Stiffness-frequency adjustable XY micromotion stage based on stress stiffening

Patent metadata

Field	Value
Publication number	US-10239167-B2
Application number	US-201415114090-A
Country	US
Kind code	B2
Filing date	Sep 24, 2014
Priority date	May 20, 2014
Publication date	Mar 26, 2019
Grant date	Mar 26, 2019

Abstract

The present disclosure involves occasions where precise two-dimensional motion takes place, and is applicable to XY motion stages for precise displacement compensation. The present disclosure particularly involves a stiffness-frequency adjustable XY micromotion stage based on stress stiffening, which includes X-direction and Y-direction motion sub-stages and corresponding drivers and a micromotion working table. The micromotion stage uses membrane sets that have tension levels thereof adjusted by bolts as a flexible hinge, so as to achieve independent adjustment of the vibration frequency of the XY micromotion stage. The present disclosure implements the foregoing configuration based on prestressed membrane, so the frequency is adjustable. The inherent frequency of the micromotion stage can be adjusted before or during operation according to various working conditions and driving frequency. The two feed motion direction are perpendicular so as to prevent the micromotion working table from coupling during two-dimensional motion.

First claim

The invention claimed is:

1. A stiffness-frequency adjustable XY micromotion stage based on stress stiffening, comprising: an X-direction membrane set, a Y-direction membrane set, an X-direction motion sub-stage, a Y-direction motion sub-stage, an outer frame, an X-direction drive, a Y-direction drive, an X-direction displacement sensor, a Y-direction displacement sensor, a rack and a working table;
the outer frame being fixed to the rack; the elastic X-direction membrane set being arranged at two sides of the X-direction motion sub-stage, with one end thereof connected to an inner wall of the outer frame and an opposite end thereof connected to the X-direction motion sub-stage; the elastic Y-direction membrane set being arranged at two sides of the Y-direction motion sub-stage, with one end thereof connected to an inner wall of the X-direction motion sub-stage, and an opposite end thereof connected to the Y-direction motion sub-stage; the X-direction membrane set and the Y-direction membrane set being perpendicular to each other, and the working table being rigidly connected to the Y-direction motion sub-stage;
membranes in each of the X-direction membrane set and the Y-direction membrane set being parallelly arranged, and having longitudinal directions perpendicular to feed directions of the X-direction motion sub-stage and of the Y-direction motion sub-stage, respectively,
the X-direction drive comprising an X-direction drive stator and an X-direction drive mover, the Y-direction drive comprising a Y-direction drive stator and a Y-direction drive mover, the X-direction drive stator and the Y-direction drive stator being both fixed to the rack; the X-direction drive mover being fixed to the X-direction motion sub-stage, and the Y-direction drive mover being fixed to the Y-direction motion sub-stage;
the outer frame having a groove formed at where it adjoins the X-direction membrane set so that an inner side of the outer frame forms a thin and deformable X-direction motion sub-stage spring member, wherein the outer frame has an X-direction frequency adjusting mechanism for adjusting deformation of the X-direction motion sub-stage spring member, and the Y-direction motion sub-stage having a deformable Y-direction motion sub-stage spring member at where it adjoins the Y-direction membrane set, wherein the Y-direction motion sub-stage has a Y-direction frequency adjusting mechanism for adjusting the Y-direction motion sub-stage spring member, and
the Y-direction motion sub-stage having round recesses formed at inner corners thereof.

2. The stiffness-frequency adjustable XY micromotion stage based on stress stiffening of claim 1 , wherein an X-direction displacement sensor and Y-direction displacement sensor are provided at ends of the feed directions of the X-direction motion sub-stage and of the Y-direction motion sub-stage, respectively.

3. The stiffness-frequency adjustable XY micromotion stage based on stress stiffening of claim 2 , wherein the X-direction displacement sensor and the Y-direction displacement sensor are capacitive or inductive sensors.

4. The stiffness-frequency adjustable XY micromotion stage based on stress stiffening of claim 2 , wherein insulating layers are provided at non-working surfaces of the X-direction displacement sensor and of the Y-direction displacement sensor.

5. The stiffness-frequency adjustable XY micromotion stage based on stress stiffening of claim 1 , wherein the X-direction membrane set, the Y-direction membrane set, the X-direction motion sub-stage, the Y-direction motion sub-stage and the outer frame are integratedly formed.

6. The stiffness-frequency adjustable XY micromotion stage based on stress stiffening of claim 1 , wherein an X-direction voice coil motor has a magnetic stator and a coil mover that are separated by an interval in the Y direction as shown in the drawings, and a Y-direction voice coil motor has a magnetic stator and a coil mover that are separated by an interval in the X direction as shown in the drawings, thereby the driving mechanisms enable XY motion decoupling.

7. The stiffness-frequency adjustable XY micromotion stage based on stress stiffening of claim 1 , wherein the X-direction driver and the Y-direction driver are voice coil motors.

8. The stiffness-frequency adjustable XY micromotion stage based on stress stiffening of claim 1 , wherein the X-direction frequency adjusting mechanism comprises a first bolt that passes through the groove and has two ends connected to two sides of the groove, respectively, and the Y-direction frequency adjusting mechanism comprises a second bolt that passes through the Y-direction motion sub-stage and is connected to the working table.

9. The stiffness-frequency adjustable XY micromotion stage based on stress stiffening of claim 8 , wherein the X-direction frequency adjusting mechanism is a piezoelectric ceramic driver that passes through the groove and has two ends connected to two sides of the groove further comprises an X-direction piezoelectric ceramic plate through which the first bolt passes, and the Y-direction frequency adjusting mechanism is a piezoelectric ceramic driver that passes through the Y-direction motion sub-stage and is connected to the working table further comprises a Y-direction piezoelectric ceramic plate through which the second bolt passes.

10. A stiffness-frequency adjustable XY micromotion stage based on stress stiffening, comprising: an X-direction membrane set, a Y-direction membrane set, an X-direction motion sub-stage, a Y-direction motion sub-stage, an outer frame, an X-direction drive, a Y-direction drive, an X-direction displacement sensor, a Y-direction displacement sensor, a rack and a working table;
the outer frame being fixed to the rack; the elastic X-direction membrane set being arranged at two sides of the X-direction motion sub-stage, with one end thereof connected to an inner wall of the outer frame and an opposite end thereof connected to the X-direction motion sub-stage; the elastic Y-direction membrane set being arranged at two sides of the Y-direction motion sub-stage, with one end thereof connected to an inner wall of the X-direction motion sub-stage, and an opposite end thereof connected to the Y-direction motion sub-stage; the X-direction membrane set and the Y-direction membrane set being perpendicular to each other, and the working table being rigidly connected to the Y-direction motion sub-stage;
membranes in each of the X-direction membrane set and the Y-direction membrane set being parallelly arranged, and having longitudinal directions perpendicular to feed directions of the X-direction motion sub-stage and of the Y-direction motion sub-stage, respectively;
the X-direction drive comprising an X-direction drive stator and an X-direction drive mover, the Y-direction drive comprising a Y-direction drive stator and a Y-direction drive mover, the X-direction drive stator and the Y-direction drive stator being both fixed to the rack; the X-direction drive mover being fixed to the X-direction motion sub-stage, and the Y-direction drive mover being fixed to the Y-direction motion sub-stage; wherein an X-direction voice coil motor has a magnetic stator and a coil mover that are separated by an interval in the Y direction as shown in the drawings, and a Y-direction voice coil motor has a magnetic stator and a coil mover that are separated by an interval in the X direction as shown in the drawings, thereby the driving mechanisms enable XY motion decoupling;
the outer frame having a groove formed at where it adjoins the X-direction membrane set so that an inner side of the outer frame forms a thin and deformable X-direction motion sub-stage spring member, wherein the outer frame has an

Assignees

• Univ Guangdong Technology

Inventors

• Yang Zhijun
• Bai Youdun
• Chen Xin
• Gao Jian
• Yang Haidong
• Wang Meng
• Tang Hui

Classifications

• B23Q1/62

  with perpendicular axes, e.g. cross-slides · CPC title

• B23Q2230/004

  Using a cutting tool reciprocating at high speeds, e.g. "fast tool" · CPC title

• B23Q5/28

  Electric drives · CPC title

• B23Q2210/002

  Flexures · CPC title

• B23Q1/34 Primary

  Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements (sensitive elements capable of producing movement or displacement for purposes not limited to measurement G12B1/00) · CPC title