Seal for wafer processing assembly

Patent metadata

Field	Value
Publication number	US-10269595-B2
Application number	US-201615290237-A
Country	US
Kind code	B2
Filing date	Oct 11, 2016
Priority date	Oct 11, 2016
Publication date	Apr 23, 2019
Grant date	Apr 23, 2019

Abstract

A seal having a cross-sectional profile that includes a first lobe, a second lobe, and a corner having an angle between 45 and 90 degrees, inclusive, a first side extending from the first lobe to the corner and a second side extending from the second lobe to the corner, where the first side and the second side define the corner angle. The seal can be seated in a groove so that the first lobe and the corner are in the groove and the second lobe extends from the groove. In use, the second lobe folds into the groove to form a fluid-tight seal.

First claim

What is claimed is:

1. An assembly comprising a seal seated in a groove defined by an inner wall, an outer wall and a bottom wall, the seal having a cross-sectional profile comprising:
a first outer surface and a first inner surface defining a first lobe, a second outer surface and a second inner surface defining a second lobe, and a corner, the first outer surface extending from the first lobe to the corner, and the second outer surface extending from the second lobe to the corner, the first outer surface and the first inner surface being nonparallel and the second outer surface and the second inner surface being nonparallel;
the first lobe defining an outer-most surface of the seal;
the corner defining an inner-most surface of the seal;
the seal seated with the first lobe proximate the outer wall, the first outer surface proximate the bottom wall and the corner, and the second outer surface proximate the inner wall,
such that when the seal is compressed into the groove, the seal fills at least 80% of the groove.

2. The assembly of claim 1 , wherein the corner has an angle defined by the first outer surface and the second outer surface, the angle being between 45 and 90 degrees, inclusive.

3. The assembly of claim 2 , wherein the corner angle is between 45 and 75 degrees, inclusive.

4. The assembly of claim 1 , wherein the seal has a line of symmetry extending from the corner and between the first lobe and the second lobe.

5. The assembly of claim 1 , wherein the second lobe extends out from the groove when the seal is not compressed into the groove.

6. The assembly of claim 5 , wherein the second lobe extends out from the groove at least 0.016 inch.

7. The assembly of claim 1 , wherein the second outer surface is against the inner wall of the groove for an entire length of the inner wall.

8. The assembly of claim 1 , wherein the second outer surface is against the inner wall proximate the corner.

9. The assembly of claim 1 , wherein the seal comprises an elastomer.

10. The assembly of claim 9 , wherein the seal comprises a fluoroelastomer.

11. The assembly of claim 1 , wherein the first outer surface and the first inner surface form an angle of 23 to 29 degrees and the second outer surface and the second inner surface form an angle of 23 to 29 degrees.

12. A seal having a cross-sectional profile comprising a first lobe having an angle between 23 and 29 degrees, inclusive, defined by a first outer surface and a first inner surface, a second lobe having an angle between 23 and 29 degrees, inclusive, defined by a second outer surface and a second inner surface, and a corner having an angle between 45 and 90 degrees, inclusive, the first outer surface and the second outer surface defining the corner angle.

13. The seal of claim 12 , wherein the corner angle is between 45 and 75 degrees, inclusive.

14. The seal of claim 13 having a line of symmetry extending from the corner and between the first lobe and the second lobe.

15. The seal of claim 12 comprising an elastomer.

16. The seal of claim 15 comprising a fluoroelastomer.

Assignees

• Veeco Instr Inc

Inventors

• Kunsch Ian
• Snowden Brett Stuart
• Williams Gregory
• Gant David
• Frazier Aaron

Classifications

• H10P72/0462

  characterised by the construction of the processing chambers, e.g. modular processing chambers · CPC title

• H10P72/0441 Primary

  Apparatus for sealing, encapsulating, glassing, decapsulating or the like · CPC title

• F16J15/025

  and with at least one flexible lip · CPC title

• C23C16/44

  characterised by the method of coating (C23C16/04 takes precedence) · CPC title

• F16J15/022

  characterised by structure or material · CPC title