guiding structure faces the semiconductor rod structures and another end of the light-guiding structure faces the detector, wherein the light-guiding structure is configured to guide the resonant light into the detector.

10. The pressure sensing device according to claim 2 , further comprising a light-guiding structure, disposed beside the semiconductor rod structures of a resonant structure arranged along the arranging direction, and an end of the light-guiding structure faces the detector, wherein the resonant light enters the light-guiding structure through a coupling, and the light-guiding structure is configured to guide the resonant light into the detector.

11. A pressure sensing apparatus, comprising:
a light source, configured to provide an original broadband light;
a plurality of resonant structures, wherein each of the resonant structures comprises a plurality of semiconductor rod structures arranged into a row at intervals along a single arranging direction, and each of the semiconductor rod structures has a lattice constant on the arranging direction; at least part of the resonant structures arranged along a first direction, wherein at least part of the resonant structures are arranged along a second direction different from the first direction; the original broadband light entering at least part of the resonant structures and transmitted between the semiconductor rod structures, and producing a plurality of resonant lights, wherein each of the semiconductor rod structures of a resonant structure has a length perpendicular to the arranging direction and has a width parallel to the arranging direction, the length and the width are less than a wavelength of the resonant light;
a cladding body, completely covering the semiconductor rod structures of the resonant structures;
a first substrate and a second substrate, wherein the cladding body and the resonant structures are interposed between the first substrate and the second substrate;
wherein when a pressure is applied on at least one of the first substrate and the second substrate, and the pressure is transmitted to the cladding body along a direction perpendicular to the arranging direction, a deformation corresponding to the pressure is occurred on the cladding body and the semiconductor rod structures of the resonant structures on the arranging direction, so that a value of the lattice constants is changed, and the wavelength of the resonant lights is changed according to a change of the lattice constants.

12. The pressure sensing apparatus according to claim 11 , further comprising a detector, receiving the resonant lights of at least part of the resonant structures to produce a plurality of spectral signals; and a processor, calculating an occurring location of the deformation and a deformation value of the deformation according to the spectral signals.

13. The pressure sensing apparatus according to claim 12 , further comprising a plurality of first light-guiding portions an

Assignees

• Univ National Chiao Tung

Inventors

• Lu Tsan-Wen
• Wang Chun
• Lee Po-Tsung

Classifications

• H01S5/0028 Primary

  Laser diodes used as detectors · CPC title

• H01S5/12

  the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers (comprising a photonic bandgap structure H01S5/11; surface-emitting lasers H01S5/18) · CPC title

• H01S5/0607

  by varying physical parameters other than the potential of the electrodes, e.g. by an electric or magnetic field, mechanical deformation, pressure, light, temperature · CPC title

• H01L31/02327

  Electricity · mapped topic

• G01L7/026 Primary

  with optical transmitting or indicating means (G01L7/045, G01L7/065, G01L7/086, G01L7/106, G01L7/187 take precedence) · CPC title