Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus

Patent metadata

Field	Value
Publication number	US-10268091-B2
Application number	US-201815863219-A
Country	US
Kind code	B2
Filing date	Jan 5, 2018
Priority date	Jan 16, 2017
Publication date	Apr 23, 2019
Grant date	Apr 23, 2019

Abstract

A liquid crystal device as an electro-optical device includes a first insulating layer as a first layer with an insulating property stacked on a base member as a substrate, a trench provided in the first insulating layer for each pixel, a second insulating layer as a second layer stacked on the first insulating layer and having an aperture communicating with the trench, and a retention capacitor as a capacitance element including a first capacitance electrode, a first capacitance insulating film, and a second capacitance electrode which are provided on at least an inner side the trench and the aperture. A layer thickness of the first insulating layer is larger than a layer thickness of the second insulating layer, and a width of the trench is larger than a width of the aperture in the X direction as a first direction.

First claim

What is claimed is:

1. An electro-optical device comprising:
a substrate;
a first layer with an insulating property that is stacked on the substrate;
a trench that is provided in the first layer for each pixel;
a second layer which is stacked on the first layer and is disposed on a top surface of the first layer, the second layer connecting with the trench and having an aperture; and
a capacitance element that includes a first capacitance electrode, a first capacitance insulating film, and a second capacitance electrode which are provided on at least an inner side of the trench and the aperture,
wherein a width of the trench is larger than a width of the aperture in direction parallel to the substrate; and
a portion of the second capacitance electrode is formed on an outer side of the second layer, the outer side of the second layer being a side that opposes an inside of the second layer in a direction parallel to the substrate.

2. The electro-optical device according to claim 1 , wherein a conductive layer in contact with the first capacitance electrode is provided between the substrate and the first layer.

3. The electro-optical device according to claim 1 , wherein the capacitance element includes the first capacitance electrode, the first capacitance insulating film, the second capacitance electrode, the second capacitance insulating film, and a third capacitance electrode which are provided on at least an inner side of the trench and the aperture.

4. The electro-optical device according to claim 3 , wherein at least one of the first capacitance insulating film and the second capacitance insulating film is a high dielectric constant film.

5. The electro-optical device according to claim 1 ,
wherein a transistor that is provided for each pixel is provided between the substrate and the capacitance element, and
wherein the trench overlaps a semiconductor layer of the transistor in a planar view.

6. An electronic apparatus comprising:
the electro-optical device according to claim 1 .

7. An electronic apparatus comprising:
the electro-optical device according to claim 2 .

8. An electronic apparatus comprising:
the electro-optical device according to claim 3 .

9. An electronic apparatus comprising:
the electro-optical device according to claim 4 .

10. An electronic apparatus comprising:
the electro-optical device according to claim 5 .

Assignees

• Seiko Epson Corp

Inventors

• Sugimoto Yohei

Classifications

• H01L29/78675

  Electricity · mapped topic

• G02F1/133512

  Light shielding layers, e.g. black matrix (G02F1/136209 takes precedence) · CPC title

• G02F1/13439

  characterised by their electrical, optical, physical properties; materials therefor; method of making · CPC title

• G02F1/1368

  in which the switching element is a three-electrode device {(G02F1/136277 takes precedence)} · CPC title

• G02F1/1339

  Gaskets; Spacers; Sealing of cells · CPC title