Near infrared optical interference filters with improved transmission
US-2016216419-A1 · Jul 28, 2016 · US
US10247865B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10247865-B2 |
| Application number | US-201715657515-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 24, 2017 |
| Priority date | Jul 24, 2017 |
| Publication date | Apr 2, 2019 |
| Grant date | Apr 2, 2019 |
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A bandpass filter may include a set of layers. The set of layers may include a first subset of layers. The first subset of layers may include hydrogenated germanium (Ge:H) with a first refractive index. The set of layers may include a second subset of layers. The second subset of layers may include a material with a second refractive index. The second refractive index may be less than the first refractive index.
Opening claim text (preview).
What is claimed is: 1. A bandpass filter, comprising: a set of layers including: a first subset of layers, the first subset of layers comprising hydrogenated germanium (Ge:H) with a first refractive index; and a second subset of layers, the second subset of layers comprising a material with a second refractive index, the second refractive index being less than the first refractive index, and the material including at least one of: a silicon dioxide (SiO 2 ) material, an aluminum oxide (Al 2 O 3 ) material, a titanium dioxide (TiO 2 ) material, a niobium pentoxide (Nb 2 O 5 ) material, a tantalum pentoxide (Ta 2 O 5 ) material, or a magnesium fluoride (MgF 2 ) material. 2. The bandpass filter of claim 1 , where the first subset of layers are high refractive index layers (H) and the second subset of layers are low refractive index layers (L); and where the set of layers are arranged in at least one of: an (H-L) m order, an (H-L) m -H order, an (L-H) m order, or an L-(H-L) m order, where m is a quantity of alternating H and L layers. 3. The bandpass filter of claim 1 , where the set of layers is configured to pass a threshold portion of light associated with a spectral range of between approximately 1100 nanometers (nm) and 2000 nm. 4. The bandpass filter of claim 1 , where the set of layers is configured to pass a threshold portion of light associated with a spectral range of between approximately 1400 nanometers (nm) and 2000 nm. 5. The bandpass filter of claim 1 , where the set of layers is configured to pass a threshold portion of light associated with a spectral range with a center wavelength of approximately 1550 nanometers. 6. The bandpass filter of claim 1 , where the first refractive index is greater than approximately 3.8 at a wavelength of approximately 1550 nanometers. 7. The bandpass filter of claim 1 , where the first refractive index is approximately 4.2 at a wavelength of approximately 1550 nanometers. 8. The bandpass filter of claim 1 , where the first subset of layers is associated with an extinction coefficient of less than approximately 0.01 at a spectral range centered at approximately 1550 nanometers. 9. The bandpass filter of claim 1 , where the second refractive index is less than 3 at a spectral range of approximately 1100 nanometers (nm) to approximately 2000 nm. 10. The bandpass filter of claim 1 , where a change to a center wavelength of a spectral range is less than 40 nanometers for angles of incidence from 0 degrees to 40 degrees. 11. The bandpass filter of claim 1 , where a change to a center wavelength of a spectral range is less than 30 nanometers for angles of incidence from 0 degrees to 40 degrees. 12. The bandpass filter of claim 1 , where a change to a center wavelength of a spectral range is less than 20 nanometers for angles of incidence from 0 degrees to 30 degrees. 13. The bandpass filter of claim 1 , where a change to a center wavelength of a spectral range is less than 10 nanometers for angles of incidence from 0 degrees to 20 degrees. 14. An optical filter, comprising: a substrate; and a set of alternating high refractive index layers and low refractive index layers disposed onto the substrate to filter incident light, where the optical filter is configured to pass a first portion of the incident light within a spectral range with a center wavelength of approximately 1550 nanometers (nm) and reflect a second portion of incident light not within the spectral range, the high refractive index layers being hydrogenated germanium (Ge:H), and the low refractive index layers being silicon dioxide (SiO 2 ). 15. The optical filter of claim 14 , where the high refractive index layers are deposited using a sputtering procedure. 16. The optical filter of claim 14 , where the high refractive index layers are annealed. 17. An optical system, comprising: an optical filter configured to filter an input optical signal and provide the filtered input optical signal, the input optical signal including light from a first optical source and light from a second optical source, the optical filter including a set of dielectric thin film layers, the set of dielectric thin film layers including: a first subset of layers of hydrogenated germanium with a first refractive index, a second subset of layers of a material with a second refractive index less than the first refractive index, the material including at least one of: a silicon dioxide (SiO 2 ) material, an aluminum oxide (Al 2 O 3 ) material, a titanium dioxide (TiO 2 ) material, a niobium pentoxide (Nb 2 O 5 ) material, a tantalum pentoxide (Ta 2 O 5 ) material, or a magnesium fluoride (MgF 2 ) material, and the filtered input optical signal including a reduced intensity of light from the second optical source relative to the input optical signal; and an optical sensor configured to receive the filtered input optical signal and provide an output electrical signal. 18. The optical system of claim 17 , where the optical filter is disposed onto a sensor element array of the optical sensor. 19. The optical system of claim 17 , where the optical filter is separated from a sensor element by free space. 20. The optical system of claim 17 , where the optical filter is associated with a thickness of approximately 5.6 μm.
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