Optical inspecting apparatus
US-2016153918-A1 · Jun 2, 2016 · US
US10274310B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10274310-B2 |
| Application number | US-201615388743-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 22, 2016 |
| Priority date | Dec 22, 2016 |
| Publication date | Apr 30, 2019 |
| Grant date | Apr 30, 2019 |
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Surface sensing systems and methods for imaging a scanned surface of a sample via sum-frequency vibrational spectroscopy are disclosed herein. The systems include a sample holder, a visible light source configured to direct a visible light beam incident upon a sampled location of the scanned surface and a tunable IR source configured to direct a tunable IR beam coincident with the visible light beam upon the sampled location. The systems also include a scanning structure configured to scan the visible light beam and the tunable IR beam across the scanned surface, and a light filter configured to receive an emitted beam from the scanned surface and to filter the emitted beam to generate a filtered light beam. The systems further include a light detection system configured to receive the filtered light beam, and an alignment structure. The methods include methods of operating the systems.
Opening claim text (preview).
The invention claimed is: 1. A surface sensing system for imaging a scanned surface of a sample, the system comprising: a sample holder including a support surface configured to support the sample; a visible light source configured to direct a visible light beam incident upon a sampled location on the scanned surface when the sample is supported by the support surface; a tunable infrared (IR) source configured to direct a tunable IR beam coincident with the visible light beam incident upon the sampled location on the scanned surface when the sample is supported by the support surface, wherein the tunable IR source further is configured to selectively vary a wavelength of the tunable IR beam to permit the tunable IR beam to selectively induce resonance within an imaged structure that is positioned on the scanned surface; a scanning structure configured to scan the visible light beam and the tunable IR beam across the scanned surface to selectively vary a portion of the scanned surface that defines the sampled location, wherein the scanning structure is configured to at least one of: (i) concurrently move both the visible light beam and the tunable IR beam relative to the scanned surface; (ii) operatively translate the sample holder relative to both the visible light beam and the tunable IR beam; (iii) move the visible light source independently of the tunable IR source; and (iv) move the IR source independently of the visible light source; a light filter configured to receive an emitted light beam, which includes a sum frequency signal between the visible light beam and the tunable IR beam, from the scanned surface and to filter the emitted light beam to generate a filtered light beam, wherein the emitted light beam is emitted from the scanned surface responsive to both the visible light beam and the tunable IR beam being incident on the scanned surface; a light detection system configured to receive the filtered light beam from the light filter; and an alignment structure configured to operatively align at least two of: (i) the visible light source; (ii) the tunable IR source; (iii) the sample holder; (iv) the light detection system; and (v) the light filter. 2. The system of claim 1 , wherein the visible light beam has an at least substantially fixed spectrum. 3. The system of claim 1 , wherein the visible light source includes at least one of: (i) a pulsed laser system; (ii) a solid state laser; and (iii) a neodymium YAG laser, wherein the neodymium YAG laser is frequency doubled. 4. The system of claim 1 , wherein the visible light beam has an average wavelength of at least 0.3 micrometers and at most 0.8 micrometers. 5. The system of claim 1 , wherein the visible light source includes a visible light source control assembly configured to selectively vary at least one of: (i) an intensity of the visible light beam; (ii) a polarization of the visible light beam; (iii) a wavelength of the visible light beam; and (iv) a bandwidth of the visible light beam. 6. The system of any claim 1 , wherein the tunable IR source has a selectively variable output spectrum. 7. The system of claim 1 , wherein the tunable IR source includes at least one of: (i) an optical parametric oscillator; and a lithium niobate (LiNbO 3 ) crystal laser. 8. The system of claim 1 , wherein the tunable IR source includes a tunable IR source control assembly configured to selectively vary at least one of: (i) an intensity of the tunable IR beam; (ii) a polarization of the tunable IR beam; (iii) a wavelength of the tunable IR beam; and (iv) a bandwidth of the tunable IR beam. 9. The system of claim 1 , wherein the light detection system includes an optical detector, wherein the optical detector includes at least one of: (i) a photomultiplier; (ii) a photodiode; (iii) an avalanche photodiode; and (iv) a focal plane array. 10. The system of claim 1 , wherein the light detection system is configured to detect at least one of: (i) an intensity of the filtered light beam; (ii) a wavelength of the filtered light beam; and (iii) a spectrum of the filtered light beam. 11. The system of claim 1 , wherein the light filter is configured to selectively regulate a portion of the emitted light beam that is received by the light detection system as the filtered light beam. 12. The system of claim 1 , wherein the alignment structure is configured to operatively align such that: (i) the visible light beam and the tunable IR beam are coincident upon the sampled location; (ii) the light filter receives the emitted light beam from the scanned surface; and (iii) the light detection system receives the filtered light beam from the light filter. 13. The system of claim 1 , wherein the system further includes a controller programmed to control the operation of at least a portion of the system.
Brillouin effect, e.g. stimulated Brillouin effect · CPC title
Raman scattering · CPC title
Plural sources · CPC title
Purely optical scan · CPC title
for measurement in the infrared range · CPC title
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