System And Method For Reducing The Bandwidth Of A Laser And An Inspection System and Method Using A Laser
US-2015268176-A1 · Sep 24, 2015 · US
US10268046B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10268046-B2 |
| Application number | US-201615357356-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 21, 2016 |
| Priority date | May 28, 2014 |
| Publication date | Apr 23, 2019 |
| Grant date | Apr 23, 2019 |
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Cube polarizers can be designed for substantially equal optical path lengths of a reflected beam and a transmitted beam. For example, d 11 of FIG. 1 can define a distance between a plane (face plane 2 ) of the outer face (outer face 2 ) of a second prism 16 and the first edge (first edge 1 ) of the first prism, and d 11 can be less than 400 micrometers. As another example, an optical path length differential between a transmitted beam and a reflected beam (|OPL T −OPL R |) can be < 0.5 * t * n p 2 ; where t is a thickness of the substrate between the first surface and the second surface of the substrate and n p is an index of refraction of the first prism.
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What is claimed is: 1. A cube polarizer comprising: a) a first prism including two triangular faces linked by an inner face, an outer face, and an outer side; b) a second prism including two triangular faces linked by an inner face, an outer face, and an outer side; c) a wire grid polarizer including an array of parallel, elongated, separated wires sandwiched between a first substrate and a second substrate, a thickness of the first substrate and a thickness of the second substrate are both greater than 0.4 millimeters; and d) the wire grid polarizer, the first substrate, and the second substrate being sandwiched between the inner faces of the prisms. 2. The cube polarizer of claim 1 , wherein a thickness of the first substrate and a thickness of the second substrate are both greater than 0.5 millimeters. 3. The cube polarizer of claim 1 , wherein a thickness of the first substrate and a thickness of the second substrate are between 0.4 and 1.4 millimeters. 4. The cube polarizer of claim 1 , wherein a thickness of the first substrate equals a thickness of the second substrate. 5. The cube polarizer of claim 1 , further comprising a first thin film disposed above the wires, and wherein a thickness of the first substrate equals a combined thickness of the second substrate and the first thin film. 6. The cube polarizer of claim 1 , wherein a size of the two triangular faces of the first prism equals a size of the two triangular faces of the second prism. 7. The cube polarizer of claim 6 , wherein the first prism is made of the same material as the second prism. 8. The cube polarizer of claim 1 , wherein: a) a junction of the inner face of the first prism and the outer side of the first prism defines a first edge of the first prism; b) a junction of the inner face of the second prism and the outer face of the second prism defines a third edge of the second prism; c) a plane of the outer face of the second prism crosses perpendicularly a plane of the outer side of the first prism at a first junction; d) a distance between the first edge of the first prism and the first junction equals a distance between the third edge of the second prism and the first junction. 9. The cube polarizer of claim 8 , wherein a) a junction of the inner face of the first prism and the outer face of the first prism defines a third edge of the first prism; b) a junction of the inner face of the second prism and the outer side of the second prism defines a first edge of the second prism; c) a plane of the outer side of the second prism crosses perpendicularly a plane of the outer face of the first prism at a second junction; d) a distance between the first edge of the second prism and the second junction equals a distance between the third edge of the first prism and the second junction. 10. The cube polarizer of claim 1 , wherein: a) an unpolarized beam of light, having a wavelength λ, entering the cube polarizer through the outer face of the first prism, is polarized at the wire grid polarizer, forming: i) a reflected beam of light reflecting off of the wire grid polarizer and exiting through the outer side of the first prism; and ii) a transmitted beam of light transmitting through the wire grid polarizer and exiting through the outer face of the second prism, and b) |OPL T −OPL R |<100*λ, where OPL T is an optical path length of the transmitted beam T, OPL R is an optical path length of the reflected beam R, and optical path length is a distance of light travel through a material times an index of refraction of the material. 11. The cube polarizer of claim 10 , wherein |OPL T −OPL R |<10*λ. 12. The cube polarizer of claim 10 , wherein |OPL T −OPL R |<500 micrometers. 13. The cube polarizer of claim 10 , wherein |OPL T −OPL R |<10 micrometers. 14. The cube polarizer of claim 10 , wherein |OPL T −OPL R |<1 micrometer. 15. The cube polarizer of claim 1 , wherein: a) an unpolarized beam of light entering the cube polarizer through the outer face of the first prism, is polarized at the wire grid polarizer, forming: i) a reflected beam of light reflecting off of the wire grid polarizer and exiting through the outer side of the first prism; and ii) a transmitted beam of light transmitting through the wire grid polarizer and exiting through the outer face of the second prism, and b) |OPL T −OPL R |<500 micrometers, where OPL T is an optical path length of the transmitted beam T, OPL R is an optical path length of the reflected beam R, and optical path length is a distance of light travel through a material times an index of refraction of the material. 16. A cube polarizer comprising: a) a first prism including two triangular faces linked by an inner face, an outer face, and an outer side; b) a second prism including two triangular faces linked by an inner face, an outer face, and an outer side; c) a wire grid polarizer including an array of parallel, elongated, separated wires sandwiched between a first substrate and a second substrate; d) the wire grid polarizer, the first substrate, and the second substrate being sandwiched between the inner faces of the prisms; e) a thickness of the first substrate equals a thickness of the second substrate and both are greater than 0.4 millimeters; and f) the first prism is made of a same material as the second prism. 17. A cube polarizer designed for polarization of light including a wavelength A, the cube polarizer comprising: a) a first prism including two triangular faces linked by an inner face, an outer face, and an outer side; b) a second prism including two triangular faces linked by an inner face, an outer face, and an outer side; c) a wire grid polarizer including: i) a substrate having a first surface and an opposite second surface substantially parallel to the first surface; ii) a material, disposed over the first surface, including an array of parallel, elongated, separated wires; and iii) a thin film disposed over the second surface; d) the wire grid polarizer sandwiched between the inner faces of the prisms; e) a distance of light travel through a material times an index of refraction of the material defining an optical path length; f) light beams entering through the outer face of the first prism, reflecting off of portions of the wire grid polarizer within the cube polarizer, then exiting through the outer side of the first prism include: i) a light beam having a shortest optical path length (OPL S ); and ii) a light beam having a longest optical path length (OPL L ); g) a difference between the longest optical path length (OPL L ) and the shortest optical path length (OPL S ) defines a peak to valley (PTV); and h) the thin film disposed over the second surface includes a material and a thickness to reduce a curvature of the wire grid polarizer such that the peak to valley (PTV) is less than half the wavelength λ. 18. The cube polarizer of claim 17 , wherein the peak to valley PTV is less than 350 nanometers. 19. The cube polarizer of claim 17 , wherein the thin film disposed over the second surface includes a same material as the material disposed over the first surface of the substrate of the wire grid polarizer. 20. The cube polarizer of claim 17 , wherein: a) the thin film disposed over the second surface comprises silicon dioxide and has a thickness of between 80 and 300 nanometers; b) the material disposed over the first surface further comprises a first thin film comprising silicon dioxide, filling gaps between the wires, and
Physics · mapped topic
used for beam splitting or combining · CPC title
Prisms · CPC title
comprising electrically conductive elements, e.g. wire grids, conductive particles · CPC title
Wire-grid polarisers · CPC title
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