Sensor

Patent metadata

Field	Value
Publication number	US-10234429-B2
Application number	US-201615217436-A
Country	US
Kind code	B2
Filing date	Jul 22, 2016
Priority date	Jan 24, 2014
Publication date	Mar 19, 2019
Grant date	Mar 19, 2019

Abstract

According to embodiments, a sensor includes a structure body, a container, a liquid and a sensing unit. The structure body includes a supporter, and a film unit. The film unit includes a first region. The first region includes a first end portion supported by the supporter, and a first portion being displaceable. The film unit includes an opening. The container is connected to the structure body. A first space is defined between the film unit and the container. The liquid is provided inside the first space. The sensing unit senses a displacement of the first portion accompanying a displacement of the liquid.

First claim

What is claimed is:

1. A sensor, comprising:
a structure body including a supporter, and
a film unit including a first region and an opening, the first region including a first end portion and a first portion, the first end portion being supported by the supporter, the first portion being displaceable;
a container connected to the structure body, a liquid being provided between the film unit and the container; and
a sensing unit sensing a first portion displacement accompanying a liquid displacement.

2. The sensor according to claim 1 , wherein the liquid displacement occurs based on a sound wave applied to the container.

3. The sensor according to claim 1 , wherein
the film unit further includes a second region, the second region including a second end portion and
a second portion, the second end portion being supported by the supporter, and a first gap used as the opening is provided between the first portion and the second portion.

4. The sensor according to claim 3 , wherein
the second portion is displaceable,
the film unit includes:
a third region including a third end portion and a third portion, the third end portion being supported by the supporter, the third portion being displaceable; and
a fourth region including a fourth end portion and a fourth portion, the fourth end portion being supported by the supporter, the fourth portion being displaceable,

a second gap is provided between the first portion and the third portion,
a third gap is provided between the second portion and the third portion,
a fourth gap is provided between the second portion and the fourth portion, and
the sensing unit further senses:
a second portion displacement accompanying the liquid displacement;
a third portion displacement accompanying the liquid displacement; and
a fourth portion displacement accompanying the liquid displacement.

5. The sensor according to claim 1 , wherein
the supporter defines a space, and
at least one portion of the first portion is disposed between the space and the liquid.

6. The sensor according to claim 1 , wherein
the sensing unit includes a first sensing element provided at the first portion, and
the first sensing element has at least one of:
a change of a resistance occurring with the first portion displacement;
a change of a voltage of piezoelectricity occurring with the first portion displacement; or
a change of an electrostatic capacitance occurring with the first portion displacement.

7. The sensor according to claim 6 , wherein
the first sensing element includes:
a crystal layer of silicon including an impurity;
a first electrode connected to one portion of the crystal layer; and
a second electrode connected to one other portion of the crystal layer,

the liquid displacement includes a surface wave including a first wavelength, and
a distance between the first electrode and the second electrode is not less than 0.4 times and not more than 0.6 times the first wavelength or not less than 0.22 times and not more than 0.28 times the first wavelength.

8. The sensor according to claim 1 , wherein
the sensing unit includes a first sensing element provided at the first portion, and
the first sensing element has a change of a resistance accompanying the first portion displacement.

9. The sensor according to claim 8 , wherein
the first sensing element includes:
a crystal layer of silicon including an impurity;
a first electrode connected to one portion of the crystal layer; and
a second electrode connected to one other portion of the crystal layer, and

a direction from the first electrode toward the second electrode is aligned with one direction of the <110> direction or the <100> direction of the crystal layer.

10. The sensor according to claim 1 , wherein
the liquid has a first liquid surface and a second liquid surface, the first liquid surface being on the film unit side, the second liquid surface being on a side opposite to the first liquid surface, and
the second liquid surface includes a portion tilted with respect to a plane, the plane being perpendicular to a first direction from the container toward the supporter.

11. The sensor according to claim 10 , wherein
the film unit further includes a second region including a second end portion supported by the supporter,
the second liquid surface has a first front surface and a second front surface, the first front surface being on a side of the first end portion, the second front surface being on a side of the second end portion, and
a tilt direction with respect to the plane of the first front surface is reverse to a tilt direction with respect to the plane of the second front surface.

12. The sensor according to claim 1 , wherein a natural frequency of the liquid is not less than 0.8 times and not more than 1.2 times an integer multiple of 1 or more times a natural frequency of the container.

13. The sensor according to claim 1 , wherein
the first region includes a first opposite end on a side opposite to the first end portion,
the sensing unit includes a first sensing element disposed at a first position inside the first portion, and
a distance between the first end portion and the first position is shorter than a distance between the first opposite end and the first position.

14. The sensor according to claim 1 , wherein a length of the first region along an extension direction is shorter than a length perpendicular to a first direction and perpendicular to the extension direction, the extension direction being from the first end portion toward the first portion, the first direction being from the container toward the supporter.

15. The sensor according to claim 14 , wherein
the sensing unit includes a second sensing element and a first sensing element provided at the first portion, and
a direction from the first sensing element toward the second sensing element intersects the extension direction.

16. The sensor according to claim 1 , wherein the opening is positioned at a central portion of the film unit.

17. The sensor according to claim 1 , wherein
the film unit includes a central portion and a peripheral portion, the peripheral portion being around the central portion, and
the opening is positioned at the peripheral portion.

18. The sensor according to claim 1 , wherein the film unit has a gammadion cross configuration.

19. The sensor according to claim 1 , wherein
the sensing unit includes:
a first sensing element provided at a first position of the first portion; and
a second sensing element provided at a second position of the first portion,

the first region includes a first opposite end on a side opposite to the first end portion, and
a direction from the first position toward the second position is aligned with a direction from the first end portion toward the first opposite end.

20. The sensor according to claim 1 , wherein
the film unit has a first surface and a second surface, the first surface being on a side of the liquid, the second surface being on a side opposite to the first surface,
the sensing unit includes:
a first sensing element provided at the first surface of the first portion; and
a second sensing element provided at the second surface of the first portion, and

at least one of the first sensing element or the second sensing element has at least one of:
a change of a resistance accompanying the first portion displacement;
a change of an electrostatic capacitance accompanying the first portion displacement; or
a

Assignees

• Univ Tokyo
• Toshiba Kk

Inventors

• Shimoyama Isao
• Matsumoto Kiyoshi
• Nguyen Binh Khiem
• Takahashi Hidetoshi
• Nguyen Minh Dung
• Tamura Hiroto
• Pham Quang Khang
• Omori Takahiro
• Nishimura Osamu
• Kasahara Akihiro

Classifications

• G01N29/2406

  Electrostatic or capacitive probes, e.g. electret or cMUT-probes · CPC title

• G01H17/00

  Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves, not provided for in the other groups of this subclass · CPC title

• G01N29/2437

  Piezoelectric probes · CPC title

• H04R2410/00

  Microphones · CPC title

• G01N29/14 Primary

  using acoustic emission techniques {(echo of particles G01N29/046; measuring mechanical vibrations or acoustic waves in solids in general G01H1/00)} · CPC title