Multi-film structure

Patent metadata

Field	Value
Publication number	US-10247864-B2
Application number	US-201715482717-A
Country	US
Kind code	B2
Filing date	Apr 8, 2017
Priority date	Nov 4, 2016
Publication date	Apr 2, 2019
Grant date	Apr 2, 2019

Abstract

In the present invention, a multi-film structure being coated on the surface of a workpiece is disclosed. The multi-film structure is formed by making a high-entropy material film of at least two layers and a non-high-entropy material film of at least one layer be stacked on each other. In addition, the multi-film structure can also be formed by making a first high-entropy material film of at least one layer and a second non-high-entropy material film of at least one layer be stacked on each other. This multi-film structure particularly contains interlaminar interfaces to inhibit crack extension and reduce plastic deformation, so that the hardness and toughness of the workpiece coated with this inventive multi-film structure would be obviously enhanced. Moreover, the appearance color of the workpiece can also be changed by the multi-film structure, wherein the color type is dependent on the optical interferences occurring in the multi-film structure.

First claim

What is claimed is:

1. A multi-film structure being coated on the surface of a workpiece and being formed by making a high-entropy material film of at least two layers and a non-high-entropy material film of at least one layer be periodically stacked onto each other; wherein the multi-film structure exhibits a total nano-indentation hardness of at least 10 GPa.

2. The multi-film structure of claim 1 , wherein the non-high-entropy material film is selected from the group consisting of: non-high-entropy pure metal film, non-high-entropy alloy film, non-high-entropy nitride film, non-high-entropy carbide film, non-high-entropy boride film, non-high-entropy diamond-like carbon film, non-high-entropy nitroxide film, non-high-entropy carbonitride film, non-high-entropy oxide film, non-high-entropy carboxide film, and other non-high-entropy ceramic films.

3. The multi-film structure of claim 1 , wherein the high-entropy material film is selected from the group consisting of: high-entropy alloy film, high-entropy nitride film, high-entropy carbide film, high-entropy nitroxide film, high-entropy carbonitride film, high-entropy oxide film, high-entropy carbon oxide film, and other high-entropy ceramic films.

4. The multi-film structure of claim 1 , wherein both the high-entropy material film and the non-high-entropy material film are formed by a process technology of physical vapor deposition (PVD).

5. The multi-film structure of claim 4 , wherein the said physical vapor deposition is sputter deposition, arc vapor deposition, or ion plating.

6. A multi-film structure being coated on the surface of a workpiece and being formed by making a first high-entropy material film of at least one layer and a second high-entropy material film of at least one layer be periodically stacked onto each other; wherein the multi-film structure has a layer number of at least two layers and exhibits a total nano-indentation hardness of at least 10 GPa.

7. The multi-film structure of claim 6 , wherein both the first high-entropy material film and the second high-entropy material film are selected from the group consisting of: high-entropy alloy film, high-entropy nitride film, high-entropy carbide film, high-entropy nitroxide film, high-entropy carbonitride film, high-entropy oxide film, high-entropy carboxide film, and other high-entropy ceramic films.

8. The multi-film structure of claim 6 , wherein both the first high-entropy material film and the second high-entropy material film are formed by a process technology of physical vapor deposition (PVD).

9. The multi-film structure of claim 8 , wherein the said physical vapor deposition is sputter deposition, arc vapor deposition, or ion plating.

Assignees

• Univ Nat Tsing Hua

Inventors

• Yeh Jien-Wei

Classifications

• G02B5/285 Primary

  comprising deposited thin solid films (G02B5/281 - G02B5/289 take precedence; multilayered film filters for fibre optic multiplexing G02B6/29361) · CPC title

• C23C20/00

  Chemical coating by decomposition of either solid compounds or suspensions of the coating forming compounds, without leaving reaction products of surface material in the coating · CPC title

• C23C14/06

  characterised by the coating material ({C23C14/0021} , C23C14/04 take precedence) · CPC title

• G02B1/14

  Protective coatings, e.g. hard coatings · CPC title