Method for continuous production of high quality graphene

Patent metadata

Field	Value
Publication number	US-10273574-B2
Application number	US-201715457763-A
Country	US
Kind code	B2
Filing date	Mar 13, 2017
Priority date	Mar 18, 2016
Publication date	Apr 30, 2019
Grant date	Apr 30, 2019

Abstract

A continuous method for manufacturing graphene films using a metal substrate, wherein a first surface of the metal substrate is heated such that a top layer of the first surface melts to form a molten metal layer, and devices for carrying out the same.

First claim

What is claimed is:

1. A continuous method for preparing a film comprising graphene, comprising:
providing a metal substrate;
continuously advancing the metal substrate into and through a processing chamber comprising one or more heating elements and one or more gas supply components, the one or more heating elements comprising at least a first heating element;
heating the metal substrate with the first heating element to form a molten metal layer on a top surface of the metal substrate, wherein the first heating element provides heat to the metal substrate corresponding to a metal substrate temperature that is equal to or above the melting point of the metal substrate;
contacting the molten metal layer with a carbon source gas to form a graphene-comprising layer substantially covering the molten metal layer of the top surface of the metal substrate;
solidifying the molten metal layer;
advancing the metal substrate having the graphene-comprising layer out of the processing chamber; and
separating the graphene-comprising layer to form a film comprising graphene.

2. The method of claim 1 , wherein the metal substrate comprises a metal foil or a metal film.

3. The method of claim 1 , wherein the processing chamber comprises:
a preheating zone comprising the one or more heating elements,
a processing zone comprising the one or more gas supply components, and
a cooling zone,
wherein the molten metal layer is formed as the metal substrate advances through the preheating zone, the molten metal layer is contacted with the carbon source gas in the processing zone, and the molten metal layer is solidified in the cooling zone.

4. The method of claim 1 , wherein the metal substrate is advanced from an unwinding roll into the processing chamber.

5. The method of claim 1 , wherein the metal substrate having the graphene-comprising layer is wound onto a winding roll after it has been advanced out of the processing chamber.

6. The method of claim 1 , wherein the one or more heating elements comprises at least two heating elements and the one or more gas supply components comprises at least two gas supply components.

7. The method of claim 6 , wherein the one or more heating elements comprises the first heating element which heats the top surface of the metal substrate and a second heating element which heats a bottom surface of the metal substrate.

8. The method of claim 1 , wherein the metal substrate comprises copper.

9. The method of claim 1 , wherein carbon source gas comprises methane, ethylene, acetylene, ethanol, benzene, methanol, carbon-based polymer, nano-carbon material, or a mixture thereof.

10. The method of claim 2 , wherein the metal substrate comprises metal foil.

11. The method of claim 10 , wherein the metal foil has a thickness of between about 20 and 30 μm.

12. The method of claim 11 , wherein the molten metal layer has a thickness of between about 200 and 800 nm.

13. The method of claim 1 , wherein the molten metal layer has a thickness such that the solutal Marangoni number (M a s ) is lower than the critical number (M C =80).

14. The method of claim 2 , wherein the metal substrate comprises metal film.

15. The method of claim 14 , wherein the metal film is deposited on a second substrate.

16. The method of claim 7 , wherein the first heating element heats the top surface of the metal substrate to no more than about 50° C. different than the melting point of the top surface of the metal substrate.

17. The method of claim 7 , wherein the first heating element and/or the second heating element comprises a IR heater.

18. The method of claim 7 , wherein the first heating element heats the top surface of the metal substrate to a temperature of about 1050° C.±30° C.

19. The method of claim 7 , wherein the second heating element heats the bottom surface of the metal substrate to a temperature that is below the melting point of the bottom surface of the metal substrate.

20. The method of claim 19 , wherein the second heating element heats the bottom surface of the metal substrate to a temperature that is below about 1050° C.

21. A continuous method for preparing a film comprising graphene, the continuous method comprising:
providing a metal substrate;
continuously advancing the metal substrate into and through a processing chamber having a preheating zone comprising one or more heating elements, a processing zone comprising one or more gas supply components, and a cooling zone;
heating the metal substrate with the one or more heating elements of the preheating zone to form a molten metal layer on a top surface of the metal substrate, wherein the one or more heating elements of the preheating zone provides heat to the metal substrate, and wherein the metal substrate is heated to a temperature that is equal to or above the melting point of the metal substrate;
contacting the molten metal layer with a carbon source gas in the processing zone to form a graphene-comprising layer substantially covering the molten metal layer of the top surface of the metal substrate;
solidifying the molten metal layer in the cooling zone;
advancing the metal substrate having the graphene-comprising layer out of the processing chamber; and
separating the graphene-comprising layer to form a film comprising graphene.

Assignees

• Honda Motor Co Ltd

Inventors

• Harutyunyan Avetik

Classifications

• C01B32/186

  by chemical vapour deposition [CVD] · CPC title

• C23C16/26

  Deposition of carbon only · CPC title

• Y10S977/843

  Gas phase catalytic growth, i.e. chemical vapor deposition · CPC title

• C23C16/545

  for coating elongated substrates · CPC title

• C23C16/003

  Coating on a liquid substrate · CPC title