Methods for producing an etch resist pattern on a metallic surface
US-2024035167-A1 · Feb 1, 2024 · US
US10266949B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10266949-B2 |
| Application number | US-24963008-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 10, 2008 |
| Priority date | Oct 15, 2007 |
| Publication date | Apr 23, 2019 |
| Grant date | Apr 23, 2019 |
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A method of controlling macroscopic strain of a porous structure includes contacting a porous structure with a modifying agent which chemically adsorbs to a surface of the porous structure and modifies an existing surface stress of the porous structure. A device in one embodiment includes a porous metal structure, which when contacted with a modifying agent which chemically adsorbs to a surface of the porous metal structure, exhibits a volumetric change due to modification of an existing surface stress of the porous metal structure; and a mechanism for detecting the volumetric change. Additional methods and systems are also presented.
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What is claimed is: 1. A device, comprising: a porous structure, which when contacted with a modifying agent which chemically adsorbs to a surface of the porous structure, exhibits a volumetric change due to modification of an existing surface stress of the porous structure; and a mechanism for detecting the volumetric change, wherein the porous structure has a ratio of surface atoms to bulk atoms of at least about 1×10 −3 ; wherein the porous structure comprises: a nonmetal; and a metal selected from elemental platinum and a platinum alloy and; wherein the modifying agent is a gas selected from a group consisting of ozone, a hydrocarbon, fluorine, sulfur, chlorine, and bromine; wherein a median pore size of the porous structure is less than about 100 nm; and wherein, with respect to at least the modifying agent, the porous structure exhibits a detection limit of about 10 −12 mol. 2. The device of claim 1 , wherein surfaces of the porous structure are doped with Ag. 3. The device of claim 1 , wherein the nonmetal comprises carbon formed on surfaces of the elemental platinum or the platinum alloy. 4. The device of claim 3 , wherein the carbon is present in the form of a carbon aerogel. 5. The device of claim 1 , wherein the porous structure further comprises at least one additional metal selected from Ni, Cu, Ru, Rh, Pd, Ag, Ir, and Au. 6. The device of claim 1 , wherein a median pore size of the porous structure is about 60 nm. 7. The device of claim 1 , wherein surfaces of the porous structure are doped with Ag; wherein the nonmetal comprises carbon formed on surfaces of the elemental platinum or the platinum alloy; wherein the carbon is present in the form of a carbon aerogel; wherein the porous structure further comprises at least one additional metal selected from Ni, Cu, Ru, Rh, Pd, Ag, Ir, and Au; and wherein a median pore size of the porous structure is about 60 nm. 8. A device, comprising: a porous structure comprising carbon and at least one metal selected from Ni, Cu, Ru, Rh, Pd, Ag, Ir, and Au, which when contacted with a modifying agent which chemically adsorbs to a surface of the porous structure, exhibits a volumetric change due to modification of an existing surface stress of the porous structure, wherein the modification of the existing surface stress is controlled by surface chemistry induced changes in the surface of the porous structure without an externally applied potential, wherein the volumetric change is characterized by a change in a lengthwise dimension of between about 1.0 micron and about 2.0 microns; and a mechanism for detecting the volumetric change, wherein the porous structure has a ratio of surface atoms to bulk atoms of at least about 1×10 −3 ; wherein the porous structure has a detection limit with respect to the modifying agent of about 10 −12 mol; wherein the modifying agent is a gas selected from a group consisting of ozone, a hydrocarbon, fluorine, sulfur, chlorine, and bromine; and wherein a median pore size of the porous metal structure is less than about 100 nm. 9. The device of claim 8 , wherein surfaces of the porous structure are doped with Ag. 10. The device of claim 8 , wherein the porous structure comprises a metal and a nonmetal. 11. The device of claim 10 , wherein the nonmetal comprises carbon. 12. The device of claim 11 , wherein the carbon is a carbon aerogel. 13. The device of claim 8 , wherein a median pore size of the porous structure is about 60 nm. 14. The device of claim 8 , wherein surfaces of the porous structure are doped with Ag; wherein the porous structure comprises a metal and a nonmetal; wherein the nonmetal comprises carbon; wherein the carbon is a carbon aerogel; wherein the porous structure further comprises at least one additional metal selected from Ni, Cu, Ru, Rh, Pd, Ag, Ir, and Au; and wherein a median pore size of the porous structure is about 60 nm. 15. A device, comprising: a porous structure, which when contacted with a modifying agent which chemically adsorbs to a surface of the porous structure, exhibits a volumetric change due to modification of an existing surface stress of the porous structure without generating external heat or applying external electricity; and a mechanism for detecting the volumetric change, wherein the porous structure has a ratio of surface atoms to bulk atoms of at least about 1×10 −3 ; wherein the porous structure comprises: a metal component including a first metal selected from either gold or a gold alloy and a second metal selected from Ni, Cu, Ru, Rh, Pd, Ag, Ir, and Pt; and a nonmetal component comprising carbon formed on surfaces of the metal component; wherein the modifying agent is a gas selected from a group consisting of ozone, a hydrocarbon, fluorine, sulfur, chlorine, and bromine; wherein a median pore size of the porous structure is less than about 100 nm; and wherein, with respect to at least the modifying agent, the porous structure exhibits a detection limit of about 10 −12 mol. 16. The device of claim 15 , wherein the carbon is a carbon aerogel. 17. The device of claim 15 , wherein a median pore size of the porous structure is about 60 nm. 18. A device, comprising: a carbon aerogel, which when contacted width a modifying agent which chemically adsorbs to a surface of the carbon aerogel, exhibits a volumetric change due to modification of an existing surface stress of the carbon aerogel without generating external heat or applying external electricity; and a mechanism for detecting the volumetric change, wherein the carbon aerogel has a ratio of surface atoms to bulk atoms of at least about 1×10 −3 ; wherein surfaces of the carbon aerogel are doped with Ag; and wherein the modifying agent is selected from a group consisting of ozone, a hydrocarbon, fluorine, sulfur, chlorine, and bromine. 19. The device of claim 18 , wherein a median pore size of the carbon aerogel is about 60 nm.
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