Micromechanical component and production method for a micromechanical component

Patent metadata

Field	Value
Publication number	US-10246318-B2
Application number	US-201715702034-A
Country	US
Kind code	B2
Filing date	Sep 12, 2017
Priority date	Sep 13, 2016
Publication date	Apr 2, 2019
Grant date	Apr 2, 2019

Abstract

A micromechanical component having a substrate, a membrane that covers an opening structured into the substrate from a first side of the substrate and that can be warped by a pressure difference between the first side of the substrate and a second side, oriented away from the first side, of the substrate, and having at least one actuator electrode that is connected at least to the membrane in such a way that the at least one actuator electrode can be displaced relative to the substrate by a warping of the membrane, the at least one actuator electrode being capable of being displaced relative to the substrate by the warping of the membrane, in each case along a displacement axis oriented parallel to the second side of the substrate. A production method for a micromechanical component is also described.

First claim

What is claimed is:

1. A micromechanical component, comprising:
a substrate;
a membrane that covers an opening structured into the substrate from a first side of the substrate, and that can be warped by a pressure difference between the first side of the substrate and a second side, oriented away from the first side, of the substrate; and
at least one actuator electrode that is connected at least to the membrane in such a way that the at least one actuator electrode is displaced relative to the substrate by a warping of the membrane, the at least one actuator electrode being capable of being displaced relative to the substrate by the warping of the membrane, in each case along a displacement axis oriented parallel to the second side of the substrate;
wherein the at least one actuator electrode is connected to the membrane at least by at least one torsion spring that is capable of being rotated about a respective torsion axis by the warping of the membrane, in such a way that the at least one actuator electrode is capable of being displaced relative to the substrate by the warping of the membrane, in each case along its axis of displacement oriented parallel to the second side of the substrate.

2. The micromechanical component as recited in claim 1 , wherein the at least one actuator electrode is connected to the membrane via a respective first torsion spring and a respective second torsion spring as the at least one torsion spring.

3. The micromechanical component as recited in claim 2 , wherein a first height of the at least one first torsion axis of the at least one first torsion spring from the second side of the substrate differing from a second height of the at least one second torsion axis of the at least one second torsion spring from the second side of the substrate, the first and second torsion axis running parallel to the second side of the substrate.

4. The micromechanical component as recited in claim 3 , wherein a distance of the at least one first torsion axis of the at least one first torsion spring from the second torsion axis of its associated second torsion spring is smaller than fifteen times a difference between the first height and the second height, the first torsion axis and the second torsion axis being oriented parallel to one another.

5. The micromechanical component as recited in claim 1 , wherein the at least one actuator electrode is connected to the substrate in each case by at least one of a U-shaped spring and a meander-shaped spring, in such a way that a displacement movement, oriented perpendicular to the second side of the substrate, of the at least one actuator electrode is prevented by the at least one of the U-shaped spring and the meander-shaped spring.

6. The micromechanical component as recited in claim 1 , wherein the at least one actuator electrode is in each case a comb electrode having electrode fingers oriented at least one of along its axis of displacement and parallel to its axis of displacement.

7. The micromechanical component as recited in claim 1 , wherein the at least one actuator electrode is, in each case, a comb electrode having electrode fingers oriented perpendicular to its axis of displacement.

8. The micromechanical component as recited in claim 1 , wherein the micromechanical component has exactly two actuator electrodes as the at least one actuator electrode, and the membrane being centrically sectioned by a plane of symmetry relative to which the two actuator electrodes are mirror-symmetrical.

9. A microphone having a micromechanical component, the micromechanical component comprising:
a substrate;
a membrane that covers an opening structured into the substrate from a first side of the substrate, and that can be warped by a pressure difference between the first side of the substrate and a second side, oriented away from the first side, of the substrate; and
at least one actuator electrode that is connected at least to the membrane in such a way that the at least one actuator electrode is displaced relative to the substrate by a warping of the membrane, the at least one actuator electrode being capable of being displaced relative to the substrate by the warping of the membrane, in each case along a displacement axis oriented parallel to the second side of the substrate;
wherein the at least one actuator electrode is connected to the membrane at least by at least one torsion spring that is capable of being rotated about a respective torsion axis by the warping of the membrane, in such a way that the at least one actuator electrode is capable of being displaced relative to the substrate by the warping of the membrane, in each case along its axis of displacement oriented parallel to the second side of the substrate.

10. A pressure sensor having a micromechanical component, the micromechanical component comprising:
a substrate;
a membrane that covers an opening structured into the substrate from a first side of the substrate, and that can be warped by a pressure difference between the first side of the substrate and a second side, oriented away from the first side, of the substrate; and
at least one actuator electrode that is connected at least to the membrane in such a way that the at least one actuator electrode is displaced relative to the substrate by a warping of the membrane, the at least one actuator electrode being capable of being displaced relative to the substrate by the warping of the membrane, in each case along a displacement axis oriented parallel to the second side of the substrate;
wherein the at least one actuator electrode is connected to the membrane at least by at least one torsion spring that is capable of being rotated about a respective torsion axis by the warping of the membrane, in such a way that the at least one actuator electrode is capable of being displaced relative to the substrate by the warping of the membrane, in each case along its axis of displacement oriented parallel to the second side of the substrate.

Assignees

• Bosch Gmbh Robert

Inventors

• Grutzeck Helmut
• Reinmuth Jochen

Classifications

• B81B2203/0172

  Flexible holders not provided for in B81B2203/0154 - B81B2203/0163 · CPC title

• B81B2203/0127

  Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function · CPC title

• H02N1/008

  Laterally driven motors, e.g. of the comb-drive type · CPC title

• B81B2201/0264

  Pressure sensors · CPC title

• H04R19/04

  Microphones (H04R19/01 takes precedence) · CPC title