Model optimization approach based on spectral sensitivity

Patent metadata

Field	Value
Publication number	US-10255385-B2
Application number	US-201313781474-A
Country	US
Kind code	B2
Filing date	Feb 28, 2013
Priority date	Mar 28, 2012
Publication date	Apr 9, 2019
Grant date	Apr 9, 2019

Abstract

Model optimization approaches based on spectral sensitivity is described. For example, a method includes determining a first model of a structure. The first model is based on a first set of parameters. A set of spectral sensitivity variations data is determined for the structure. Spectral sensitivity is determined by derivatives of the spectra with respect to the first set of parameters. The first model of the structure is modified to provide a second model of the structure based on the set of spectral sensitivity variations data. The second model of the structure is based on a second set of parameters different from the first set of parameters. A simulated spectrum derived from the second model of the structure is then provided.

First claim

What is claimed is:

1. A method of optimizing parametric models for structural analysis using metrology of a semiconductor structure comprising repeating structures on a semiconductor substrate or wafer, the method comprising:
determining a first model of a structure on the semiconductor substrate or wafer of the semiconductor structure, the first model based on a first set of parameters;
calculating spectra for the first model of the structure for multiple points in parameter space using multiple different rays;
determining a set of combined spectral sensitivity variations data for the structure for variation of the spectra calculated with respect to the parameters of the first model, wherein combined spectral sensitivity for the structure is determined by calculation of derivatives of the spectra for the multiple points in parameter space with respect to the first set of parameters;
performing a spectral sensitivity analysis based on the set of combined spectral sensitivity variations data for the structure;
modifying, based on the set of combined spectral sensitivity variations data for the structure and the spectral sensitivity analysis, the first model of the structure to provide a second model of the structure, the second model of the structure based on a second set of parameters different from the first set of parameters;
calculating and providing a simulated spectrum derived from the second model of the structure;
comparing the simulated spectrum derived from the second model to a sample spectrum derived from the structure on the semiconductor substrate or wafer of the semiconductor structure;
identifying the simulated spectrum that matches the sample spectrum to a predetermined matching criterion;
receiving the semiconductor structure comprising the repeating structures on the semiconductor substrate or wafer, wherein the semiconductor structure is fabricated according to a specification; and
employing the identified simulated spectrum in a production environment to determine whether the semiconductor structure in the production environment has been fabricated according to the specification.

2. The method of claim 1 , wherein modifying the first model of the structure to provide the second model of the structure further comprises reducing the degrees of freedom (DoF) of the first set of parameters to provide the second set of parameters.

3. The method of claim 2 , wherein reducing the DoF of the first set of parameters comprises:
generating the combined spectral sensitivity data for the structure;
selecting an appropriate parameterization; and
fixing parameters having a smallest combined spectral sensitivity.

4. The method of claim 1 , wherein modifying the first model of the structure to provide the second model of the structure comprises reparameterizing geometric parameters or material parameters, or both, to provide the second set of parameters.

5. The method of claim 1 , wherein modifying the first model of the structure to provide the second model of the structure comprises reparameterizing non-geometric parameters to provide the second set of parameters, the non-geometric parameters selected from the group consisting of custom function parameters and principal component analysis (PCA) parameters.

6. The method of claim 5 , wherein the reparameterizing comprises using custom function parameters in linear or non-linear parameter correlations.

7. The method of claim 5 , wherein the reparameterizing comprises using custom functions having different numbers of parameters.

8. The method of claim 5 , wherein the reparameterizing comprises reducing a library size of the second set of parameters relative to the first set of parameters.

9. The method of claim 5 , wherein the reparameterizing comprises using a discretized model having a large number of parameters.

10. The method of claim 3 , wherein the combined spectral sensitivity data for the structure using multiple different rays is calculated for one or more of multiple Angles of Incidence (AOI), Azimuth angles, or Polarization states.

11. The method of claim 1 , wherein the repeating structures comprise planar film stack structures located in the wafer scribe line area or device area, and the metrology comprises a thickness measurement.

12. The method of claim 1 , wherein the repeating structures comprise repeating structures for measurement of critical dimension (CD) in the wafer scribe line area or device area.

13. The method of claim 1 , wherein the repeating structures comprise a combination of structures for separate measurement as multiple targets, and for modeling together.

14. The method of claim 1 , wherein performing the spectral sensitivity analysis includes performance of principal component analysis (PCA).

15. A system comprising:
a fabrication cluster configured to fabricate a semiconductor structure comprising repeating structures on a semiconductor substrate or wafer, according to a specification; and
an optical metrology system comprising
a non-transitory machine-accessible storage medium having instructions stored thereon which cause a data processing system to perform a method of optimizing parametric models for structural analysis using metrology of repeating structures on a semiconductor substrate or wafer, the method comprising:
determining a first model of a structure on a semiconductor substrate or wafer, the first model based on a first set of parameters;
calculating spectra for the first model of the structure for multiple points in parameter space using multiple different rays;
determining a set of combined spectral sensitivity variations data for the structure for variation of the spectra calculated with respect to the parameters of the first model, wherein combined spectral sensitivity is determined by calculation of derivatives of the calculated spectra for the multiple points in parameter space with respect to the first set of parameters;
performing a spectral sensitivity analysis based on the set of combined spectral variations data for the structure;
modifying, based on the set of combined spectral sensitivity variations data for the structure and the spectral sensitivity analysis, the first model of the structure to provide a second model of the structure, the second model of the structure based on a second set of parameters different from the first set of parameters;
calculating and providing a simulated spectrum derived from the second model of the structure;
comparing the simulated spectrum derived from the second model to a sample spectrum derived from the structure on the semiconductor substrate or wafer;
identifying the simulated spectrum that matches the sample spectrum to a predetermined matching criteria; and
employing the identified simulated spectrum in a production environment to determine whether the semiconductor structure has been fabricated according to the specification.

16. The system as in claim 15 , wherein modifying the first model of the structure to provide the second model of the structure further comprises reducing the degrees of freedom (DoF) of the first set of parameters to provide the second set of parameters.

17. The system as in claim 16 , wherein reducing the DoF of the first set of parameters comprises:
generating the combined spectral sensitivity data for the structure;
selecting an appropriate parameterization; and
fixing parameters having a smallest combined spectral sensitivity.

18. The system as in claim 15 , wherein modifying the first model of the structure to provide the second model of the

Assignees

• Pandev Stilian Ivanov
• Dziura Thaddeus Gerard
• Shih Meng Fu
• Lee Lie Quan
• Kla Tencor Corp

Inventors

• Pandev Stilian Ivanov
• Dziura Thaddeus Gerard
• Shih Meng-Fu
• Lee Lie-Quan

Classifications

• G06F30/394

  Routing (G06F30/396 takes precedence) · CPC title

• G03F7/70616

  Monitoring the printed patterns · CPC title

• G01N21/4788

  Diffraction (for sizing particles G01N15/0205) · CPC title

• G01B2210/56

  Measuring geometric parameters of semiconductor structures, e.g. profile, critical dimensions or trench depth · CPC title

• G06T2207/30148

  Semiconductor; IC; Wafer · CPC title