Methods of manufacturing electronic display devices employing nozzle-droplet combination techniques to deposit fluids in substrate locations within precise tolerances
US-9224952-B2 · Dec 29, 2015 · US
US10263186B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10263186-B2 |
| Application number | US-84394910-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 27, 2010 |
| Priority date | Jul 27, 2009 |
| Publication date | Apr 16, 2019 |
| Grant date | Apr 16, 2019 |
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A method of making a bulk heterojunction organic photovoltaic cell by glancing angle deposition. As the disclosed method relies on a trajectory of incident vapor flux that is not parallel to the substrate normal, micro and nano-scale columnar structures of thin films can be grown on the substrate. There is also disclosed a method of forming a donor-acceptor heterojunction by depositing at least one additional organic material over the columnar structures.
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What is claimed is: 1. A method of making an organic photovoltaic cell, said method comprising depositing onto a substrate at least one organic material to form at least one bulk heterojunction comprising one or more columnar structures of organic films by exposing said substrate to an incident vapor flux having a trajectory that is at an angle (α) ranging from 30° to 70° to the substrate normal. 2. The method of claim 1 , further comprising rotating the substrate about the trajectory of said incident vapor flux. 3. The method of claim 1 , said method further comprising rotating the substrate about the trajectory of the incident vapor flux, wherein the angle α varies during said rotating. 4. The method of claim 1 , further comprising depositing at least one additional organic material on said columnar structures to form a donor-acceptor heterojunction. 5. The method of claim 4 , wherein the bulk heterojunction organic photovoltaic cell comprises an anode, a donor layer, an acceptor, an exciton blocking layer, and a cathode. 6. The method of claim 5 , wherein the donor layer is deposited without substrate rotation. 7. The method of claim 6 , wherein the donor layer is chosen from subphthalocyanine (SubPc), copper pthalocyanine (CuPc), chloroaluminium phthalocyanine (ClAlPc), tin phthalocyanine (SnPc), pentacene, tetracene, diindenoperylene (DIP), and squaraine (SQ). 8. The method of claim 5 , wherein the acceptor and exciton blocking layer are deposited with substrate rotation. 9. The method of claim 5 , wherein the acceptor is chosen from C 60 , C 70 , 3,4,9,10-perylenetetracarboxylicbis-benzimidazole (PTCBI), and hexadecafluorophthalocyanine (Fl6CuPc). 10. The method of claim 5 , wherein the exciton blocking layer is chosen from bathocuproine (BCP), bathophenanthroline (BPhen), 3,4,9,10-perylenetetracarboxylicbis-benzimidazole (PTCBI), 1,3,5-tris(N-phenylbenzimidazol-2-yl)benzene (TPBi), tris(acetylacetonato) ruthenium(III) (RuAcaca3), and aluminum(III)phenolate (Alq 2 OPH). 11. The method of claim 5 , wherein the cathode comprises a metal substitute, a non-metallic material or a metallic material chosen from Ag, Au, and Al. 12. The method of claim 1 , wherein the substrate comprises at least one of a conducting oxide chosen from indium tin oxide (ITO), tin oxide (TO), gallium indium tin oxide (GITO), zinc oxide (ZO), and zinc indium tin oxide (ZITO), and transparent conductive polymers. 13. The method of claim 12 , wherein the transparent conductive polymers comprise polyanaline (PANI). 14. The method of claim 5 , wherein the bulk heterojunction organic photovoltaic cell comprises ITO/CuPc/C 60 /BCP/Al. 15. The method of claim 4 , wherein at least one organic layer is deposited by vacuum thermal evaporation and/or organic vapor phase deposition. 16. The method of claim 15 , wherein at least one of the organic layers has a thickness ranging from 25-1200 Å. 17. The method of claim 5 , wherein the anode comprises an interfacial layer comprising MoOx. 18. The method of claim 1 , comprising depositing a conformal buffer layer on the substrate prior to depositing said at least one organic material. 19. The method of claim 1 , further comprising depositing at least one additional material after depositing said at least one organic material, wherein said at least one additional material is deposited with an incident vapor flux having a trajectory that is normal to the substrate. 20. The method of claim 19 , wherein said depositing of the additional material and the at least one organic material occurs on a moving substrate. 21. The method of claim 20 , wherein said moving substrate is in a reel-to-reel or in-line deposition system. 22. The method of claim 5 , wherein the bulk heterojunction organic photovoltaic cell comprises ITO/ClAlPc/C 60 /BCP/Al.
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