Two-link arm trajectory

Patent metadata

Field	Value
Publication number	US-10269606-B2
Application number	US-201514703216-A
Country	US
Kind code	B2
Filing date	May 4, 2015
Priority date	May 5, 2014
Publication date	Apr 23, 2019
Grant date	Apr 23, 2019

Abstract

Providing a first movement including rotating a first arm about a rotational axis of a robot drive; rotating a second arm on the first arm, where the first and second arms form a robot arm, where the first and second arms are the only arms of the robot arm, where the robot arm has an end effector rotationally fixed to the second arm, and where the end effector is configured to support a substrate thereon for transporting the substrate by the robot arm; and controlling the rotating to provide a path of the end effector such that the end effector does not contact the substrate during the rotating. Providing a second movement including rotating the arms to provide an at least partially straight linear path of a center of the substrate relative to the rotational axis of the drive robot when the substrate is on the end effector.

First claim

What is claimed is:

1. A method comprising:
providing a first movement comprising:
rotating a first arm about a rotational axis of a robot drive;
rotating a second arm about a rotational axis of a joint between the first arm and the second arm, where the first and second arms form a robot arm, where the first and second arms comprise the only arms of the robot arm, where the rotational axis of the robot drive and the rotational axis of the joint are the only rotational axes of the robot arm, where the robot arm comprises an end effector fixed to the second arm, wherein the end effector is fixed with respect to the second arm such that the end effector is rotationally stationary relative to the second arm, where the end effector is configured to support a substrate thereon for transporting the substrate by the robot arm, and where the robot arm is configured such that a center point of the substrate is spaced from a central axis of the second arm when the substrate is supported by the end effector; and
controlling the rotating of the first and second arms to provide a path of the end effector such that, before a pickup of the substrate by the robot arm or after placing of the substrate by the robot arm, the end effector does not contact the substrate during the rotating; and

providing a second movement comprising the arms of the robot arm rotating to provide an at least partially straight linear path of a center of the substrate relative to the rotational axis of the drive robot when the substrate is on the end effector.

2. A method as in claim 1 where the first and second movements occur with the end effector in a single plane.

3. A method as in claim 1 where the second movement comprises an at least partially non-straight path.

4. A method as in claim 1 where, during the second movement, the end effector comprises an inner ledge with a top surface to support a bottom surface of the substrate thereon, and a rim adjacent a side edge of the substrate.

5. A method as in claim 4 where the first movement comprises the rim not contacting the side edge of the substrate.

6. A method as in claim 1 where the path in the first movement comprises a first arced path of the end effector and a second arced path of the end effector, where the first and second arced paths are in opposite directions.

7. A method as in claim 1 where controlling the rotating of the first and second arms comprises a controller controlling rotation of drive shafts of the robot drive.

Assignees

• Persimmon Technologies Corp
• Persimmon Tech Corporation

Inventors

• Hosek Martin

Classifications

• H10P72/7602

  the wafers being placed on a robot blade or gripped by a gripper for conveyance · CPC title

• H10P72/3302

  Mechanical parts of transfer devices · CPC title

• H10P72/3202

  Mechanical details, e.g. rollers or belts · CPC title

• H10P72/3402 Primary

  Mechanical parts of transfer devices · CPC title

• B25J9/042

  comprising an articulated arm · CPC title