Color film substrate, manufacturing method thereof and display device

Patent metadata

Field	Value
Publication number	US-10241361-B2
Application number	US-201615503046-A
Country	US
Kind code	B2
Filing date	Jul 5, 2016
Priority date	Dec 21, 2015
Publication date	Mar 26, 2019
Grant date	Mar 26, 2019

Abstract

A color film substrate comprises: a basal substrate, a plurality of color filters of at least one color formed on the basal substrate, and a black matrix formed on the basal substrate. The black matrix has a plurality of openings one-to-one corresponding to the plurality of color filters of at least one color. In a cross section perpendicular to the basal substrate, an edge of the color filter and an opening edge of the black matrix have an overlapping region. According to the color film substrate, manufacturing method thereof and display device provided by the embodiments of the present disclosure, by applying the technology of halftone mask plate and positive/negative photoresist, the patterns for the plurality of color filters of the at least one color and the pattern of the black matrix can be formed with one filter mask plate.

First claim

What is claimed is:

1. A method for manufacturing a color film substrate; the color film substrate comprising a basal substrate, a plurality of color filters of at least one color formed on the basal substrate, and a black matrix formed on the basal substrate; the black matrix having a plurality of openings one-to-one corresponding to the plurality of color filters of at least one color; wherein the method comprises:
forming the plurality of color filters of at least one color on the basal substrate with a halftone mask plate, the sum of a transparent region and a semi-transparent region of the halftone mask plate corresponding to a pattern of a color filter; and
after forming the plurality of color filters of at least one color, forming the black matrix with the same halftone mask plate, the sum of the semi-transparent region and an opaque region of the halftone mask plate corresponding to a pattern of the black matrix.

2. The method according to claim 1 , wherein forming the plurality of color filters of at least one color on the basal substrate with a halftone mask plate comprises:
for each color of the at least one color, aligning the halftone mask plate with a position for a color filter of the color; and performing an exposure process and a development process to form the color filter.

3. The method according to claim 1 , wherein forming the black matrix with the same halftone mask plate comprises:
respectively aligning the halftone mask plate with all positions for the plurality of color filters of the at least one color and performing an exposure process; and
performing a development process to form the black matrix having the plurality of openings.

4. The method according to claim 1 , wherein the color filter is formed with a negative photoresist, and the black matrix is formed with a positive photoresist.

5. The method according to claim 1 , wherein the plurality of color filters of at least one color comprises a red filter, a green filter and a blue filter.

6. The method according to claim 1 , wherein the plurality of color filters of at least one color comprises a red filter, a green filter, a blue filter and a white filter.

Assignees

• Boe Technology Group Co Ltd
• Beijing Boe Display Tech Co

Inventors

• Zhang Zhichao
• Kuo Tsungchieh
• Liu Zheng
• Liu Mingxuan
• Wang Shoukun
• Jiang Jingjing

Classifications

• G02F1/133514

  Colour filters · CPC title

• G02F1/133512 Primary

  Light shielding layers, e.g. black matrix (G02F1/136209 takes precedence) · CPC title

• G02F1/133516

  Methods for their manufacture, e.g. printing, electro-deposition or photolithography · CPC title

• G02F1/136236

  using a grey or half tone lithographic process · CPC title