Two-dimensional material-based accelerometer

Patent metadata

Field	Value
Publication number	US-10228387-B2
Application number	US-201414546877-A
Country	US
Kind code	B2
Filing date	Nov 18, 2014
Priority date	Jun 16, 2014
Publication date	Mar 12, 2019
Grant date	Mar 12, 2019

Abstract

This disclosure provides systems and methods for a two-dimensional material-based accelerometer. In one embodiment, an accelerometer comprises a substrate; a membrane suspended over an opening in the substrate to form a suspended membrane, wherein the membrane is composed of a two-dimensional material; a mass structure coupled to the suspended membrane; and wherein the mass structure distorts the suspended membrane about a first axis in response to an applied acceleration providing a first change in a conductance of the suspended membrane so that the applied acceleration along the first axis can be detected.

First claim

What is claimed is:

1. An accelerometer device assembly comprising:
a substrate;
a membrane suspended over an opening in the substrate to form a suspended membrane having a suspended portion and a fixed portion, wherein the membrane is composed of a two-dimensional material;
a mass structure coupled to the suspended portion of the suspended membrane;
an electrically charged gate positioned such that there is a distance between the gate and the membrane;
a first electrode coupled to the membrane at least partially at the fixed portion;
a second electrode coupled to the membrane at least partially at the fixed portion and substantially opposite to the first electrode; and
a clamping structure disposed around the suspended membrane, the clamping structure defining a circular pattern of the membrane, and the clamping structure comprising four legs each projecting away from the circular pattern of the membrane and being substantially equally offset from two adjacent legs,
wherein an applied acceleration on the mass structure distorts the membrane about a first axis, the distortion of the membrane about the first axis changing the distance between the gate and the membrane from a first distance to a second distance, and the change from the first distance to the second distance causing a change in conductance of the membrane that allows detection of the applied acceleration about the first axis, the change in conductance is measured as a current and voltage at the first and second electrodes.

2. The accelerometer device assembly of claim 1 , wherein the two-dimensional material is graphene.

3. The accelerometer device assembly of claim 1 , wherein the mass structure is composed of a photoresist.

4. The accelerometer device assembly of claim 1 , wherein a cross-section of the mass structure is circular.

5. The accelerometer device assembly of claim 1 further comprising a clamping structure disposed around the suspended membrane and clamping at least a portion of the fixed portion.

6. The accelerometer device assembly of claim 1 , wherein the mass structure is positioned at about a center of the membrane.

7. The accelerometer device assembly of claim 1 , wherein the suspended membrane has a pretension that is tuned at least in part based on the clamping structure.

Assignees

• Kulite Semiconductor Products Inc

Inventors

• Hurst Adam
• Lee Sunwoo
• Hone James

Classifications

• G01P15/125

  by capacitive pick-up · CPC title

• G01P15/123

  by piezo-resistive elements, e.g. semiconductor strain gauges · CPC title

• G01P15/18 Primary

  in two or more dimensions · CPC title