Precision clamp

Patent metadata

Field	Value
Publication number	US-10259104-B2
Application number	US-201414526326-A
Country	US
Kind code	B2
Filing date	Oct 28, 2014
Priority date	Oct 28, 2013
Publication date	Apr 16, 2019
Grant date	Apr 16, 2019

Abstract

A clamp for selectively inhibiting movement of a first object relative to a second object includes (i) a first clamp component coupled to the first object; (ii) a second clamp component coupled to the second object; and (iii) a fluid source that directs a fluid to the second clamp component to create a fluid bearing between the first clamp component and the second clamp component that allows for movement of the first clamp component relative to the second clamp component, and wherein the fluid source directs less fluid to the second clamp component to inhibit relative movement.

First claim

What is claimed is:

1. A clamp for selectively inhibiting relative movement between a first object and a second object, the clamp comprising:
a clamp assembly including (i) a first clamp component that is coupled to the first object, the first clamp component having a first planar surface, and (ii) a second clamp component that is coupled to the second object, the second clamp component having a second planar surface, the clamp assembly being movable between a clamped configuration in which relative movement of the clamp components is inhibited and an unclamped configuration that allows for relative movement between the clamp components, the first clamp component being positioned directly against the second clamp component, such that the first planar surface is directly against the second planar surface, when the clamp assembly is in the clamped configuration;
a bias assembly that urges the first clamp component to move towards the second clamp component and urges the clamp assembly to move from the unclamped configuration to the clamped configuration, the bias assembly being spaced apart from second clamp component when the clamp assembly is in the clamped configuration; and
a fluid source that selectively directs a fluid to the clamp assembly to selectively generate a fluid bearing between the first clamp component and the second clamp component that urges the clamp assembly from the clamped configuration to the unclamped configuration; wherein the fluid bearing generated by the fluid source opposes the bias assembly and moves the first clamp component to be spaced apart a gap from the second clamp component in the unclamped configuration; wherein the fluid bearing guides relative movement between the clamp components in either direction along a movement axis when the first clamp component is spaced apart from the second clamp component while inhibiting relative movement between the clamp components along a transverse axis that is transverse to the movement axis; and wherein when the fluid source is not generating the fluid bearing, the bias assembly urges the first clamp component against the second clamp component.

2. The clamp of claim 1 wherein the bias assembly includes at least one resilient member.

3. The clamp of claim 1 wherein the first clamp component is passively biased to move toward the second clamp component to urge the clamp assembly from the unclamped configuration toward the clamped configuration.

4. The clamp of claim 1 wherein at least one of the first planar surface and the second planar surface includes at least one surface feature that inhibits an air hammer effect.

5. The clamp of claim 1 wherein the fluid source reduces pressure of the fluid to the clamp assembly so that the clamp assembly moves from the unclamped configuration to the clamped configuration.

6. The clamp of claim 1 wherein the fluid bearing separates the clamp components.

7. The clamp of claim 1 wherein forces and stresses on the first clamp component between the clamped configuration and the unclamped configuration change by less than approximately three percent.

8. The clamp of claim 1 wherein clamping loads are substantially symmetrical and substantially perpendicular to an axis being clamped.

9. A clamp for selectively inhibiting relative movement between a first object and a second object, the clamp comprising:
a clamp assembly including a first clamp component that is coupled to the first object, and a second clamp component that is coupled to the second object, the clamp assembly being movable between a clamped configuration in which relative movement of the clamp components is inhibited and an unclamped configuration that allows for relative movement between the clamp components;
a bias assembly that urges the first clamp component to move towards the second clamp component and urges the clamp assembly to move from the unclamped configuration to the clamped configuration;
a fluid source that selectively directs a fluid to the clamp assembly to selectively generate a fluid bearing between the first clamp component and the second clamp component that urges the clamp assembly from the clamped configuration to the unclamped configuration; wherein the fluid bearing generated by the fluid source opposes the bias assembly and moves the first clamp component to be spaced apart a gap from the second clamp component in the unclamped configuration; wherein the fluid bearing guides relative movement between the clamp components in either direction along a movement axis when the first clamp component is spaced apart from the second clamp component while inhibiting relative movement between the clamp components along a transverse axis that is transverse to the movement axis; and wherein when the fluid source is not generating the fluid bearing, the bias assembly urges the first clamp component against the second clamp component; and
an electrostatic chuck that increases a clamping force between the clamping components in the clamped configuration.

10. The clamp of claim 1 further comprising a vacuum chuck that increases a clamping force between the clamping components in the clamped configuration.

11. The clamp of claim 1 further comprising a clamping fluid bearing that increases a clamping force between the clamping components in the clamped configuration.

12. The clamp of claim 1 wherein the second clamp component includes a fluid bearing surface that is used to create the fluid bearing, and wherein the clamp includes an actuator that moves the fluid bearing surface to move the clamp between the clamped configuration and the unclamped configuration.

13. The clamp of claim 1 wherein the first clamp component includes a projection and the second clamp component includes a groove that receives the projection, and wherein a fluid bearing is created between the projection and the groove to inhibit relative movement.

14. The clamp of claim 1 further comprising a retractable plate to increase a clamping force between the clamping components in the clamped configuration.

15. The clamp of claim 1 wherein the second clamp component includes a mechanical connection that causes clamping to occur with a mechanical advantage.

16. A clamp for selectively inhibiting relative movement between a first object and a second object, the clamp comprising:
a clamp assembly including a first clamp component that is coupled to the first object, and a second clamp component that is coupled to the second object, the clamp assembly being movable between a clamped configuration in which relative movement of the clamp components is inhibited and an unclamped configuration that allows for relative movement between the clamp components;
a fluid source that selectively directs a fluid to the clamp assembly to selectively generate a fluid bearing between the first clamp component and the second clamp component that urges the clamp assembly from the clamped configuration to the unclamped configuration; and
a bias assembly that urges the first clamp component to move towards the second clamp component and urges the clamp assembly to move from the unclamped configuration to the clamped configuration, wherein the bias assembly includes a magnet.

17. An assembly comprising:
a first object;
a second object; and
a clamp assembly that is selectively movable between a clamped configuration and an unclamped configuration for selectively inhibiting relative movement between the first object and the second object along a movement axis, the clamp assembly including (i) a cylindrical shaft-shaped first clamp component that is c

Assignees

• Nikon Corp

Inventors

• Hashemi Fardad A
• Bow Travis D
• Chang Patrick

Classifications

• B25B5/16 Primary

  Details, e.g. jaws, jaw attachments · CPC title

• B23B31/28

  using electric or magnetic means in the chuck · CPC title

• B23B31/10

  characterised by the retaining or gripping devices or their immediate operating means · CPC title

• B25B5/06

  Arrangements for positively actuating jaws · CPC title