Showerhead assembly and substrate processing apparatus
US-2024042463-A1 · Feb 8, 2024 · US
US10239073B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10239073-B2 |
| Application number | US-201715598625-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 18, 2017 |
| Priority date | Dec 14, 2016 |
| Publication date | Mar 26, 2019 |
| Grant date | Mar 26, 2019 |
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A system for circulating a sealer is provided. The system includes a circulation line, in which a sealer is circulated and a first circulation valve which is disposed in the circulation line and configured to control the circulated sealer. A supply line is branched from a front end of the first circulation valve and an applying gun which is disposed in the supply line, receives a sealer, and controls the sealer discharged to the outside through a nozzle.
Opening claim text (preview).
What is claimed is: 1. A system for circulating a sealer, comprising: a circulation line in which a sealer is circulated; a first circulation valve disposed in the circulation line and configured to control the circulated sealer; a supply line branched from a front end of the first circulation valve; an applying gun disposed in the supply line and configured to receive the sealer and control the sealer discharged to the outside through a nozzle; a supply valve configured to control the sealer transferred to the applying gun in the supply line; a cylinder disposed between the supply valve and the applying gun and configured to pressure-feed the sealer to the applying gun; a discharge line, through which the sealer remaining after the injection from the applying gun is discharged, and which is joined to the circulation line; a second circulation valve configured to control the discharged sealer in the discharge line; a robot in which the applying gun is disposed at a front end of an arm of the robot; and a controller configured to operate the robot, the applying gun, the supply valve, the cylinder, the first circulation valve, and the second circulation valve, the system for circulating a sealer vary circulating direction in a continuous applying mode, a short-term pause mode and a long-term pause mode, wherein in the continuous applying mode, in which an applying operation continues for a predetermined period of time, the controller is configured to open the first circulation valve, open the supply valve, operate the cylinder, open an outlet of the applying gun, and close the second circulation valve. 2. The system of claim 1 , wherein in the short-term pause mode, in which an applying operation is stopped for less than a predetermined period of time, the controller is configured to close the first circulation valve, open the supply valve, operate the cylinder, close an outlet of the applying gun, and open the second circulation valve. 3. The system of claim 1 , wherein in the long-term pause mode, in which an applying operation is stopped for a predetermined period of time or longer, the controller is configured to close the first circulation valve, close the supply valve, prevent operation of the cylinder, close an outlet of the applying gun, and close the second circulation valve. 4. The system of claim 1 , further comprising: a filling unit disposed so that the sealer is filled in the circulation line through a filling line connected to one side of the circulation line. 5. The system of claim 4 , wherein: the filling unit includes: a sealer storing unit in which the sealer to be supplied is contained; a filing pump configured to pump the sealer contained in the sealer storing unit to the circulating unit; and a filling motor configured to apply rotational force to the supply pump. 6. The system of claim 1 , further comprising: a temperature compensating unit disposed in the circulation line and configured to adjust a temperature of the circulated sealer within a predetermined temperature range. 7. The system of claim 6 , wherein the temperature compensating unit includes: a heater/cooler, configured to heat the sealer or cool the sealer by a supplied power source; and a heat radiator configured to absorb heat of the sealer and discharge the heat to the outside. 8. The system of claim 7 , wherein the heater/cooler includes a thermoelectric element and the heat radiator includes a heatsink and a cooling fan in which heat energy is stored. 9. The system of claim 7 , wherein the temperature compensating unit includes: a temperature detecting unit configured to detect a temperature of the circulated sealer. 10. The system of claim 1 , further comprising: a circulating unit disposed in the circulation line and configured to circulate the sealer along the circulation line. 11. The system of claim 10 , wherein the circulating unit includes: a filter configured to filter foreign substances included in the sealer; a pressure detecting unit configured to detect a pressure of the circulated sealer; and a circulation pump configured to circulate the sealer through the circulation line.
the objects being vehicle components, e.g. vehicle bodies · CPC title
characterised by flow controlling means, e.g. valves, located proximate the outlet (B05C5/0258, B05C5/0275 take precedence; supply valves upstream the coating head B05C11/1036) · CPC title
by relative movement of article and outlet according to a predetermined path · CPC title
incorporating means for heating the liquid or other fluent material, e.g. electrically · CPC title
Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter · CPC title
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