Low vapor pressure aerosol-assisted CVD

Patent metadata

Field	Value
Publication number	US-10273577-B2
Application number	US-201615286234-A
Country	US
Kind code	B2
Filing date	Oct 5, 2016
Priority date	Nov 16, 2015
Publication date	Apr 30, 2019
Grant date	Apr 30, 2019

Abstract

Systems and methods for processing films on the surface of a substrate are described. The systems possess aerosol generators which form droplets from a condensed matter (liquid or solid) of one or more precursors. A carrier gas is flowed through the condensed matter and push the droplets toward a substrate placed in a substrate processing region. An inline pump connected with the aerosol generator can also be used to push the droplets towards the substrate. A direct current (DC) electric field is applied between two conducting plates configured to pass the droplets in-between. The size of the droplets is desirably reduced by application of the DC electric field. After passing through the DC electric field, the droplets pass into the substrate processing region and chemically react with the substrate to deposit or etch films.

First claim

We claim:

1. A method of forming a layer on a substrate, the method comprising:
placing the substrate into a substrate processing region of a substrate processing chamber;
placing a liquid precursor into an aerosol generator;
flowing a carrier gas into the aerosol generator to produce aerosol droplets;
applying an electric field to the aerosol droplets, wherein the electric field has a magnitude between 500 V/cm and 20,000 V/cm;
flowing the aerosol droplets into the substrate processing region; and
forming the layer on the substrate from the aerosol droplets wherein the layer is a self-assembled monolayer (SAM), the self-assembled monolayer is selectively formed on exposed copper portions of the substrate but not on exposed dielectric portions of the substrate and the method further comprises forming a selectively deposited dielectric on the exposed dielectric portions but not on the exposed copper portions which are blocked by the self-assembled monolayer.

2. The method of claim 1 , wherein the electric field is a DC electric field having an electric field which points towards the substrate.

3. The method of claim 1 , wherein a deposition rate of the self-assembled monolayer is over one hundred times greater on the exposed copper portions of the substrate compared to a deposition rate over the exposed dielectric portions.

4. The method of claim 1 , wherein the substrate is a patterned substrate having a trench.

5. The method of claim 4 , wherein a width of the trench is less than 30 nm.

6. The method of claim 1 , further comprising selectively depositing a film on the exposed dielectric portions of the substrate after forming the self-assembled monolayer on the exposed copper portions.

7. The method of claim 6 , wherein a deposition rate of the film is over one hundred times greater on the exposed dielectric portions of the substrate compared to over the self-assembled monolayer on the exposed copper portions.

8. The method of claim 1 , wherein the liquid precursor comprises a phosphonic acid.

9. The method of claim 8 , wherein the phosphonic acid has a head moiety having chemical formula PO(OH) 2 .

10. The method of claim 8 , wherein the phosphonic acid has a tail moiety comprising a perfluorinated alkyl group having more than 5 carbon atoms.

11. The method of claim 8 , wherein the phosphonic acid has a tail moiety comprising an alkyl group having more than 12 carbon atoms.

12. The method of claim 8 , wherein the phosphonic acid has a tail moiety comprising a linear or aromatic hydrocarbon.

13. The method of claim 8 , wherein the phosphonic acid has a head moiety comprising sulfur.

14. The method of claim 8 , wherein the phosphonic acid has a head moiety comprising a thiol group.

15. The method of claim 8 , wherein the phosphonic acid includes one or more of octylphosphonic acid (CH 3 (CH 2 ) 6 CH 2 —P(O)(OH) 2 ), perfluorooctylphosphonic acid (CF 3 (CF 2 ) 5 CH 2 —CH 2 —P(O)(OH) 2 ), octadecylphosphonic acid (CH 3 (CH 2 ) 16 CH 2 —P(O)(OH) 2 ), decyl phosphonic acid, mesityl phosphonic acid, cyclohexyl phosphonic acid, hexyl phosphonic acid or butyl phosphonic acid.

Assignees

• Applied Materials Inc

Inventors

• Arnepalli Ranga Rao
• Bagul Nilesh Chimanrao
• Goradia Prerna Sonthalia
• Visser Robert Jan

Classifications

• H10P14/6336

  in the presence of a plasma [PECVD] · CPC title

• H10P95/70

  Chemical treatments · CPC title

• H10P52/00

  Grinding, lapping or polishing of wafers, substrates or parts of devices · CPC title

• H10P50/283

  by chemical means · CPC title

• H10P50/246

  of Group III-V materials · CPC title