Wafer drying apparatus and wafer drying method

Patent metadata

Field	Value
Publication number	US-10229841-B2
Application number	US-201615186352-A
Country	US
Kind code	B2
Filing date	Jun 17, 2016
Priority date	Jun 22, 2015
Publication date	Mar 12, 2019
Grant date	Mar 12, 2019

Abstract

A wafer drying apparatus capable of preventing formation of a watermark is disclosed. The wafer drying apparatus includes: a conveying mechanism configured to convey a wafer in a drying chamber; an inert-gas jet nozzle disposed above the conveying mechanism and configured to form a descending jet of an inert gas; and a liquid suction nozzle disposed upstream of the inert-gas jet nozzle with respect to a conveying direction of the wafer. A distance between the liquid suction nozzle and a surface of the wafer when the wafer is being conveyed by the conveying mechanism is in a range of 1 mm to 2 mm.

First claim

What is claimed is:

1. A wafer drying apparatus comprising:
a conveying mechanism configured to convey a wafer in a drying chamber;
an inert-gas jet nozzle disposed above the conveying mechanism and configured to form a descending jet of an inert gas, the inert-gas jet nozzle comprising a slit nozzle having a slit;
a downstream-side liquid suction nozzle disposed upstream of the inert-gas jet nozzle with respect to a conveying direction of the wafer, a distance between the downstream-side liquid suction nozzle and a surface of the wafer when the wafer is being conveyed by the conveying mechanism being in a range of 1 mm to 2 mm, the downstream-side liquid suction nozzle being located on a line extending perpendicularly from a center of the slit; and
an upstream-side liquid suction nozzle disposed upstream of the downstream-side liquid suction nozzle, a distance between the downstream-side liquid suction nozzle and the upstream-side liquid suction nozzle being one-third to one-half of a diameter of the wafer.

2. The wafer drying apparatus according to claim 1 , wherein the liquid suction nozzle has a cylindrical shape.

3. The wafer drying apparatus according to claim 1 , wherein the slit nozzle is longer than a diameter of the wafer.

4. The wafer drying apparatus according to claim 1 , wherein the inert-gas jet nozzle is inclined at an angle ranging from 45 degrees to 85 degrees with respect to the surface of the wafer when the wafer is being conveyed by the conveying mechanism.

5. The wafer drying apparatus according to claim 1 , wherein the inert-gas jet nozzle is located at a distance in a range of 1 mm to 4 mm from the surface of the wafer when the wafer is being conveyed by the conveying mechanism.

6. A wafer drying apparatus comprising:
a conveying mechanism configured to convey a wafer in a drying chamber in which an inert gas has been supplied;
an inert-gas jet nozzle disposed above the conveying mechanism and configured to form a descending jet of an inert gas toward the wafer, the inert-gas jet nozzle comprising a slit nozzle having a slit;
a downstream-side liquid suction nozzle disposed upstream of the inert-gas jet nozzle with respect to a conveying direction of the wafer, a distance between the downstream-side liquid suction nozzle and the inert-gas jet nozzle being in a range of 1 mm to 5 mm, the downstream-side liquid suction nozzle being located on a line extending perpendicularly from a center of the slit; and
an upstream-side liquid suction nozzle disposed upstream of the downstream-side liquid suction nozzle, a distance between the downstream-side liquid suction nozzle and the upstream-side liquid suction nozzle being one-third to one-half of a diameter of the wafer.

7. A wafer drying method comprising:
forming a descending jet of an inert gas in a drying chamber;
sucking a liquid film existing on a surface of a wafer by a downstream-side liquid suction nozzle and an upstream-side liquid suction nozzle, disposed upstream of the downstream-side liquid suction nozzle, to reduce a thickness of the liquid film to 2 mm or less, while conveying the wafer in the drying chamber, a distance between the downstream-side liquid suction nozzle and the upstream-side liquid suction nozzle being one-third to one-half of a diameter of the wafer; and
pushing the liquid film out of the wafer by the descending jet of the inert gas.

8. The wafer drying method according to claim 7 , further comprising:
keeping a concentration of oxygen in the drying chamber at 0.5% or less.

Assignees

• Ebara Corp

Inventors

• Imai Masayoshi
• Hamada Satomi

Classifications

• H10P72/3314

  Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers · CPC title

• H10P72/0406

  for cleaning followed by drying, rinsing, stripping, blasting or the like · CPC title

• F26B21/50

  Ducting arrangements from the source of air or other gases to the materials or objects being dried · CPC title

• F26B21/40

  using gases other than air · CPC title

• H10P72/0408 Primary

  for drying · CPC title