Substrate temperature measuring device, substrate processing apparatus including the same, and substrate temperature measuring method using the same
US-2024019311-A1 · Jan 18, 2024 · US
US10260949B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10260949-B2 |
| Application number | US-201715827209-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 30, 2017 |
| Priority date | Dec 26, 2016 |
| Publication date | Apr 16, 2019 |
| Grant date | Apr 16, 2019 |
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A Raman spectrum-based object inspection apparatus and a Raman spectrum-based object inspection method are disclosed. In one aspect, an example apparatus includes: a laser device configured to emit a laser; an optical guiding device configured to guide the laser to an object to be detected and collect a Raman scattering light from the object. The apparatus includes a spectrum generator configured to receive the Raman scattering light collected by the optical guiding device and generate a Raman spectroscopic signal. The spectrum analyzer is configured to analyze the Raman spectroscopic signal to obtain an inspection result. The apparatus includes a monitoring device configured to monitor a state of the object and control an object inspection operation depending on the state of the object.
Opening claim text (preview).
What is claimed is: 1. A Raman spectrum-based object inspection apparatus, comprising: a laser device configured to emit a laser; an optical guiding device configured to guide the laser to an object to be detected and collect a Raman scattering light from the object; a spectrum generator configured to receive the Raman scattering light collected by the optical guiding device and generate a Raman spectroscopic signal; a spectrum analyzer configured to analyze the Raman spectroscopic signal to obtain an inspection result; and a monitoring device configured to monitor a state of the object and control an object inspection operation depending on the state of the object, wherein the monitoring device comprises: an information acquiring unit configured to acquire information on the state of the object; and a control unit configured to start or terminate the object inspection operation depending on the information on the state of the object, and wherein the information acquiring unit comprises a photographic unit configured to shot a detected location of the object to acquire information on color of the detected location as the information on the state of the object. 2. The Raman spectrum-based object inspection apparatus of claim 1 , wherein the control unit is configured to terminate the object inspection operation when the color of the detected location is a predetermined color. 3. The Raman spectrum-based object inspection apparatus of claim 1 , wherein the information acquiring unit comprises a temperature measuring unit configured to measure a temperature of the object in the object inspection operation. 4. The Raman spectrum-based object inspection apparatus of claim 3 , wherein the control unit is configured to terminate the object inspection operation when a slope of variation of the temperature or amplitude of the temperature of the object exceeds a predetermined threshold. 5. The Raman spectrum-based object inspection apparatus of claim 3 , wherein the temperature measuring unit comprises an infrared temperature measuring device. 6. The Raman spectrum-based object inspection apparatus of claim 1 , wherein the information acquiring unit further comprises a laser irradiation danger recognizing unit configured to recognize whether a non-irradiated target falls within a region which is being irradiated by the laser or will be irradiated by the laser. 7. The Raman spectrum-based object inspection apparatus of claim 6 , wherein the non-irradiated target comprises a face of a person. 8. The Raman spectrum-based object inspection apparatus of claim 1 , wherein the monitoring device further comprises a recording unit configured to record a physical image of the object. 9. The Raman spectrum-based object inspection apparatus of claim 1 , wherein the object inspection operation comprises emitting the laser by the laser device. 10. The Raman spectrum-based object inspection apparatus of claim 1 , further comprising a weight recognizing device configured to identify the object depending on weight of the object. 11. The Raman spectrum-based object inspection apparatus of claim 10 , wherein the weight recognizing device comprises: a weighing unit configured to measure the weight of the object; a storing unit configured to store predetermined reference weights and a database of corresponding barcodes; a comparing unit configured to compare the measured weight of the object with the reference weights to determine the barcode corresponding to the reference weight which is closest to the weight of the object; and an outputting unit configured to output the determined barcode as a weight recognizing result. 12. A Raman spectrum-based object inspection method, comprising: monitoring a state of an object to be detected to determine whether the state of the object is normal or abnormal; when the state of the object is normal, starting a laser device to emit a laser to the object and collecting a Raman scattering light from the object to detect a Raman spectrum of the object; otherwise, when the state of the object is abnormal, terminating the laser device to stop emitting the laser to interrupt detection, wherein the state of the object comprises a color of the object and the abnormal state of the object comprises a predetermined color of the object while the normal state of the object comprises any colors of the object other than the predetermined color. 13. The Raman spectrum-based object inspection method of claim 12 , further comprising: when the state of the object is normal, starting a real-time monitoring of the temperature of the object during detection, and when the temperature of the object is found to exceed a predetermined threshold, terminating the laser device to stop emitting the laser to interrupt the detection. 14. The Raman spectrum-based object inspection method of claim 12 , further comprising: comparing the detected Raman spectrum with reference Raman spectra and outputting results of the comparing.
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