Laser annealing systems and methods with ultra-short dwell times
US-2016181120-A1 · Jun 23, 2016 · US
US10239155B1 · US · B1
| Field | Value |
|---|---|
| Publication number | US-10239155-B1 |
| Application number | US-201414265549-A |
| Country | US |
| Kind code | B1 |
| Filing date | Apr 30, 2014 |
| Priority date | Apr 30, 2014 |
| Publication date | Mar 26, 2019 |
| Grant date | Mar 26, 2019 |
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Described herein is a system for processing a workpiece that includes a plurality of lasers that each produces a laser beam pulse. The system also includes a laser control module that sequences temporal characteristics of the laser beam pulses. Additionally, the system includes a laser beam compensation module that shapes a near field intensity profile of at least one of the laser beam pulses and adjusts a path length of at least one of the laser beam pulses. The system also includes at least one laser beam position element that combines the laser beam pulses to produce a combined laser beam pulse at a surface of the workpiece.
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What is claimed is: 1. A system for processing a workpiece, comprising: a plurality of lasers each producing a laser beam pulse; a controller comprising a laser control module configured to generate a timing command and to send the timing command to a timing element that communicates a trigger signal, in response to the timing command, to each laser of the plurality of lasers, wherein each laser is configured to produce the laser beam pulse in response to receiving the trigger signal; laser beam compensation elements comprising shaping optics for each of the laser beam pulses, the shaping optics being separately controllable by the controller, wherein the shaping optics for any respective one of the laser beam pulses are configured to adjust a shape of a respective one of the laser beam pulses, a near field intensity profile of the respective one of the laser beam pulses, and a path length of the respective one of the laser beam pulses; laser beam position elements, receiving the laser beam pulses from the laser beam compensation elements and comprising path redirection elements for said each of the laser beam pulses, the path redirection elements being separately controllable by the controller, wherein the path redirection elements for any respective one of the laser beam pulses are configured to adjust a direction of the respective one of the laser beam pulses toward a surface of the workpiece such that the laser beam pulses converge toward each other and impact the surface of the workpiece; the laser control module further configured to control a timing of the trigger signal communicated to each laser of the plurality of lasers for controlling a timing of a production of the laser beam pulses; a laser beam compensation module of the controller configured to communicate with the laser beam compensation elements to control adjustment of the shaping optics for separately adjusting: a shape of each laser beam pulse such that the shapes of the laser beam pulses away from the surface of the workpiece are different and the shapes of the laser beam pulses at the surface of the workpiece are the same; and path lengths of the laser beam pulses differently such that the path lengths of the laser beam pulses are the same; and a laser beam position module of the controller configured to communicate with the laser beam position elements to control adjustment of the path redirection elements for adjusting a direction of the laser beam pulses to converge toward the surface of the workpiece so that the laser beam pulses produce a combined laser beam pulse at the surface of the workpiece. 2. The system of claim 1 , wherein said each laser beam pulse has a first energy, the combined laser beam pulse having a second energy greater than the first energy, and wherein the laser control module controls temporal characteristics and sequencing of the laser beam pulses based on a desired second energy of the combined laser beam pulse. 3. The system of claim 2 , wherein the first energy of said each laser beam pulse is the same. 4. The system of claim 2 , wherein the first energy of at least one of the laser beam pulse is different than the first energy of at least one other of the laser beam pulses. 5. The system of claim 1 , wherein controlling the timing of the production of the laser beam pulses comprises temporally delaying the production of the laser beam pulses relative to each other. 6. The system of claim 5 , wherein a delay between the laser beam pulses is set according to at least one of a desired duration and peak power P(t) of the combined laser beam pulse. 7. The system of claim 1 , wherein the laser beam position module is configured to communicate with the laser beam position elements to control adjustment of the laser beam position elements for adjusting the direction of the laser beam pulses toward the surface of the workpiece so that the laser beam pulses converge at a single point on the surface of the workpiece. 8. The system of claim 1 , further comprising a confining material overlaying the surface of the workpiece, wherein the confining material facilitates a peening of the workpiece. 9. The system of claim 1 , wherein the laser beam position elements comprise a plurality of scan heads. 10. The system of claim 1 , further comprising at least one laser beam diagnostic element that detects at least one characteristic of the laser beam pulses, wherein the laser control module adjusts sequencing of temporal characteristics of the laser beam pulses based at least partially on the at least one characteristic detected by the at least one laser beam diagnostic element. 11. The system of claim 10 , wherein the at least one characteristic of the laser beam pulses detected by the at least one laser beam diagnostic element comprises a power output. 12. An apparatus for controlling processing of a workpiece, comprising: a laser control module configured to generate a timing command and send the timing command to a timing element that communicates trigger signals, in response to the timing command, to a plurality of lasers that generate a plurality of temporally-delayed laser beam pulses in response to the trigger signals, wherein generation of the plurality of temporally-delayed laser beam pulses by the plurality of lasers is delayed relative to each other; a laser beam compensation module that commands shaping optics to control: a spatial shape of each temporally-delayed laser beam pulse such that shapes of the plurality of temporally-delayed laser beam pulses away from a surface of the workpiece are different and shapes of the plurality of temporally-delayed laser beam pulses at the surface of the workpiece are the same; and path lengths of the plurality of temporally-delayed laser beam pulses differently such that the path lengths of the plurality of temporally-delayed laser beam pulses are the same; and a laser beam position module that commands path redirection elements to control a redirection of each pulse of the plurality of temporally-delayed laser beam pulses, individually and separately from each other, and while the plurality of temporally-delayed laser beam pulses are separated from each other, towards a surface of the workpiece to converge, incoherently relative to each other, at the surface of the workpiece. 13. The system of claim 1 , wherein the laser beam pulses received by the laser beam position elements are parallel to each other. 14. The system of claim 1 , wherein the directions of the laser beam pulses received by the laser beam compensation elements are the same as the directions of the laser beam pulses received by the laser beam position elements.
comprising lenses · CPC title
Observing, e.g. monitoring, the workpiece · CPC title
by boring or cutting · CPC title
by shaping pulses · CPC title
Beam measuring devices · CPC title
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