Angled DBR-grating laser/amplifier with one or more mode-hopping regions

Patent metadata

Field	Value
Publication number	US-10270224-B2
Application number	US-201615579109-A
Country	US
Kind code	B2
Filing date	Jun 6, 2016
Priority date	Jun 4, 2015
Publication date	Apr 23, 2019
Grant date	Apr 23, 2019

Abstract

A semiconductor laser device is disclosed that includes a laser resonator situated to produce a laser beam, with the laser resonator including an angled distributed Bragg reflector (a-DBR) region including first and second ends defining an a-DBR region length corresponding to a Bragg resonance condition with the first end being uncleaved and including a first mode hop region having a first end optically coupled to the a-DBR region first end and extending a first mode hop region length associated with the a-DBR region length to a second end so as to provide a variable longitudinal mode selection for the laser beam.

First claim

I claim:

1. A semiconductor laser device, comprising:
a laser resonator situated to produce a laser beam, the laser resonator including:
an angled distributed Bragg reflector (a-DBR) region including first and second ends defining an a-DBR region length corresponding to a Bragg resonance condition with the first end being uncleaved; and
a first mode hop region configured to allow mode hopping, the first mode hop region having a first end optically coupled to the a-DBR region first end and extending a first mode hop region length associated with the a-DBR region length to a second end so as to provide a variable longitudinal mode selection for the laser beam;

wherein first mode hop region second end defines a cleaved facet.

2. The semiconductor laser device of claim 1 , wherein the first mode hop region length is at least λ 2 /(4·n g ·Δλ) and not greater than ⅖·L GRT , where λ is the center wavelength of the laser beam, n g is the group index of refraction of a propagating mode or modes of the laser beam, Δλ is an allowed shift in the center wavelength λ, and L GRT is the a-DBR region length.

3. The semiconductor laser device of claim 1 , wherein the first mode hop region second end is a partially reflector or a high reflector.

4. The semiconductor laser device of claim 3 , wherein the first mode hop region is optically pumped to provide gain for the laser beam.

5. The semiconductor laser device of claim 4 , wherein the first mode hop region and the a-DBR region are optically pumped and the first mode hop region is optically pumped separately.

6. The semiconductor laser device of claim 1 , further comprising a second mode hop region having first and second ends, the second mode hop region first end optically coupled to the a-DBR region second end and extending to the second mode hop region second end;
wherein the a-DBR region second end is uncleaved.

7. The semiconductor laser device of claim 6 , wherein the first and second mode hop regions include respective optical axes associated with propagation of the laser beam that are parallel.

8. The semiconductor laser device of claim 6 , wherein the first mode hop region second end defines a cleaved high reflector of the laser resonator and the second mode hop region second end defines a cleaved partial reflector output of the laser resonator.

9. The semiconductor laser device of claim 6 , further comprising:
a semiconductor amplifier region extending between semiconductor amplifier region first and second ends, with the semiconductor amplifier first end optically coupled to the a-DBR region second end and with the semiconductor amplifier region second end defining a cleaved anti-reflection coated facet situated to amplify and emit laser beam;
wherein the first mode hop region second end defines a high reflector of the laser resonator.

10. The semiconductor laser device of claim 9 , wherein the a-DBR region second end defines a partial reflector output of the laser resonator.

11. The semiconductor laser device of claim 1 , wherein the first mode hop region longitudinal mode selection is within a gain bandwidth of the laser resonator and a grating bandwidth of the angled distributed Bragg reflector.

12. The semiconductor laser device of claim 1 , wherein the predetermined positional accuracy of the a-DBR region first and second ends is +/−0.1 μm or less.

13. The semiconductor laser device of claim 1 , wherein the a-DBR region includes first and second portions having respective first and second ends and situated in a v-shaped arrangement such that the first ends of the first and second portions overlap to form the a-DBR region first end.

14. The semiconductor laser device of claim 13 , further comprising a second mode hop region and a third mode hop region having respective first and second ends, with the second mode hop region first end optically coupled to the a-DBR region first portion second end and the third mode hop region first end optically coupled to the a-DBR region second portion second end, and the second ends of the second and third mode hop regions defining a high reflector of the laser resonator.

15. The semiconductor laser device of claim 13 , further comprising first and second amplifier regions having respective first and second ends, the first amplifier region first end optically coupled to the a-DBR region first portion second end and the second amplifier region first end optically coupled to the a-DBR region second portion second end, and the second ends of the first and second amplifier regions defining a high reflector.

16. The semiconductor laser device of claim 13 , wherein the a-DBR first portion has a first grating pitch and extends at first angle with respect to the first mode hop region and the a-DBR second portion has a second grating pitch different from the first grating pitch and extends at a second angle with respect to the first mode hop region that is different from the first angle.

17. The semiconductor laser device of claim 1 , further comprising:
an amplifier region having first and second ends with the amplifier region first end optically coupled to the a-DBR region second end;
wherein the a-DBR region includes first and second portions having respective first and second ends and situated in a v-shaped arrangement such that the first ends of the first and second portions overlap to form the a-DBR region second end.

18. The semiconductor laser device of claim 1 , further comprising:
a semiconductor gain region having a first end optically coupled to the a-DBR region second end and extending to a semiconductor gain region second end;
wherein the a-DBR forms an angle θ with an optical axis of the first mode hop region and an optical axis of the semiconductor gain region forms an angle 2·θ with the first mode hop region optical axis.

19. The semiconductor laser device of claim 1 , wherein the a-DBR region first and second ends have end surfaces that are parallel.

20. A semiconductor laser, comprising:
a high reflector and partial reflector defining a laser resonator;
an intracavity mode filter including an a-DBR extending between opposite ends of the intracavity mode filter at an oblique angle, the intracavity mode filter lithographically spaced apart from the high reflector and partial reflector so as to provide a positional accuracy for opposite ends of the intracavity mode filter; and
a longitudinal mode hop region configured to allow mode hopping, the longitudinal mode hop region extending from at least one of the opposite ends of the intracavity mode filter.

21. A method of forming a semiconductor laser, comprising:
forming an a-DBR region of a monolithic laser resonator having first and second opposite ends arranged at an angle with respect to a-DBR grating portions extending between the opposite ends so that at least the first opposite end is lithographically defined; and
forming a mode hop region optically coupled to the a-DBR first opposite end, including cleaving the mode hop region to a mode hop region length from the a-DBR first opposite end that is configured to allow mode hopping so that a resonance associated with the a-DBR is provided with a variable longitudinal mode selection.

22. The method of claim 21 , further comprising:
forming a mode hop region optically coupled to the a-DBR second opposite end.

23. The method of claim 21 , further comprising:
forming an amplifier or oscillator gain region optically coupled to the a-DBR second opposite

Assignees

• Nlight Inc

Inventors

• Kanskar Manoj

Classifications

• H01S5/125 Primary

  Distributed Bragg reflector [DBR] lasers · CPC title

• H01S5/1003

  Waveguide having a modified shape along the axis, e.g. branched, curved, tapered, voids · CPC title

• H01S5/1085

  Oblique facets · CPC title

• H01S5/1064

  varying width along the optical axis · CPC title

• H01S2301/163

  Single longitudinal mode · CPC title