Static expansion method

Patent metadata

Field	Value
Publication number	US-10254189-B2
Application number	US-201715723752-A
Country	US
Kind code	B2
Filing date	Oct 3, 2017
Priority date	Nov 21, 2012
Publication date	Apr 9, 2019
Grant date	Apr 9, 2019

Abstract

A static expansion method is performed by expanding a volume of a testing gas from V 0 to V 0 +V 1 between a second chamber of the volume V 1 which is connected to an upstream side of a measurement chamber and a first chamber of the volume V 0 which is connected to an upstream side of the second chamber, wherein the first camber is in communication with the second chamber via a first valve, wherein the second chamber is in communication with the measurement chamber via each of a second valve and an orifice or porous plug, respectively. When the first valve is opened and the second valve is closed, the testing gas flows from the first chamber via the second chamber into the measurement chamber only through the orifice or porous plug.

First claim

What is claimed is:

1. A method comprising:
providing a reference leak generating device which is connected to an upstream side of a measurement chamber, wherein the reference leak generating device comprises a first chamber connected to the measurement chamber through an orifice or a porous plug having a molecular flow conductance C and a pressure to establish molecular flow conditions which are known in advance,
determining a pressure p 1 of testing gas which is introduced into the first chamber by a static expansion method one or more times, wherein the pressure p 1 is set so that the testing gas flowing through the orifice or the porous plug satisfies the molecular flow conditions, and
obtaining a leak rate of a reference leak at the pressure p 1 in accordance with a product of C and p 1 ,
wherein the static expansion method is performed by expanding a volume of the testing gas from V 0 to V 0 +V 1 between a second chamber of the volume V 1 which is connected to the upstream side of the measurement chamber and the first chamber of the volume V 0 which is connected to an upstream side of the second chamber, wherein the first camber is in communication with the second chamber via first valve, wherein the second chamber is in communication with the measurement chamber via each of a second valve and the orifice or porous plug, respectively, and wherein, when the first valve is opened and the second valve is closed, the testing gas flows from the first chamber via the second chamber into the measurement chamber only through the orifice or porous plug.

2. The method according to claim 1 , wherein said providing comprises providing
an ultra-fine leak testing device or an outgassing measurement device, one of the ultra-fine leak testing device or the outgassing measurement device comprising a reference leak generating section constituted of the reference leak generating device, and a fine leak measuring section,
said fine leak measuring section including said measurement chamber for measuring a leak or an outgassing from a test piece, a partial pressure analyzer connected to the measurement chamber, and an entrapment vacuum pump connected to the measurement chamber and adapted not to discharge the testing gas,
said reference leak generating section comprising, on the upstream side of the measurement chamber, the second chamber connected to the measurement chamber through the orifice or the porous plug having the molecular flow conductance C and the pressure to establish the molecular flow conditions which are known in advance,
wherein the method further comprises measuring an increasing rate of a partial pressure of the testing gas with the partial pressure analyzer, and comparing an increasing rate of an output signal of the partial pressure analyzer with the leak rate of the reference leak to perform calibration.

3. The method according to claim 2 , wherein the testing gas is an inert gas.

4. The method according to claim 1 , wherein said providing comprises providing
an ultra-fine leak testing device or an outgassing/permeation measurement device, one of the ultra-fine leak testing device or the outgassing/permeation measurement device comprising a reference leak generating section constituted of the reference leak generating device, and a fine leak measuring section,
said fine leak measuring section including said measurement chamber for measuring a leak or an outgassing from a test piece, a partial pressure analyzer connected to the measurement chamber, and a kinetic vacuum pump connected the measurement chamber,
said reference leak generating section comprising, on the upstream side of the measurement chamber, the second chamber connected to the measurement chamber through the orifice or the porous plug having the molecular flow conductance C and the pressure to establish the molecular flow conditions which are known in advance,
wherein the method further comprises measuring a partial pressure of the testing gas in equilibrium conditions which is measured with the partial pressure analyzer and comparing said partial pressure with the leak rate of the reference leak to perform calibration.

Assignees

• Aist

Inventors

• Yoshida Hajime
• Arai Kenta
• Kobata Tokihiko

Classifications

• G01L27/002 Primary

  Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination · CPC title

• G01M3/207

  calibration arrangements · CPC title

• B81B2201/05

  Microfluidics · CPC title

• G01M3/26

  by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors · CPC title

• B81B7/0009

  Structural features, others than packages, for protecting a device against environmental influences (B81C1/00777 takes precedence) · CPC title